INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

Bulk and Process Gas Distribution System with Total Gas Management for Semiconductor/MEMS Facility Vendor to design, fabricate, supply, install and commission (QA/QC Analytical tests) the requisite Gas facilities. Complete requirements of gas facility and the distribution network thereof to be met as per the following specifications. Supplier to provide detailed engineering data as part of the work. The detailed Piping & Instrumentation Diagram, Mechanical and Process design, Utility Matrix, Piping routing, system configurations, material list and make/brands of all components and equipment, bill of materials, PERT chart/Gantt etc to be submitted along with the technical bid. Bulk Gases: S. No. Gas 1. UHP Nitrogen 2. Commercial Nitrogen 3. UHP Oxygen 4. Helium Specialty (Process) Gases: S. No. 1. 2. 3. 4. 5. 6. 7. 8. 9.

Gas Ammonia (NH3) Silane (SiH4) Dichloro silane (SiCl2H2) Diborane (B2H6) (5% in Helium) Hydrogen (H2) Argon (Ar) Octafluorocyclobutane (C4F8) Sulfur hexafluoride (SF6) Forming gas (4% H2/ N2)

Scope of Work: 1) Construction of Gas pad a. Enclosed space, single level to be built preferably with pre-fabricated, fire proof and water resistant modules (area marked in the enclosed drawing) which can take the requisite load and should be well ventilated. b. The gas pad design and construction to be ex proof area. 2) Bulk Gases

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

a. Manual Gas Cabinet to store the cylinders with view ports covered with wire mesh. b. UHP nitrogen and Commercial Nitrogen, UHP Oxygen and Helium manifolds to be built by the vendor with automatic changeover system as per the tools gas requirement specified in the attached sheet. c. Tubes and valves should be of electropolished, SS 316L with no more than 0.1 microns roughness and VCR fittings to be used. d. Double stage regulators to be considered. e. Appropriate isolation valves and 0.3 and 0.5 microns line filters to be provided for each gas. f. Wall mounted in line regulator, high flow valves and non-return valves for each gas line. 3) Gas Cabinets (semi-automatic)- Vendors to design and build or supply and install gas cabinets for process gases listed above. All facility connections should be located on top of the cabinet enclosure and sides of control enclosure. a. For storage and supply of toxic, flammable or corrosive gases (see attached list of gases and gas bottle sizes) as per SEMI standards for gases numbered 1 to 5 under Specialty gases list above and gas rack (closed cabinets) for gases numbered 6-8 under Specialty gases list. b. Supply panel of gas cabinet- Stainless steel plate to mount components. Primary regulator with inlet and outlet pressure gauges to provide appropriate flow rates and pressure, diaphragm valves, flow limit switches, pressure relief valve, check valves etc. of semiconductor industry accepted make. Gas cabinet and all components to be process gas compatible. c. Automatic Emergency shut off valves on detection of gas leak and/or loss of cabinet ventilation. The cabinet to have provision for placement of sensor head for toxic gas leak detection. d. Check valves for protection from back streaming of gas. e. Automated purge cycles through touch panel based system. Cylinder replacement to be manual. f. All components to be electropolished 316L SS with surface roughness of no more than 0.1 microns. g. Line filters between regulator and cylinder of 0.5 microns and 0.003 microns. h. Dual gas cylinder cabinets for compatible gases to be considered. i. Appropriate number of pigtails to be provided on the gas panel. j. Cabinets to have connections for exhaust ducts for continuous ventilation. k. Integrated sprinkler head wherever required with a fuse rating of 70-80oC. Safety measures to be provided as per the requirement for each gas. l. VCR fittings to be considered in the design.

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

m. Key operated, self latching doors with two point locking mechanism to disable unauthorized access. n. Safety glass viewing windows with wire reinforcement. o. Adjustable cylinder shelf for small cylinders installment. Perforation in the cylinder shelf to provide proper air circulation around the cylinder. Cylinder restraints to ensure that all cylinders are securely held in place during operation and storage. p. Provision of regulator and line heating system with control systems to be provided with low pressure gas cylinders wherever required. q. Venturi drive valves for both low and high pressure side venting. The vent lines to be connected to exhaust. r. The gas cabinets to be user friendly for maintenance of gas control panels without removing the gas cylinder. s. Neoprene gaskets around door to ensure a positive seal. t. Standard inlet air louver fitted with an inlet filter. u. Vendor to provide Test certificates, certificate of conformity, operating manual and general assembly drawings from the OEM. v. Double stage regulators to be used in gas cabinets and gas distribution panels. w. Gas cabinet construction material and finishing (paint etc.) to be as per standards. All seams to be fully welded. x. Proper audio-visual alarm system to be provided. 4) Gas Cabinets (manual) a. For non-toxic, inert gases (see attached list of gases and gas bottle sizes) 5) Valve Manifold Boxes/Valve Manifold Panels a. VMBs to be tailor made or 8/4 sticks. b. All manifolds to be orbital welded and fully leak checked to at least 10-9 mbar.ltr/sec. c. VMBs to have provision for fire suppression. 6) Design and Installation of Specialty and Bulk Gas Piping Distribution networkVendor to design and build distribution pipeline networks from each gas cabinet and gas distribution panels to various process tools with appropriate components like valve manifold boxes and valves, regulators, excess pressure valves, non-return valves etc. as required. a. Coaxial, electropolished 316L SS pipeline for toxic gases as and where required. Surface roughness not to be more than 0.1 microns. The coaxial lines to be vacuum type and not nitrogen purged type. b. Gas line with heater integrated for Diborane gas. c. One spare Nitrogen gas line to be provided in each bay. d. Civil work related to gas piping to be in the scope of the vendor.

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

e. All clamps and support material used in the clean room should be clean room compatible. f. Proper labeling of the tubes at the origin and termination to be carried out for clear identification. g. Vendor to provide the purity certificates of gases to be used in welding or other testing/calibration purposes. h. The gas lines to be tested and validated for pressure, particles, leak, oxygen and moisture as per SEMI standards. A document containing the specifications of these analytical tests to be provided by the vendor. Certificates of validation to be provided by the vendor. i. Helium leak test- to be carried out with dry vacuum pump having a leak detection capability upto 10-11 mbar.ltr/sec and should pass at least 10-9 mbar.ltr/sec ii. Particle count- as per SEMI standards for particle size upto 0.1 microns in pressurized gas flow. iii. Oxygen content- ≤1ppm iv. Moisture content- ≤1ppm v. Pressure test- Tubes to be held pressurized at 1.1 times the operating pressure and tested for at least 24 hours. 7) Gas monitoring and Safety Sensorsa. Gas cabinets and VMBs to be monitored by Toxic gas monitoring. b. All alarms to be connected by hard wire to the Toxic Gas Monitoring system and to the control room. c. There should be appropriate hooters installed at acceptable distances for gas alarm. 8) Tool hook-upa. Vendor to hook up the gas facility lines and the required safety features to the process tool. b. Package of tool install as per each tool requirement. c. Vendor should have a proven experience in design and installation of the facilities for semiconductor tools. 9) Fire/Smoke detection and fire suppression system for complete Clean room facility and the associated utility/storage areas. a. Automatic fire detection and suppression system to be installed in the clean room, utility area and the gas pad area for A, B and C class of fire. b. Automatic control and display panels, audio and visual alarms, smoke and heat detectors, UV-IR detectors, Clean room compatible suppressant system. c. The suppressant to be a clean agent and have a short environment lifetime and zero ozone depleting potential. The material should also be ISO certified.

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

d. e. f. g. h.

Mention the discharge time of the suppressant. Provision of manual trigger of suppressants to be present. The system to be designed for Modular and/or manifold use. Fire panel to be sub-divided into zone system. The design/installation/commissioning/ testing of the fire detection and suppression system to be as per NFPA standards. i. Pipes and manifolds should be of M.S., duly painted, no particulate material and pressure tested. The spray nozzles in the clean room to be of appropriate clean room compatible material. j. The contractor to show a free live demonstration of gas flooding by simulation. 10) System configuration (Hardware and Software) SCADA and HMI based for Toxic Gas Monitoring and control (PLC)a. Human Machine Interface (HMI)- User friendly interface of the monitoring and control software. PC to be provided by the vendor. b. All hook ups from the sensors and other areas, cylinders etc under the scope of the vendor. c. Appropriate alarms and visual colour codes required in the software. d. Gas cylinders to be shut off automatically in case of any leak detection, with appropriate shut off cycle followed according to the gas. 11) Exhaust to Gas Cabinets and VMBs- The ductwork materials used must be compatible with intended gas as per safety standards and shall not be made from a combustible material. 12) Auto changeover gas manifold with pre-purging, post-purging and of required specifications. 13) All fittings to be of weld/VCR type and should include Diaphragm valve and check valve for ultra high pure application. 14) Provision for alternate and additional future connections. 15) Diaphragm valves and check valvesa. Maximum working pressure- as per the requirement at each tool (list attached) b. Electropolished SS with roughness no more than 0.15 microns. c. Temperature range: -10oC to 150oC d. Certified He leak rate less than 1 x 10-9 mbar ltr/sec e. Panel or back mounted f. End Connection: please specify Preferred Brands: S. No. Item Brand 1. Toxic Gas monitoring (PLC, Siemens, Omron, Mitsubishi, Allen Bradley, SCADA and HMI) Delta 2. Gas Cabinets & Gas Control Norcimbus, KAS, Standard Semiconductor

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

3. 4. 5. 6.

Panels Gas Regulators and components High Purity Piping Fire Suppression System Gas Detectors

Industry Accepted Makes other Parker, Fujikin, Swagelok, Rotarex Valex, Dockweiler, Calamo, Sandvik Honeywell, Dow Honeywell, Drager, MDA, Bionics

Vendor has to demonstrate post installation/commissioning performance of all the installed services for compliance to the required specifications. Eligibility criteria: 1) Vendor must have at least 5 years of experience in design, installation, commissioning and validation of specialty gases and their distribution thereof. 2) Vendor should have executed at least two projects on a “Turn-key” basis for semiconductor fabrication facility for total gas management (Bulk and process gases: toxic, pyrophoric, corrosive and inert gases). The project should include but not limited to gas handling and distribution, gas monitoring and control. Vendor to provide certificate of completion of such projects from the organization along with the details of scope of work of the projects. 3) Vendor must have executed projects related to total gas management of worth not less than 2Crores, against a single order/tender. The relevant copies of the orders to be submitted along with the bid. The contact details of the clients for the successfully completed project or any ongoing project to be provided by the vendor. 4) The bidder should have an annual turnover of 10 Crore or above per annum for the last 3 years and are required to submit the audited financial statements for this period. 5) Vendor should have their establishment in India or at least have their branch office/ representative office in India Or undertake a commitment to support effective execution and monitoring of the project without any delay. 6) Vendors satisfying all the eligibility criterions should only submit the tender. If any of the conditions mentioned under the “eligibility criterions” are not fulfilled, the offer would be rejected. No correspondence in this matter will be entertained. General Terms and Conditions: 1) All the equipment(s) required for validation to be arranged by the vendor. 2) The installation site can be surveyed by the bidder with prior appointment from the IIT Bombay team before submission of bid. 3) Vendor to provide details of the technical capability of the team and the organization with respect to experience and qualification of the team personnel and equipment for the installation and integration of various services. 4) Vendor has to provide the details of the service providers involved by them for the project. Service providers especially for Orbital and PVDF welding should be certified

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

and have vast experience. The certificate for the same to be submitted. The list of completed and successful projects executed by the service provider to be submitted. 5) Vendor has to provide the calibration certificates for all testing equipment. 6) Vendor to fabricate the facility as per the P&ID line diagrams (as submitted) by orbital welding. Any changes made in the same needs to be substantiated with proper reasons and discussed with the IIT Bombay team before execution. Welding coupons and details to be provided as a part of the final report. Before start of the actual welding or on change of cylinder, a sample weld (coupon) should be performed. 7) Pre-inspection of panels at site. 8) The gases and other consumables and equipment required by the vendor for welding, testing and calibration of systems to be in the scope of the vendor. The calibration of the welding system to be carried out whenever there is a change in the cylinder and the report generated to be submitted to IITB engineers. 9) The Emergency Response Plan for the shut-off of toxic gases in case of leaks to be provided by the vendor. 10) The Standard Operating Procedure of each gas cabinet, toxic gas monitoring and control system and other equipment to be provided as documentation by the vendor. 11) Vendor shall quote for approved makes only as indicated in the tender document. Deviation if any must be stated in the compliance statement. 12) Vendor to provide quality certificates from the OEM of all the materials and equipment supplied with all relevant details provided. 13) All the necessary tools, consumables and manpower required for installation, commissioning and validation to be arranged by the vendor. 14) All industrial safety practices to be followed during the implementation of the project. 15) A 2 year warranty for the components and all installations to be provided by the vendor. During warranty period, vendor to carry out regular monitoring of the installation and carry out necessary repairs or replacements, if required. 16) Appropriate training to be provided to 2 staff members of IIT Bombay employed for the facility, with respect to the operation and first level maintenance and monitoring. Vendor should also train the staff to carry out routine measurements of all utility parameters. The vendor must also provide a set of document detailing all protocols. The person should also be trained for purging and changing cylinders and first level of accident containment. 17) Technical presentations will have to be made by the vendors if required by the IIT Bombay team. The place, date and time would be notified to the vendors by the IIT Bombay team. During such presentations the team representing the vendor should be competent enough to give technical details if raised by the IIT Bombay team. No video conferencing or teleconferencing will be entertained for such presentations. 18) Vendors are requested to submit Technical and Commercial bids in two sealed envelopes marked separately. Both these envelopes should be put in a bigger cover which should

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

also be sealed and duly superscribed with the tender number and due date. All terms and conditions of Technical, Commercial and EMD should be part of the Technical bid. The technical evaluation will be carried out by an expert committee of IIT Bombay and the committee will shortlist the vendors. The technically shortlisted vendors only will be considered for commercial evaluation. The vendors may be invited for any clarifications, if and when the committee deems it to be necessary in the process of Technical and commercial evaluation. The vendor should also submit Bill of Quantities (BOQ) along with the Technical Bid (without the pricing) and Commercial bid (with pricing). Note: 1) Please note that and IIT Bombay is eligible for customs duty exemptions for research purpose under 51/96 notification and excise duty under 10/97 notification. All the documents under this notification will be provided to the vendor to enable the clearance of goods, whenever required. Please state clearly that this certificate is required. 2) The vendor is required to mention the taxes and duties separately and also show the grand total as per price bid format. 3) The duration of supply, installation and validation of the total project is 2 months from the date of award of contract.

INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS  MANAGEMENT  DIVISION

 Direct : (+91­22) 2576 8800 (DR) / 8803 (Local) / 8804 (Import) /  8805  (Enquiry & Bill tracking), 8802(Progress)  Email : [email protected]

Previous Supply Orders format  Name of the Firm ___________________________________

Order  placed by (Full  address of  Purchaser )

Description  Orde and  Value  r No.  quantity of  of  and  ordered  Order Date equipment

Date of  comple tion of  deliver y as  per  contrac t

Remarks  indicating  reasons  for late  Has the  delivery, if  Equipment  any and  being installed  justificatio satisfactorily  n for price  (Attach a  difference  Certificate from  of their  the Purchaser/  supply  Consigner) order &  those  quoted to  us

Contact  Person along  with  Telephone  No., Fax No.  and e­mail  address. 

Signature and Seal of the Manufacturer / Bidder ________________________ Place

 

Date : _____________________

:

 

_____________________