Wearable MEMS Sensor requirements Shanghai, 14th of May 2014 Leopold Beer, Regional President Asia Pacific Bosch Sensortec

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MEMS Sensors for Wearables

Agenda 

The MEMS Industry today

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State of the art solution portfolio and challenges

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Requirements for next generation & wearable solutions

Bosch Sensortec – The MEMS technology leader

Bosch Sensortec

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MEMS Sensors for Wearables

MEMS is microscopic fascination “MEMS” = “Micro-Electro-Mechanical System” 

MEMS are miniature systems which usually combine tiny mechanical structures with electronic circuits. Typical individual structures have a size of a few µm

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Bosch Engineers invented the DRIE process that is the basis for all MEMS manufacturing today

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MEMS element

ASIC

MEMS Sensors for Wearables

Bosch – Broad Application MEMS sensor supplier Out of one hand MEMS sensors, actuators and solutions Bosch Sensortec

Akustica

Bosch Connected Devices & Solutions

Automotive Electronics

CE

CE

CE & Industrial

Automotive

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Accelerometers

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Geomagnetic sensors

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Gyroscopes

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Pressure sensors

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Humidity sensors

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Combo sensors

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ASSNs

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MEMS microphones

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Smart sensor/ actuator nodes

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Embedded SW & algorithms

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Customized IoTS sensor & actuator solutions

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Accelerometers

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Angular rate

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Pressure sensors

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Mass flow sensors

MEMS Sensors for Wearables

Bosch MEMS sensor shipments

3000

2000

Bosch Sensortec

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2013

2012

2011

2010

2009

2008

2007

2006

2005

2004

2003

2002

2001

2000

1999

1998

1997

0

1996

1000

1995

Cumulated production volume (million pcs.)

4000

MEMS Sensors for Wearables

MEMS a quite fragmented market Top 20 MEMS Manufacturers in Revenue

Source: IHS Technology, March 2014

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MEMS Sensors for Wearables

Bosch Sensortec Strategy

Industry broad-liner Technology broad-liner

• Broad application portfolio • Broad technology portfolio

• Application focus • Broad technology portfolio

Technology Focus • Application focus • Technology focus

2006

2011

2014

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2016

MEMS Sensors for Wearables

Requirement: Broad technology portfolio Inertial

Geomagnetic

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Accelerometer

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eCompass

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Gyroscope

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GeoMag

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IMU

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9-axis

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Magnetic Gyro

Environmental

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Barometric Pressure Integrated Environmental Unit

Sensor Clusters

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Sensor Hubs

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ASSN

Microphones

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Application Specific sensor nodes 

Analog and digital MEMS microphones (Akustica) High quality voice input for mobile devices

Sensor data-fusion software ties everything together Bosch Sensortec

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MEMS Sensors for Wearables

Solutions for all applications 3-axis

6-axis

6+3-axis

9+3-axis

BMM BMC

BMC+BMG

BMA

BMI

BMI+BMM

1 1

BMG

FusionLib: BSX 3.5*

FusionLib: eCompass3.2 BSX3.5

FusionLib: BSX3.5

-BSX3.5 -BNO (inc. SW for Sensor Hub) -BNx (inc. SW for ASSN**)

Different applications require different solutions Bosch Sensortec

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*Bosch Sensortec Sensor Data Fusion **Application Specific Sensor Node

MEMS Sensors for Wearables

What's Next ? Bosch Sensortec

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MEMS Sensors for Wearables

Waves of MEMS sensor proliferation Internet of Things and Services (IoTS) Wearables

3rd wave

Consumer Electronics 2nd wave Automotive 1st wave

1990

2000

2010

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2020

MEMS Sensors for Wearables

Applications on parallel evolution paths 

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Automotive  New applications related to driver assistance arising  Integration trend and sensor function (platform) clustering  Distributed intelligence sensor networks Consumer electronics (biggest market today)  Development further driven by smartphone's & tablets  SiP & SoC integration goes in parallel (application driven)  Total integrated solutions (HW & SW) are the trend New evolving markets  New applications related to wearable's and IoTS  Will follow own integration rules – application driven  Sensor nodes, smart switches and tags will be main categories

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MEMS Sensors for Wearables

Market evolution Higher Integrated Functionality Wearable Devices

IoT Nodes

(integrating sensors)

(multiple sensors, µC and RF link)

New

New Market

Market

Lower Power Budget

IoT Tags

Smart Switches

(Sensor & RF-Link)

(event type sensors)

New Market

Smart Phone Sensors

Market

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Higher Power Budget

MEMS Sensors for Wearables

Top Level Product Requirements Wearable Devices

•Standard bus interfaces •Integrated data processing •Sensor integrated power management •Combo sensors

IoT Nodes

•Wireless Interfaces (TCP/IP capable) •Programmable & Reconfigurable (OTA) •System power management •Combo sensors

Lower Power Budget

Smart Switches

IoT Tags

•Interrupt engine & interface •Integrated data processing •Sensor integrated power management •One parameter sensors

•Wireless Interfaces (TCP/IP capable) •Configurable (State Machine)) •System power management •One or multiple parameter sensors

Lower Integrated Functionality

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MEMS Sensors for Wearables

The path towards new (interdependent) solutions Higher Integrated Functionality Wearable Devices

IoT Nodes

New

New

Components

Higher Power Budget

Lower Power Budget Smart Switches

IoT Tags

New

New

Components

Lower Integrated Functionality

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MEMS Sensors for Wearables

Key Component Criteria for Wearable devices Integrated Functionality (Clusters) Component Size

Power Consumption

Specific Wearable requirements

Conflicting requirements – to be solved by technology Bosch Sensortec

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MEMS Sensors for Wearables

Key Trend: sensor clusters Inertial & Magnetic Sensor Cluster • Integrated 9-axis (accel., mag., gyro) • Integrated microcontroller • Integrated sensor data fusion software

Environmental Sensor Clusters • Barometric pressure sensors • Humidity sensors • Temperature sensors

Acoustical Sensor Clusters • Acoustical microphones • Microphone arrays control

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MEMS Sensors for Wearables

Clustering is package & application driven Closed Packages Packages IClosed nertial sensors Geomagnetic • Inertial & sensors Geomagentic sensors IMU & eCompass • IMU & eCompass 9-axis Nodes • 9-axis nodes

Media port packages • Barometric pressure sensors • Integrated Environmental Unit • Acoustical microphones

Window packages • Optical in port • Optical out port

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MEMS Sensors for Wearables

New: Integrated Environmental sensor BME280 

Sensing: pressure, temperature and humidity @ 15 µA 

Small (2.5 x 2.5 mm²) but excellent performance

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Accuracy tolerance of ±3 %RH (typ @25 °C for humidity)

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Response time 1 S for humidity

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Absolute accuracy: typ ±1 hPa after soldering (950...1050 hPa, 0...+40 °C)

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MEMS Sensors for Wearables

New: Application Specific Sensor Node

BNO070, based on 9-axis BNO055, incorporates Hillcrest’s SH-1 software optimized for head-mounted displays (HMDs)

Absolute orientation solution for head mounted displays (HMD) Bosch Sensortec

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MEMS Sensors for Wearables

Thank You, Questions ? Bosch Sensortec

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