MEMS Flow Sensor Technology .......2 Battery Operated Mass Flow Meters .......3 Mass Flow meters for Industrial Applications .......5 Insertion Mass Flow Meters .......7 General Purpose Mass Flow Meters .......9 Mass Flow Sensors .......11 Mass Flow Sensors for Medical Applications .......13 Concentration/Mass Flow Sensors .......15 OEM Products .......16
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www.Siargo.com
2006 Siargo MEMS Flow Product Catalog
Siargo, Ltd. is dedicating to provide proprietary leading MEMS flow sensors, modules and flow meters products to meet customers’ requirements for gas metrology. In addition to the products listed in this catalog, we can also provide customized design and/or products. For further information, please contact the company (address listed at the back cover) or visit www.Siargo.com.
Siargo’s proprietary MEMS mass flow sensors provide accurate inline mass flow metrology and can be customized to the specification when required. The MEMS flow sensors are manufactured with unique MEMS process with high reliability. Multiple sensor are integrated on a single MEMS chip that can measure gas flow from 0 . 0 1 m/s to 6 5 m/s. The intelligent electronics are specially designed for small signal process to ensure the accuracy. The sensors measure flow via the thermal mass flow metrology principle that detect the gas flow speed via the temperature changes by the flow. On the chip, a micro-heater establishes a uniform temperature field around it at no flow condition. When there is flow, the flow will carry away heat causing the temperature field changes that depend on both the flow speed and the media mass. Once calibrated, the sensors can then readily measure the mass flow of the flow media. The intelligent electronics design based on the sensors formulated into gas measurement apparatus that can be used for various applications. The mass flow can be easily converted into volumetric flow with the
units of choices. Compared to the traditional thermal mass flow meters, Siargo’s offers utilize multiple sensors that further reduce the dependence on the environment factors. The MEMS flow sensors are small in size that would not introduce pressure drop inside the flow channels. Such gas metrology apparatus would then be completely independent of flow media temperature and pressure. The MEMS mass flow sensors are made using a process similar to the integrated circuit chips that are highly consistent and reliable, which further simplify the manufacture process and reduce the cost. The sensor surface is passivated with materials of high thermal conductivity and low surface energy that help to reduce the micro-particle stiction. The micro-heater on the chip inside a relatively large flow channel would not cause the thermal convection and hence the offset of the sensors is very stable. More importantly the Siargo’s MEMS flow sensors are specially designed with low power consumption concept that opens door for mass deployment in various industrial and consumer applications.
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2006 Siargo MEMS Flow Product Catalog
Low Power Mass Flow Meter
Features Highly sensitive, measuring as low as 8mm/sec. Sensor directly senses mass flow using thermal mass flow principle. Integrated multiple sensors on a single chip, significantly increased the dynamic rangeability. Unique low power MEMS flow sensor technology, the meter can work for 1+ year on battery. Excellent offset stability comparing to the traditional thermal mass flow sensor technology. Excellent repeatability. Low pressure loss compared to the traditional mechanical meters, reducing energy loss. Both flow rate and accumulated flow are displayed with LCD. The meters are equipped with RS485 communication port that can be easily connected to network for remote management. Optional pulse output can provide compatibility to current meter management system, each pulse =0.001Nm3. Meter head can be rotated within 180o, for easily installation. Explosion proof Ex ia IIC T4, can measure all gases except for acetylene.
The Product The low power MEMS mass flow meters are made with Siargo’s world leading proprietary MEMS mass flow sensors and the smart electronic control system. It can be used for clean gas metrology such as utility gas(natural gas, LNG and LPG). The superior dynamic range may reduce the revenue loss from conventional mechanical gas meters. The all electronic meter can be easily integrated into network management system.
Specifications In addition to the models listed in the table, we can also provide customized products that tailored to customers’ very needs. For further information, please contact manufacturer. The meters are made by referencing to: ISO14511 Manufacture permit： CMC-S00000360 Ex certificate： GYB06443
DN Max Flow Min Flow Turn‐Down Accuracy Repeatability Max Pressure Max Pressure Loss Working Temperature Display Battery Life Real Clock Life Calibration Materials/Connection Data Retrieval Output (optional) User Control (optional) Wireless Network
