TENDER FOR OPTICAL MICROSCOPE
Schedule of Tender For Optical Microscope
Central Manufacturing Technology Institute Tumkur Road, Bangalore – 560 022. INDIA
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TENDER FOR OPTICAL MICROSCOPE
Central Manufacturing Technology Institute Tumkur Road, Bangalore 560 022 Optical Microscope Schedule of Tender (To be filled in by the tenderer and returned and duly signed along with enclosure to the Schedule of Tender)
3. Delivery of Machine Required
Central Manufacturing Technology Institute Tumkur Road, Bangalore 560 022 Central Manufacturing Technology Institute Tumkur Road, Bangalore 560 022 Within 12 Weeks after placing the purchase order
4. Date of receipt of the Tender
On or before 30 November 2015
5. Earnest Money Deposit
Rs. 25,000/- as EMD is payable by Demand Draft drawn in favor of Central Manufacturing Technology Institute, payable at Bangalore. Rs. 1145/- to be paid as tender fees by demand draft drawn in favor of ’Central Manufacturing Technology Institute ‘ to be submitted along with the tender.
6. Validity of the tender
Tender should be valid for a period of not less than 3 months from the date of offer and unless otherwise specified by the tenderer, the tender shall be treated as valid even thereafter.
7. Technical details/ Requirements for which the tender is invited.
a. As per specification enclosed. b. All details that are required in the specification must be included in the offer. Incomplete tenders are liable to be rejected. c. Wherever numerical values are specified, tenderer shall respond with numerical values that actually correspond to the product. Any additional features/ details pertaining to the product should be enclosed separately. d. The equipment will be finally accepted based on the compliance of the equipment with the Acceptance Criteria. The final Acceptance Criteria will be based on mutual agreement and will be finalized at the time of placing the order. Hence, the bidder has to go through the Acceptance Criteria and convey their acceptance unambiguously. They may also suggest a suitable method of verification if the proposed method is not acceptable to the bidder.
8. Price offered
a. The quotation should be furnished in TWO parts in different sealed covers in the following manner. b. The first part should contain complete technical details of the item offered along with name and address of the manufacturer, full name and address of the authorised agent, guaranteed delivery period and 2 sets of the latest catalogues. This part should not contain the price details. The EMD as indicated should also be enclosed along with the technical details. The cover should be sealed and superscribed with “ Tender Enquiry Reference and Date” and “Technical Bid for Optical Microscope” c. The second part should contain the Price and other commercial terms. The price should be quoted F-O-R, Bangalore. The cover should be sealed and superscribed with “Tender Enquiry Reference and Date” and “Price and Commercial Bid for Optical Microscope” d. Both these covers should be put together in an outer
1. Name of Purchaser 2. Place of delivery
th
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TENDER FOR OPTICAL MICROSCOPE
cover sealed and superscribed with “Tender Enquiry Reference and Date” and “Optical Microscope” e. Break up cost for optional features and optional equipment/ accessories are to be clearly indicated. 9. Payment Terms
To be indicated
10. Transit Insurance
To be arranged by the supplier from supplier’s warehouse to the place of delivery and to be billed at actuals.
11. Notes
a. Late offers will not be entertained or accepted. b. All the items in the tender Specifications are to be filled in. In complete Tender Specifications may not be considered. c. The Director of the Institute reserves the right to reject any tender / all tenders without assigning any reason. d. In case of unsuccessful tender, the EMD will be refunded only after finalisation of contract. e. In case of the tenderer whose offer is accepted, the EMD will be refunded only after receipt, inspection and acceptance of the equipment at CMTI, treating it as a security deposit. f. If the supplier fails to fulfill the terms of purchase order or when the purchaser is satisfied that it is not in the interest of the purchaser to persist with the defaulting supplier, the EMD stands forfeited. Further the purchaser is at liberty to place the order on another supplier at the risk and cost of original supplier. • Latest software release version to be given at the time of installation. • All software provided should be licensed to CMTI. • Maintenance, Enhancement, automatic up-gradation, and Support for 1 year for all software • User manuals, all necessary training and training material to be provided. • Original Software to be supplied on CD-ROM / DVD-ROM media. • Installation commissioning testing training and proving all the features and functions of the system supplied should be the responsibility of the vendor. • All Hardware/Software should be IPV6 compliant.
12. General Terms and Conditions
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TENDER FOR OPTICAL MICROSCOPE
Technical Specifications of Optical Microscope
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TENDER FOR OPTICAL MICROSCOPE
Technical Specifications of Optical Microscope Optical Microscope is required in MEMS packaging process for inspection, process control and defect analysis. It is required for applications like investigating the presence of any residues during the etching process, defects like cracks, scratches etc and for investigating connections after the bonding process. Sl. No 1 2 3
Parameter/ CMTI Requirement Make
Specify
Model Optical System Microscope should have infinity corrected optical system with chromatic aberration and field curvature compensation.
4
Configuration
4.b
Contrast Techniques
4.d 4.e 4.f 5
6
Essential
Microscope Frame
4.a
4.c
Remarks Specify
Illumination
Observation Mode Selection Specimen weight Breath and sneeze guard Observation Tube
Revolving nosepiece
7
Fluorescence filter turret
8
XY Stage
Upright Optical Microscope
Essential
Reflected light: Bright-field, Dark-field, DIC, Polarization, Fluorescence
Essential
Transmitted Light: Bright-field, Polarization
Essential
Reflected light illumination: LED illumination
Essential
Transmitted light illumination: LED illumination
Essential
External Metal Halide or 100W mercury arc lamp for fluorescence microscopy
Essential
Metal Halide or Mercury light source should be isolated from the microscope body through appropriate light guides
Essential
Motorized aperture diaphragm with minimum of 5 stops.
Essential
Motorized
Essential
Maximum of 5 kg
Essential
Breath and sneeze guard to be provided
Essential
Trinocular ergo tube with image erection.
Essential
Switching positions (eyepiece/ camera): 0/100 & 100/0
Essential
Motorized 6-fold nosepiece with automatic objective magnification detection.
Essential
Magnification information to be displayed on screen in the software.
Essential
Motorized fluorescence filter turret with 6 or more filter cube positions and motorized shutter. Fluorescence light beam path should be corrected for any aberrations to give uniform illumination.
Essential
Manual XY inspection stage to comply with 6” wafer, 200 * 200 mm travel range, with adjustment handle, for reflected and transmitted light illumination.
Essential
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TENDER FOR OPTICAL MICROSCOPE
9
10
11
Focus drive
Stage Inserts
Motorized focus
Essential
Maximum specimen height: 10 mm
Essential
Stroke of the drive to accommodate the maximum specimen height and working distances of all objective lenses. Software for auto-focusing
Essential
Resolution: =0.06
Dry
Bright field
11.b 11.c
5X 10X
>=0.13 >=0.25
Dry Dry
11.d
20X
>=0.45
Dry
11.e
50X
>=0.8
Dry
11.f
100X
>=0.9
Dry
12
Eyepiece Magnification
13
Microscope Inserts
13.a
13.b
Filters
Fluorescence filter cubes
Essential & Specify
Reflected light: BF, DF, DIC, polarization, fluorescence Transmitted light: BF, Polarization
10X
Essential
Essential
Daylight filter- to turn the illumination light into daylight
Essential
Yellow filter – contrast filter for observation of semiconductor wafers
Essential
Light intensity adjustment filter - to adjust the brightness between BF and DF. Specify the transmittance options available
Essential& Specify
Any other filter required for effective operation of all contrast techniques
Essential & Specify
Sl. No
Excitation Wavelength (nm)
Emission Wavelength (nm)
1
BP 340-380
LP 425
2
BP 355-425
LP 470
3
BP 436/10
LP 470
4
BP 450-490
LP 515
5
BP 515-560
LP 590
6
BP 560/40
BP 630/75
Essential
13.c
DIC
High resolution DIC prism/s with motorized turret suitable for all objectives that are provided.
Essential
13.d
Polarization
Graduated 360° rotatable polarizer slider and graduated 360° rotatable analyzer along with lambda plate for color contrast in both reflected and transmitted modes.
Essential
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TENDER FOR OPTICAL MICROSCOPE
14
Camera Attachment
14.a
Resolution
5 MP
14.b
Sensor type
CCD Color sensor suitable for all contrast techniques. Spectral sensitivity of the sensor may please be specified.
14.c
Optical Interface
C-Mount
14.d
C-mount adapter lens
15
Software
Adapter lens of suitable magnification may be provided. Additional 1X C-mount adapter
17
Computer
Calibration tools
18
Handset for tactile control
19
Safety standards
Essential & Specify Essential Essential & Specify Essential
Software to have control of • Observation Mode • Z focus • Objective lens selection • Intensity control of all the lamps • Aperture stop • Hardware auto focusing • DIC prism adjustment
Essential
Should support basic microscope operations like live image preview and image capture.
Essential
Auto-focusing module
Essential
Extended focus module for calculation of a sharp image from several focus planes
Essential
Image stitching module
Essential
Image processing module
Essential
Online measurement
Essential
Interactive measurement - Complete menu of interactive measurement functions included in the software may please be specified.
16
Essential
Essential & specify
3D imaging and 3D measurement module to generate the 3d image from z-stack data and perform interactive measurements like height measurements on 3D views
Essential
Report generation module
Essential
Configuration of computer required for operating the microscope to be specified and provided.
Essential & Specify
Calibration tools, which are traceable to international standards, with fixtures (if necessary) to calibrate the microscope should be provided.
Essential
Calibration certificates to be provided
Essential
Traceability certificates to be quoted as optional.
Essential
Ergonomically designed handset control for motorized functions of the microscope like objective lens selection, auto focusing, light intensity control of all the lamps, DIC prism adjustment, Z stage control etc.
Essential
Compliance with SEMI S2 and S8, CE, ROHS, EMC Compliance.
Essential
Certificates for compliance to safety standards to be quoted as optional.
Essential
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TENDER FOR OPTICAL MICROSCOPE
20
Precautions
Necessary precautions that are to be taken prior and during the operation
Specify
21
Dimension
(W*L*H) mm
Specify
22
Weight
In kg
Specify
23
Power Supply Clean room compliance
Please indicate the clean room class compliance of the microscope
24
Specify
Necessary accessories for normal operation of the equipment are to be indicated and provided.
Specify Essential & Specify
25
Accessories
26
Spares
27
Training
Vendors to provide training for at least 2 people on operation and maintenance at CMTI during installation.
Essential
28
Users list
Provide a list of users for the quoted model in India with full contact details.
Essential
The complete system and its associated hardware / software should have a standard warranty for a minimum of 12 months from the date of installation, commissioning and acceptance of the system at CMTI. Supplier modification(s) / Software upgrades should be intimated and the same should be made available free of cost during the warranty period.
Essential
12 months extended warranty to be quoted as optional.
Essential
29
Warranty – Inclusive of parts and labor
Specify & quote
Operation Manual Maintenance Manual Inspection Software Manual 30
Documents/ Manuals
Spare parts list with source of supply and prices Manuals of bought-out items , if any, incorporated in the system
1 set of hard copy and 1 set of soft copy in English
Essential
Details regarding the safety measures adopted in the system 31
Acceptance
The capabilities of the microscope, part accuracies must be proved by supplier as per CMTI's acceptance criteria, at CMTI after installation.
Essential
32
Installation
Installation and commissioning at CMTI should be done by OEM/ authorized personnel.
Essential
33
Certificates
Calibration certificate (for calibration tools) and test reports (for motorized Z-Drive) must be provided
Essential
34
Service Support
The supplier should support the system minimum for 10 years (post warranty, with all spares and services). Exact lifecycle of the offered unit has to be specified.
Essential
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TENDER FOR OPTICAL MICROSCOPE
Acceptance Criteria
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TENDER FOR OPTICAL MICROSCOPE
Acceptance Criteria for Optical Microscope Sl.No
1
Parameter& Items Optical System
Specification Microscope should have infinity corrected optical system with chromatic aberration and field curvature compensation.
Testing Method Functional verification /Supporting Document Physical verification
2
Configuration
Upright optical microscope Functional verification
3
4
5
6
7 8
9
Contrast Techniques
Illumination
Observation Mode Selection Sample Weight Handling Breath and sneeze guard Observation Tube Revolving nosepiece
10
Fluorescence filter turret
11
XY Stage
12
Focus drive
Reflected light: Bright-field, Dark-field, DIC, Polarization, Fluorescence Transmitted Light: Bright-field, Polarization Reflected light illumination: LED illumination Transmitted light illumination: LED illumination External Metal Halide or 100W mercury arc lamp for fluorescence microscopy Metal halide or Mercury light source should be isolated from the microscope body through appropriate light guides Motorized aperture diaphragm with minimum of 5 stops.
Functional verification
Physical verification Motorized
Maximum of 5 kg
Functional verification /Supporting Document Physical verification
Breath and sneeze guard to be provided Trinocular ergo tube with image erection. Switching positions (eyepiece/ camera): 0/100 & 100/0 Motorized 6-fold nosepiece with automatic objective magnification detection. Magnification information to be displayed on screen in the software. Motorized fluorescence filter turret with 6 or more filter cube positions and motorized shutter. Fluorescence light beam path should be corrected for any aberrations to give uniform illumination. Manual XY inspection stage to comply with 6” wafer, 200 * 200 mm travel range, with adjustment handle, for reflected and transmitted light illumination Motorized focus Maximum specimen height: 10 mm Stroke of the drive to accommodate the maximum specimen height and working distances of all objective lenses. Software for auto-focusing Resolution: =0.13NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.25NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and Transmitted light (BF, Polarization) >=0.45 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.8 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization) >=0.9 NA, suitable for reflected light (BF, DF, DIC, polarization, fluorescence) and transmitted light (BF, Polarization)
Physical Verification
Functional verification/ Supporting document to prove the resolvable feature sizes.
>=0.06 NA, suitable for bright field Physical Verification
10X Daylight filter- to turn the illumination light into daylight Yellow filter – contrast filter for observation of semiconductor wafers Light intensity adjustment filter - to adjust the brightness between BF and DF Any other filter required for effective operation of all contrast techniques Sl. No
Excitation Wavelength (nm)
Emission Wavelength (nm)
1
BP 340-380
LP 425
2
BP 355-425
LP 470
3
BP 436/10
LP 470
4
BP 450-490
LP 515
5
BP 515-560
LP 590
6 BP 560/40 BP 630/75 High resolution DIC prism/s with motorized turret suitable for all objectives that are provided. Graduated 360° rotatable polarizer slider and graduated 360° rotatable analyzer along with lambda plate for color contrast in both reflected and transmitted modes. 5 MP CCD Color sensor suitable for all contrast techniques C-Mount Adapter lens of suitable magnification may be provided.
Physical Verification
Functional Verification
Functional Verification Functional Verification
Functional Verification Functional Verification Physical Verification Physical Verification
Additional 1X C-mount adapter
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TENDER FOR OPTICAL MICROSCOPE
29
Software
30
Computer
31
Calibration tools
32
Handset for tactile control
33
Safety standards
34
Precautions
35
Accessories
36
Training
37
Users list
Software to have control of • Observation Mode • Z focus • Objective magnification • Intensity control of all the lamps • Aperture stop • Hardware auto focusing • DIC prism adjustment Should support basic microscope operations like live image preview and image capture. Auto-focusing module Extended focus module for calculation of a sharp image from several focus planes Image stitching module Image processing module Online measurement Interactive measurement - Complete menu of interactive measurement functions included in the software may please be specified. 3D imaging and 3D measurement module to generate the 3d image from z-stack data and perform interactive measurements like height measurements on 3D views Report generation module Configuration of computer required for operating the microscope to be specified and provided. Calibration tools, which are traceable to international standards, with fixtures (if necessary) to calibrate the microscope should be provided. Calibration certificates to be provided Traceability certificates to be quoted as optional. Ergonomically designed handset control for motorized functions of the microscope like objective lens selection, auto focusing, light intensity control of all the lamps, DIC prism adjustment, Z stage control etc. Compliance with SEMI S2 and S8, CE, ROHS, EMC Compliance. Certificates for compliance to safety standards to be quoted as optional. Necessary precautions that are to be taken prior and during the operation Necessary accessories for normal operation of the equipment are to be indicated and provided.
Functional Verification
Functional Verification Functional Verification Functional Verification Functional Verification Functional Verification Functional Verification Functional Verification
Functional Verification
Functional Verification Physical and functional Verification Physical verification
Supporting certificates Supporting certificates Functional Verification
Supporting document
Supporting document Physical verification Vendors to provide training for at least 2 people on operation and maintenance at CMTI during installation.
Provide a list of users for the quoted model in India with full contact details.
Supporting document
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TENDER FOR OPTICAL MICROSCOPE
Warranty – Inclusive of parts and labor
38
39
Documents/ Manuals
40
Acceptance
41
Installation
42
Certificates
The complete system and its associated hardware / software should have a standard warranty for a minimum of 12 months from the date of installation, commissioning and acceptance of the system at CMTI. Supplier modification(s) / Software upgrades shall be intimated and same will be made available free of cost during the warranty period. 12 months additional warranty to be indicated as optional. Operation Manual 1 set of Maintenance Manual hard Inspection Software Manual copy Spare parts list with source of supply and and 1 prices set of Manuals of bought-out items, if any, soft incorporated in the system copy in Details regarding the safety measures English adopted in the system
Warranty Certificate
The capabilities of the microscope, part accuracies must be proved by supplier as per CMTI's acceptance criteria, at CMTI after installation.
Complete features and functionality has to be demonstrated
Calibration certificate (for calibration tools) and test reports (for motorized Z-Drive) must be provided
Installation and commissioning should be done by OEM/ authorized personnel Calibration certificates and test reports
Physical verification.
Note: 1
The equipment will be finally accepted based on the compliance of the equipment with the Acceptance Criteria. The final Acceptance Criteria will be based on mutual agreement and will be finalized at the time of placing the order. Hence, the bidder has to go through the Acceptance Criteria and convey their acceptance unambiguously. They may also suggest a suitable method of verification if the proposed method is not acceptable to the bidder.
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