Introduction to Actuators Knowledge Probe Primary Knowledge unit Research Activity Participant Guide

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Introduction to Actuators Knowledge Probe Participant Guide Introduction The purpose of this assessment is to determine your current understanding of actuators. 1. The output of an actuator is a. current b. motion c. heat d. variable 2. Which of the following BEST describes an actuator? A device that a. quantifies a value on its input and produces a readable output. b. produces a readable output representative of a change. c. converts one form of energy to another form of energy. d. converts a change on the input into a proportional movement. 3. Which of the following is a mechanical actuator? a. Motor b. Generator c. Tire jack d. Comb drive 4. Which of the following is an electrostatic actuator? a. Motor b. Generator c. Tire jack d. Comb drive 5. Which of the following is NOT a transducer and an actuator? a. Motor b. Generator c. Bi-metallic strip d. Comb drive

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6. In microtechnology piezoelectric thin films are combined with metallic thin films to make a. thermal switches b. comb drives c. strain gauges d. RTDs 7. The property that determines how much a material expands when heated is called its ___________________ coefficient. a. expansion b. molecular c. temperature d. material 8. Which of the following micro-components could NOT be used to actuate? a. Diaphragm b. Comb drive c. Cantilevers d. Stain gauge

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program.

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Southwest Center for Microsystems Education (SCME) University of New Mexico

MEMS Fabrication Topic

Introduction to Actuators

This SCO is part of the Learning Module

Introduction to Actuators

Target Audience: High School, Community College

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program through Grant #DUE 0830384 and 0902411. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the National Science Foundation. Copyright by the Southwest Center for Microsystems Education and The Regents of the University of New Mexico Southwest Center for Microsystems Education (SCME) 800 Bradbury Drive SE, Suite 235 Albuquerque, NM 87106-4346 Phone: 505-272-7150 Website: www.scme-nm.org

Introduction to Actuators Primary Knowledge Participant Guide Description and Estimated Time to Complete In this lesson you will learn about actuators, what they are, what they can do, and various applications. You will also be introduced to actuators in both the macro and micro scales. The understanding of this information is important to microelectromechanical (MEMS) or microsystems technology. Estimated Time to Complete Allow approximately 45 minutes to an hour to complete this lesson. This lesson consists of this reading material and a short PowerPoint presentation. You may view the presentation before or after reading through this lesson. Introduction

Types of actuators: electric motor, gear train, screw jack [Image of microgears courtesy of Sandia National Laboratories, SUMMiT(TM) Technologies, www.mems.sandia.gov]

An actuator is a device that actuates or moves something. An actuator uses some type of energy to provide motion or to apply a force. For example, an electric motor uses electrical energy to create a rotational movement or to turn on object, or to move an object. A tire jack or screw jack uses mechanical energy to provide enough force lift a car. In short, an actuator converts some type of energy into motion. Actuators include motors, gears, pumps, pistons, valves, and switches.

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Objectives  Describe what an actuator does.  Explain how two different types of actuators work. Key Terms (These terms are defined in the glossary at the end of this unit.) actuator electromagnetic electromechanical electrostatic energy mechanical piezoelectric sensors transducer Basic Concepts of Actuators An actuator is something that actuates or moves something. More specifically, an actuator is a device that coverts an input energy into motion or mechanical energy. The input energy of actuators can be “manual” (e.g., levers and jacks), hydraulic or pneumatic (e.g., pistons and valves), thermal (e.g., bimetallic switches or levers), and electric (e.g., motors and resonators). In the transducers unit, a transducer was defined as any device that converts one form of energy to another form of energy; therefore, by that definition, an actuator can be a specific type of a transducer. The motor is one such actuator. A motor converts electrical energy to mechanical energy; therefore, a motor is both an actuator and a transducer

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Thermal Actuators Thermal actuators are actuators that convert thermal energy into movement. One type of thermal actuator is a bimetallic strip, a strip made from two different metals such as steel and copper. The two metals have different temperature coefficients which means, that when heated, they expand at two different rates. The graphic below illustrates this. When these two metals are heated, metal 2 expands more than metal 1; therefore, metal 2 has a higher temperature coefficient than metal 1.

Now let’s join these two strips together.

Since they are joined, and each metal is expanding, but expanding at different rates, the strip bends. In this case, in which direction does the strip bend? If you said “upward”, you are correct! This bending is due to thermal expansion. Thermal expansion is the manifestation of a change in thermal energy in a material. When a material is heated, the average distance between atoms (or molecules) increases. The amount of distance differs for different types of material. This microscopic increase in distance is unperceivable to the human eye. However, because of the huge numbers of atoms (or molecules) in a piece of material, the material expands considerably and, at times, is noticeable to the human eye.

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The opposite reaction occurs for a decrease in temperature when most materials contract. When exposed to the elements, a material constantly expands and contracts with ambient temperature changes. Consider a piece of steel 25 meters long. If the temperature of the steel increases by 36oC, (the difference between a cold winter day and a hot summer day), that piece of steel lengthens approximately 12 cm. This change in length is the thermal linear expansion. It is calculated by using the following formula: L=aLoT Where L is the change in length, a is the coefficient of linear expansion, Lo is the original length, and T is the change in temperature in Celsius. If we are considering steel, the coefficient of linear expansion is 1.3x10-5, the original length is 25 meters, and of course the change of temperature is 36oC. This results in an expansion of .12 m or 12 cm.11,12 Now consider 40 pieces of steel 25 meters long laid end to end to make a 1 km long bridge. The bridge’s length will change roughly 480 cm between the winter and summer! Fortunately, expansion joints are built into bridges allowing for this expansion, ensuring bridges are safe in all seasons.

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A bimetallic strip takes advantage of the thermal expansion effect to generate motion. Two dissimilar strips of metal are joined together along their entire lengths. When heat is applied, the bimetallic strip bends in the direction of the metal with the smaller coefficient of thermal expansion, (see the figure below). Bimetallic strips have many uses. One common use is in thermostats used to control the temperature in homes and offices. The diagram below shows how a bimetallic strip is used in a thermostat.

Schematic showing how a bimetallic strip works. This particular bimetallic strip is being used as a thermostat. a) Two dissimilar strips of metal are used that have different coefficients of thermal expansion, b) The two strips of metal are joined along their entire interface at some temperature (T1), c) When the temperature increases temperature, T2, the bimetallic strips deflect enough to touch the upper contact and allow a current to flow in the bimetallic strip turning on the air conditioner. This SEM image shows actuated vertical thermal actuators developed by the Southwest Research Institute. These microactuators have two layers of dissimilar materials in each arm. The materials have different temperature coefficients. To obtain the initial upward curvature, the engineers took advantage of residual stresses in the film layers used to build the switch. [Image courtesy of Southwest Research Institute. Copyright SwRI.]

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At the microscale, bimetallic actuators are made using both metallic and non-metallic materials. A variety of thin films with different thermal expansion characteristics are used to fabricate switches, electrodes, valves, strain gauges, and diaphragms. At such a small scale (less than 100 micrometers), the slightest expansion and contraction of a material can affect the operation of the device. In some micro-devices, the movement of the film due to temperature changes needs to be minimized or eliminated. However, for devices such as microswitches and microvalves, the temperature coefficient of the material becomes important to its operation. The graphic below illustrates a simple microvalve “switch”. The valve is made up of two different film materials – nickel and a piezoelectric film such as silicon dioxide (SiO2) and zinc oxide (ZnO).

When a voltage is placed across the bond pads, the temperatures of the nickel layer and the piezoelectric layer increase. The nickel layer has the lower temperature coefficient; therefore, it “pulls” the valve upward since its expansion is less than that of the piezoelectric layer. This bending of the valve allows flow from the inlet into the fluidic channel. Piezoelectric thin films are used throughout MEMS because the characteristics of piezoelectric are that movement occurs when a voltage is applied and vice versa – movement in the film can generate a voltage. Sounds like an actuator, doesn’t it? In actuators, piezoelectric films can be found in MEMS motors, switches and valves. In sensors and transducers, such films can be found in MEMS cantilevers, strain gauges, membranes, hydrophones and microphones.

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Electric Actuators

Electric actuators use electricity or electrical energy to create motion. An electric motor is a type of an electric actuator. Most direct current (DC) motors operate by current flowing through a coil of wire (the rotor) and creating a magnetic field around the coil. The coil is wrapped around the motor's rotor, creating a loop, and is positioned between the poles of a permanent magnet or electromagnet. The interaction of the two magnetic fields causes the rotor to rotate on its axis, rotating the motor's shaft (see figure above). Reverse the direction of the current flowing through the rotor and the rotor will rotate in the opposite direction. Thus, an electric motor is a transducer AND an actuator because it converts electrical energy to magnetic energy to mechanical energy or motion.

An electric motor is an actuator that transforms electrical energy into mechanical energy or motion.

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Mechanical Actuators Mechanical actuators convert a mechanical input into linear or rotary motion. A common example of a mechanical actuator is a screw jack. The picture shows a screw jack in operation. Rotation of the screw causes the legs of the jack to move apart or move together. Inspecting the motion of the top point of the jack, this mechanical rotational input is converted into linear mechanical motion. Mechanical actuators can produce a rotational output as well with the proper gearing mechanism. A screw jack converting rotational energy into linear motion (to lift a car possibly) MEMS Actuators An example of a microactuator (or MEMS) is the electrostatic comb drive. Comb drives are used in many MEMS applications such as resonators, microengines, and gyroscopes.

SEM of a typical comb-drive resonator [Courtesy of Sandia National Laboratories] The image above is an example of a MEMS electrostatic comb drive resonator, a common MEMS actuator. A resonator is a device which naturally oscillates at its resonant frequency. The oscillations in a resonator can either be electrostatic or mechanical. As an actuator, this comb drive resonator can move another object at the rate of the comb drive’s oscillations. The force generated is low, usually less than 50N. However, these devices are predictable and reliable making them popular as MEMS actuators.1

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Let’s take a look at a MEMS actuator that is used to precisely position an optical mirror. This system was developed by Sandia National Laboratories Below is a scanning electron microscope (SEM) image of a micro-sized polysilicon mirror and its drive motors.2 Each drive motor consists of a gear connected to two comb drives by bars or pins. The gears are actually part of a rack and pinion system with a linear rack for each gear. Take a minute and make sure you can identify each of these components – the comb drives, gears, linear racks and mirror.

[Courtesy of Sandia National Laboratories, SUMMiT(TM) Technologies, www.mems.sandia.gov] As the comb drives oscillate, the bars move back and forth causing the gears to rotate. As the gears rotate, they move the linear rack. The movement of the rack causes the hinged mirror to raise and lower. By changing the position of the optical mirror, one can change the angle of reflection of light hitting the mirror from a source such as a fiber optic cable or laser. The rack and pinion is a common actuator that can be found in both the macro and now the micro-scales. Such actuators use rotary motion to produce linear motion. Like all actuators the rack and pinion uses an energy on its input (in this case, mechanical energy) to make something move.

Coaching Question When was the last time that you “actuated” something? What did you do? What was the actuator? What was moved?

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Key Terms Actuator – a specific type of transducer that coverts energy into motion Electromagnetic: Objects made magnetic by an electric current. Electromechanical: A mechanical device which is controlled by an electronic device. Electrostatic: Of or related to electric charges at rest or static charges. Energy: The sources of energy encompass electrical, mechanical, hydraulic, pneumatic, chemical, thermal, gravity, and radiation energy. There are two types of energy---kinetic and potential. Kinetic energy is the force caused by the motion of an object for example a spinning flywheel. Potential energy is the force stored in an object when it isn’t moving. Mechanical: Pertaining to or concerned with machinery or tools. Piezoelectric: The ability of a material to create movement or produce a mechanical force when a voltage is applied; or, the ability to generate a voltage when a mechanical force is applied. Sensors: A device that responds to a stimulus, such as heat, light, or pressure, and generates a signal that can be measured or interpreted. Transducer: A substance or device that converts input energy of one form into output energy of another. References 1.

2.

3. 4.

5.

6.

MEMS Actuators. Sandia National Laboratories. 2008. http://www.mems.sandia.gov/about/actuators.html MEMS Image Gallery. Mirrors. Sandia National Laboratories. http://mems.sandia.gov/gallery/images_mirrors.html Khalil Najafi, University of Michigan, Sensors Presentation “Thermal Expansion – Linear”. The Engineering Toolbox. http://www.engineeringtoolbox.com/linear-thermal-expansion-d_1379.html Table of the “Coefficients of Linear of Expansion” for many different materials. http://www.farm.net/~mason/materials/expansion-coefficient.html E. J. Garcia and J. J. Sniegowski, "Surface Micromachined Microengine," Sensors and Actuators A, Vol. 48 (1995) 203-214.

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program.

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Southwest Center for Microsystems Education (SCME) University of New Mexico

MEMS Introduction Topic

What are Actuators? Activity This activity is part of the Learning Module

Introduction to Actuators

Target Audience: High School, Community Colleges

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program through Grant #DUE 0830384 and 0902411.

Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the National Science Foundation. Copyright 2009 - 2012 by the Southwest Center for Microsystems Education and The Regents of the University of New Mexico Southwest Center for Microsystems Education (SCME) 800 Bradbury Drive SE, Suite 235 Albuquerque, NM 87106-4346 Phone: 505-272-7150 Website: www.scme-nm.org

What are Actuators? Activity Participant Guide Description and Estimated Time to Complete This activity provides you the opportunity to further enhance your knowledge and understanding of actuators both in the macro and micro-scales. You will explain how specific actuators work. Estimated Time to Complete Allow 2 hours to complete this activity. Introduction An actuator is a device that actuates or moves something. An actuator uses some type of energy to provide motion or to apply a force. For example, an electric motor used electrical energy to create a rotational movement or to turn on object, or to move an object. A tire jack uses mechanical energy to provide enough force lift a car. So in short, an actuator converts some type of energy into motion. Actuators consist of motors, gears, pumps, valves, and switches. Activity Objectives and Outcomes Activity Objectives  Compare and contrast actuators and transducers.  Explain how two different types of actuators work.  Identify the micro-equivalent of two macro-sized actuators. Activity Outcomes Upon completion of this activity you should have a more in-depth understanding of actuators, the different types of actuators, and the differences and similarities between macro and micro-sized actuators. Documentation The documentation for this activity consists of a written report. Details of the report are given in the following procedure. Documentation should include the following:  Information required in the activity procedure  Graphics (if available)  References for materials, information, and graphics  Answers to the Post-Lab Questions

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Activity: What are Actuators? Procedure: 1. Research the operation of two different actuators from different classifications. The classification of actuators is listed below. a. Thermal actuators b. Manual actuators c. Hydraulic/Pneumatic actuators d. Electric actuators 2. Research the two actuators and write a report that addresses no less than the following information: a. Type of actuator i. What is the classification of this actuator (thermal, manual, hydraulic/pneumatic or electric)? ii. Is this actuator macro-sized, micro-sized or both? b. Operation i. How does this actuator work at the macro scale? (if applicable) ii. How does this actuator work at the micro scale? (if applicable) iii. If this is a macro-sized only actuator, what is a micro-sized actuator that can produce the same “motion”? iv. What are the similarities and differences between the macro and micro scaled actuators? c. Applications i. What are some current applications for this actuator in both the macro and micro-scales? ii. What are some possible applications for which this actuator could be used? Post-Lab Questions 1. What is the difference between an actuator and a transducer? 2. What are some of the challenges that researcher and designers face in the development of microsized actuators? 3. What are three MEMS actuators? For each actuator, what is the input energy and what is the output “motion”?

Summary In this activity you enhanced your knowledge of “actuators” what they are and what they do. You also studied but macro and micro-sized actuators and identified their differences and similarities.

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program through Grant.

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Southwest Center for Microsystems Education (SCME) Learning Modules available for download @ scme-nm.org MEMS Introductory Topics

MEMS Fabrication

MEMS History MEMS: Making Micro Machines DVD and LM (Kit available) Units of Weights and Measures A Comparison of Scale: Macro, Micro, and Nano Introduction to Transducers Introduction to Sensors Introduction to Actuators Wheatstone Bridge (Pressure Sensor Model Kit available)

Crystallography for Microsystems (Breaking Wafers and Origami Crystal Kits available) Oxidation Overview for Microsystems (Rainbow Wafer Kit available) Deposition Overview Microsystems Photolithography Overview for Microsystems Etch Overview for Microsystems (Rainbow Wafer and Anisotropic Etch Kits available) MEMS Micromachining Overview LIGA Micromachining Simulation Activities (LIGA Simulation Kit available) Manufacturing Technology Training Center Pressure Sensor Process (Three Activity Kits available) MEMS Innovators Activity (Activity Kit available)

MEMS Applications MEMS Applications Overview Microcantilevers (Dynamic Cantilever Kit available) Micropumps Overview

BioMEMS BioMEMS Overview BioMEMS Applications Overview DNA Overview DNA to Protein Overview Cells – The Building Blocks of Life Biomolecular Applications for bioMEMS BioMEMS Therapeutics Overview BioMEMS Diagnostics Overview Clinical Laboratory Techniques and MEMS MEMS for Environmental and Bioterrorism Applications Regulations of bioMEMS DNA Microarrays (GeneChip® Model Kit available)

Revision: 4/17/2012

Safety Hazardous Materials Material Safety Data Sheets Interpreting Chemical Labels / NFPA Chemical Lab Safety Personal Protective Equipment (PPE)

Check our website regularly for the most recent versions of our Learning Modules.

For more information about SCME and its Learning Modules and kits, visit our website scme-nm.org or contact Dr. Matthias Pleil at [email protected]

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