Studies of the reactive ion etching of SiGe alloys - KIPDF.COM

Studies of the reactive ion etching of SiGe alloys

Studies of the reactive ion etching of SiGe alloys G. S. Oehrlein, G. M. W. Kroesen, E. de Fresart, Y. Zhang, andT. D. Bestwick IBM Research Division,...

Author: Howard Grant Thomas

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Studies of the reactive ion etching of SiGe alloys G. S. Oehrlein, G. M. W. Kroesen, E. de Fresart, Y. Zhang, andT. D. Bestwick IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598

Reactive-ion etching (RIE) of epitaxial, strained Sil x Gex alloys, x

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