Ardour Capital Conference June 6, 2014

J.S. Whang Executive Chairman

Fokko Pentinga President & CEO

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Brad Anderson Executive VP & CFO

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Forward-looking statements

Certain statements in the following presentation relate to future results that are forward looking statements. Actual results may differ materially from those projected as a result of certain risks and uncertainties, including but not limited to, changes in the technologies used by Amtech’s customers, change and volatility in the demand for its equipment, the effect of changing worldwide political and economic conditions on government-funded solar initiatives, capital expenditures, production levels, including those in Europe and Asia, the effect of overall market conditions, market acceptance, risks associated with dependence on suppliers, the impact of competitive products and pricing, technological and product development risks (including the risks inherent in launching new products) and other risk factors noted in our forms 10-K, 10-Q, and other filings with the SEC. This presentation includes historical and forward-looking pro

forma information. The Company assumes no responsibility to update the information contained in this presentation. This presentation and the information contained herein is the property of Amtech Systems, Inc.

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Amtech markets

SOLAR

SEMICONDUCTORS

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LED

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Management Overview

Member

J.S. Whang

Fokko Pentinga

Brad Anderson

Position

Executive Chairman

President & CEO

EVP & Chief Financial Officer

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Experience

 37 years of semiconductor & solar experience  Siltronics  U.S. Quartz  30 years of semiconductor and solar experience  Tempress Systems

 28 years of financial and public company experience  Deloitte  Zila

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Amtech group at glance  Global supplier of solar & semiconductor process equipment technology and automation systems  

Headquartered in Tempe, AZ Global presence in NA, Europe, Asia

 Leading supplier of solar & semiconductor diffusion furnaces  Leading edge platform driven by acquisition of technology and continuous innovation 

Successful deployment of next generation n-type cell



Transformed from equipment supplier to technology provider

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Amtech Products & Applications Process Equipment

Furnace Automation & Wafer Handling Systems

Wafer Carriers, Templates & Polishing Tools

Diffusion, Annealing Furnace Furnace Automation

Templates

PECVD Furnace

Ion Implanter

S-300

Solar Cells & Semiconductor Chips

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Carriers

LED & Silicon Wafers 6

Solar value chain Our integrated offering

Silicon

Ingot / Wafer

AMTECH GROUP Products

Solar Cell

Module

Cleaning Texturing Diffusion Doping

AR Coating

Integrated Offering

Screen Printing Metallization

Partnerships

Edge Isolation Testing Sorting

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Technology

PSG Etching Removal

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Business Model Successful acquisitions & technology innovation

Acquisition ATMOSCAN (from Intel)

1981

Company Founded

1983

1994

Joint Development Agreement with ECN for n-type Diffusion Technology

1997

2004

2006

3-party Collaboration Agreement: focused on innovative n-type technology

2007

2008

600 MW completion of n-type PANDA at Yingli

2009

2011

2012

Ion implant system introduction

2013

2nd N-type Customer + PECVD

Batch PECVD system introduction

Innovation Solar | Semiconductor | LED

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Reliable industry player & provider of Technology Solutions Total Shipped Production Capacity (cumulative) [GW] based on 45 MW/system 25

 installed base of 1800 reactors  Production capacity of >21 GW

20 15 10 5 0

2005

2006

2007

 Solar Diffusion Market share >35%

2008

2009

2010

2011

2012

Market share

Tempress 38% 62%

Rest

Sources: Internal data center Market share by SolarBuzz Research

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Solar Fundamentals

 >50% of the global population and politicians believe in the need for clean energy.

 Solar is becoming global and demand from the global emerging market for 2013 reached ~8GW and is growing.  Solar annual demand is expected to grow from 38GW in 2013 to 100GW in 2018.  Supply-Demand Equilibrium to be achieved within the next 12 months.  Solar is cheaper than nuclear.

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Clean Energy Cheaper than New Nuclear

 New nuclear power in the UK will be subsidized at Eur112/MWh.

 By contrast, utility-scale solar PV in Germany is now 34% lower at Eur73/MWh.  In India, nuclear costs ~$0.17/kwh vs ~$0.13/kwh for solar  "In the future, solar will play an ever greater role in countries across the world as a source of power.“ Source: Platts McGraw Hill, London (Platts)--17Apr2014, Berlin-based think-tank Agora Energiewende

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Solar Cell Segment’s Current Landscape

 Overall capacity count stands at ~60GW.  Consolidation is more prevalent in the form of Tier III‟s capacity being used up by Tier I, or being operated under a new name.  Industry is coming out of lengthy down-cycle, with some small appetizers.

 Main course is to start during 2015, upon reaching the supply/demand equilibrium.  Race for higher efficiency has intensified.

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Global demand Historical + 2013

Asia 57%!!!

 With at least 37 GW of newly-added capacity globally, 2013 was another record-year for photovoltaic (PV) installations.

Europe only accounted for 28% !! By harmful and retrospective measures

 The global PV cumulative installed capacity reached an impressive 136.7 GW at the end of last year, which represents a 35% increase compared to the year before. Solar | Semiconductor | LED

Global demand 2014 forecast

Name

GW

Date of estimate

IHS

45 („14)

December 2013

Deutsche bank

46 („14)

October 2013

SolarBuzz

49 („14)

February 2014

GTM

42 („14)

February 2014

Yingli

50 (‘14)

October 2013

ROTH Capital

47 (‘14)

January 2014

46 (‘14)

March 2013

Average

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Global demand 2014 forecast

NPD Solarbuzz: Solar PV industry poised to exceed 50 GW within a 12month period for the first time

Chinese manufacturers predict Q1 to be tougher than expected, but full year guidance remains the same

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Top 5 markets China  China installed 11.3 GW of solar PV in 2013. China's National Energy Administration (NEA), has set a national target of 14 GW for solar power capacity addition in 2014 which will be eligible for subsidies

Japan  Demand in Japan remains in the range of 6 – 8GW for 2014. Japan may cut solar tariff by 14% as operating costs decline (Bloomberg)

USA  The U.S. installed 4,7 GW of solar PV in 2013, up 41 percent over 2012 and nearly fifteen times the amount installed in 2008. Another strong year in 2014 is forecasted with 26 percent growth. This will bring annual installations up to nearly 6 GW

Europe  Demand in Europe remains behind expectations by the persistent bad news from policymakers - further cuts and specified new feed-in tariff rates in Germany, France and UK.

Emerging markets  The announcement of a multi-gigawatt pipeline does not mean we‟ll see a new gigawatt-scale market emerge in a single year. Emerging markets develop in a much slower fashion than established markets

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Capital Expenditure

For 2013, PV equipment spending declined to an eight-year low of $1.73 billion

Capital expenditures for equipment suppliers serving the solar PV manufacturing sector are forecast to enter a new upturn phase beginning in 2014 IHS: Global capital spending in 2014 by producers of PV ingots, wafers, cells, modules and polysilicon will rise by a robust 42 percent to reach $3.37 billion and another 25% to $4.22 billion by 2015. Solarbuzz: The PV equipment spending could potentially reach $10 billion in revenues in 2017.

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Technology forecast – long term

IHS forecasts that n-type applications will mature and find their way into mainstream manufacturing. Looking forward, n-type will be mostly a mono crystalline technology, growing from 8 percent of total cell production capacity to approximately 29 percent by 2020.

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Next Generation Solar and Growth

Tempress PECVD Anti reflective coating passivation

n-PASHA Technology

Over 20% Tempress Diffusion

n-type

POCl3 BBr3 Annealing Oxidation

Implantation Technology

Kingstone IonSolar

Up to 20%

p-type / n-type IBC

p-type

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Goals and Strategies

 Capitalize on next growth opportunities in the solar industry by: 

Technology Innovation - Execute n-PASHA high efficiency roadmap and continue collaboration with top-tier customers and research institutes



New Products – Develop next technology product and integrated solutions to expand our market



Acquisitions – Longer term, pursue strategic acquisitions that complement our strong platform for both solar and non-solar growth Solar | Semiconductor | LED

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Semiconductor & LED

Analog / Power Chip Sector  Serve top players in Analog and Power Chip Sectors, including #1 Infineon, Texas Instruments, Analog Devices (ADI) 

Potential migration from 6”(2/3rd) to 8”(1/3rd) to 12” wafers



Longer term opportunity

LED & Optics 

LED consumable growth



LED and Optics equipment opportunities

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Take Away !

Catalyst for recovery (CAPEX) 

Global solar expansion



Tier 1 getting even bigger



Tier 1 technology buying



Surviving old production lines (2003-2008) could well require line upgrades to meet efficiency criteria



Semiconductor (Analog & Power Chip) migration to larger wafer diameter

 We stay current with customers  We have technology and products for upcoming expansion  We double our Total Available Market Solar | Semiconductor | LED

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Financial Overview

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Annual Order Trend (solar/semi) $240M

Solar Semi

200

$188M

150 100 50

0

200

$107M

73

162 $41M

$35M

34

22 13

2008

2009

$44M

$43M

26

40

13 28

22 22

27 16

2010

2011

2012

2013

2014

Announced Orders Oct – Apr

Fiscal Year (Oct. 1 – Sept. 30)

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Balance Sheet – Financial Strength 3/31/2014

Total Cash

$39.0

Working Capital

$40.4

Total Assets

$101.7

Total Debt

$0.0

Total Liabilities

$38.0

Stockholders’ Equity

$63.6

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Maintaining Financial Strength  Diligent cash deployment 

Continuous investment in new technologies/product development

 Aggressive cost management  

Further streamlined costs Flexible workforce

 Focused management of working capital  



Receivables: Strong customer relationships; diligent processes Payables: Work-outs with suppliers; re-negotiated contracts Inventory: Reduced purchase commitments

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Investment Highlights  Proven market leader; higher efficiency next generation technology solutions  Collaborative relationships with strong core customers  Financial strength supports selective investment in R&D  Longer term goal to expand solar and non-solar technology portfolio through highly relevant acquisitions  Forward-thinking management with well-defined plan

 Strong execution track record Solar | Semiconductor | LED

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THANK YOU FOR YOUR ATTENTION.

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