ADRT Series SPECIFICATIONS ADRT Series Rotary Stages

ADRT Series Rotary Stages Mechanical-Bearing Rotary Stage High torque output, direct-drive brushless servomotor ADRT Series Cog-free design for out...
2 downloads 1 Views 1021KB Size
ADRT Series Rotary Stages

Mechanical-Bearing Rotary Stage High torque output, direct-drive brushless servomotor

ADRT Series

Cog-free design for outstanding velocity stability Outstanding wobble and runout Direct coupled, high-accuracy rotary encoder Large diameter clear aperture

Aerotech’s ADRT series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from indexing to high-speed laser machining to precision wafer inspection.

Accurate Positioning

Superior Mechanical Design

The motor and high-performance rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash.

Dual large-diameter bearings are used to maximize performance with respect to wobble, moment stiffness, and repeatability. The large diameter bearings permit large payloads without compromising performance.

Line counts range from 3600 to 5400 lines per revolution. When coupled with Aerotech’s MXH series resolution multipliers, resolutions can be as fine as 0.12 arc sec.

Flexible Configurations Brushless Direct Drive To maximize positioning performance, the ADRT series utilizes Aerotech’s S-series brushless, slotless motor. This motor has all the advantages of a brushless direct-drive motor – no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. With its low inherent inertia and optimized motor design, the ADRT is capable of speeds and accelerations that are significantly higher than other competing products. These stages have a lower height profile compared to competing products within given torque ranges.

Options include a high-precision bearing for improved accuracy, smoothness, and run-out performance. Slip rings and rotary unions are available to ease integration of custom tooling, and a holding brake is available to limit movement of the stage during large impulse loads or when power is removed from the motor. The ADRT is the only rotary table available with integrated “T-slots.” These slots can be used to mount the table horizontally or to attach custom application specific fixtures. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete integrated package.

The low inertia and zero backlash make the ADRT the ideal solution for applications requiring frequent directional changes.

www.aerotech.com

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series SPECIFICATIONS

ADRT Series

Rotary Stages

ADRT Series

ADRT-100-85

ADRT-100-135 ADRT-150-115 ADRT-150-135 ADRT-150-180 -P (Precision)/-S (Standard)

Bearing Option Continuous Current, Stall

Apk

2.0

3.7

3.8

3.4

3.1

Arms

1.43

2.6

2.7

2.4

2.2

S-76-35-A

S-76-85-A

S-130-39-A

S-130-60-A

S-130-102-A

135 mm

180 mm

Motor Type Bus Voltage

Up to 320 VDC

Accuracy(1)

±24.2/±145 µrad (±5/±30 arc sec)

Repeatability

±14.5/±29.1 µrad (±3/±6 arc sec)

Axial Error Motion

±5/±15 µm

Radial Error Motion(2)

±5/±15 µm ±48.5/±48.5 µrad (±10/±10 arc sec)

Tilt Error Motion 85 mm

Height

135 mm

115 mm

13 mm

Aperture

50 mm 0.873-87.3 µrad (0.18 -18 arc sec)

Resolution Radial Load(3)

10 kg

Axial Load

15 kg

30 kg

1000 rpm (-S); 1500 rpm (-P)

600 rpm

Rated Speed

25 kg

Inertia

0.00028 kg-m2

0.00067 kg-m2

0.003379 kg-m2

0.004958 kg-m2

0.008118 kg-m2

Mass

2.3 kg

2.9 kg

5.3 kg

6.9 kg

10.2 kg

Finish

Table

Hardcoat

Stage

Black Anodize

Note: 1. -P accuracy requires calibration and Aerotech controls. 2. Specifications are for single-axis systems. Perfor mance of multi-axis systems is payload and workpoint dependent. Consult factor y for multi-axis or non-standard applications. 3. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional infor mation.

ADRT Series

ADRT-200-155

ADRT-200-185

Continuous Current, Stall

ADRT-260-160

ADRT-260-180

-P (Precision)/-S (Standard)

Bearing Option Apk

5.1

4.9

5.9

Arms

3.6

3.5

4.2

4.1

S-180-69-A

S-180-94-A

S-240-63-A

S-240-83-A

Motor Type Bus Voltage

Up to 320 VDC

Accuracy(1)

±24.2/±145 µrad (±5/±30 arc sec)

5.8

±14.5/±29.1 µrad (±3/±6 arc sec)

Repeatability Axial Error Motion

±30/±6 µm

±40/±8 µm

±40/±8 µm

Radial Error Motion(2)

±30/±6 µm

±40/±8 µm

±40/±8 µm

±72.7/±72.7 µrad (±15/±15 arc sec)

Tilt Error Motion Height

155 mm

Aperture

75 mm

160 mm 100 mm 0.582-58.2 µrad (0.12-12 arc sec)

Resolution Radial Load(3)

80 kg

Axial Load

140 kg

170 kg

500 rpm

375 rpm

Rated Speed

110 kg

Inertia

0.020991 kg-m2

0.027666 kg-m2

0.066488 kg-m2

0.08566 kg-m2

Mass

13.4 kg

16.7 kg

25.4 kg

30.6 kg

Finish

Table

Hardcoat

Stage

Black Anodize

Note: 1. -P accuracy requires calibration and Aerotech controls. 2. Specifications are for single-axis systems. Perfor mance of multi-axis systems is payload and workpoint dependent. Consult factor y for multi-axis or non-standard applications. 3. Moment load based on 5 year continuous rotation at 250 rpm with maximum axial load applied. Larger moment loads possible for low speed and/or low duty cycle applications. Consult Aerotech for additional infor mation.

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series SPECIFICATIONS









/RDG NJ



 

$[LDO



5DGLDO

 











5DGLDO

ADRT Series

/RDG NJ



 











(



'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-100-85)

(





(



(

$[LDO 5DGLDO

(  /RDG NJ

 /RDG NJ



Axial and Radial Cantilevered Load Capability (ADRT-100-135)

5DGLDO

(



'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

$[LDO















 

 











(

'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-150-115)

(













(

'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-150-135)

$[LDO 5DGLDO

(

/RDG NJ

 



   











(

'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-150-180)

www.aerotech.com

Rotary Stages



$[LDO

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series SPECIFICATIONS









 

$[LDO



5DGLDO

/RDG NJ

/RDG NJ



$[LDO



5DGLDO

 











 





(







'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-200-155)







(



Axial and Radial Cantilevered Load Capability (ADRT-200-185)







 /RDG NJ





5DGLDO

 















$[LDO



5DGLDO





'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

$[LDO



/RDG NJ

ADRT Series

Rotary Stages



 





(







'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-260-160)





(





'LVWDQFH PP IURP$[LVRI5RWDWLRQ $[LDO 'LVWDQFH PP IURP7DEOHWRS6KDIW 5DGLDO

Axial and Radial Cantilevered Load Capability (ADRT-260-180)

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

Rotary Stages

ADRT-100

ADRT Series

www.aerotech.com

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT-150

ADRT Series

Rotary Stages

ADRT Series DIMENSIONS

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

-LI+-5 -LI+-10 -LI+-20 -LI+-30 -LI+-40 -LI+-45 -LI+-50 -LI+-60 -LI+-70 -LI+-80 -LI+-90 -LI+-100 -LI+-110 -LI+-120 -LI+-130

www.aerotech.com

+/+/+/+/+/+/+/+/+/+/+/+/+/+/+/-

5 10 20 30 40 45 50 60 70 80 90 100 110 120 130

-HS+-10 -HS+-15 -HS+-25 -HS+-35 -HS+-45 -HS+-50 -HS+-55 -HS+-65 -HS+-75 -HS+-85 -HS+-95 -HS+-105 -HS+-115 -HS+-125 -HS+-135

ANGLE +/+/+/+/+/+/+/+/+/+/+/+/+/+/+/-

10 15 25 35 45 50 55 65 75 85 95 105 115 125 135

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series

ADRT-150 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS ANGLE CONFIGURATION CONFIGURATION

Rotary Stages

ADRT-150 Limits/Hardstops

ADRT-200

ADRT Series

Rotary Stages

ADRT Series DIMENSIONS

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

www.aerotech.com

ANGLE +/- 35 +/- 25 +/- 15 +/- 10 +/- 45 +/- 50 +/- 55 +/- 65 +/- 75 +/- 85 +/- 95 +/- 105 +/- 115 +/- 125 +/- 135 +/- 140 +/- 145 +/- 155

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series

ADRT-200 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS ANGLE CONFIGURATION CONFIGURATION -LI+-30 +/- 30 -HS+-35 -LI+-20 +/- 20 -HS+-25 -LI+-10 +/- 10 -HS+-15 -LI+-5 +/- 5 -HS+-10 -LI+-40 +/- 40 -HS+-45 -LI+-45 +/- 45 -HS+-50 -LI+-50 +/- 50 -HS+-55 -LI+-60 +/- 60 -HS+-65 -LI+-70 +/- 70 -HS+-75 -LI+-80 +/- 80 -HS+-85 -LI+-90 +/- 90 -HS+-95 -LI+-100 +/- 100 -HS+-105 -LI+-110 +/- 110 -HS+-115 -LI+-120 +/- 120 -HS+-125 -LI+-130 +/- 130 -HS+-135 -LI+-135 +/- 135 -HS+-140 -LI+-140 +/- 140 -HS+-145 -LI+-150 +/- 150 -HS+-155

Rotary Stages

ADRT-200 Limits/Hardstops

ADRT-260

ADRT Series

Rotary Stages

ADRT Series DIMENSIONS

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

www.aerotech.com

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series

ADRT-260 LIMIT OPTION: AVAILABLE TRAVELS LIMITS HARDSTOPS CONFIGURATION ANGLE CONFIGURATION ANGLE -LI+-5 +/- 5 -HS+-10 +/- 10 -LI+-10 +/- 10 -HS+-15 +/- 15 -LI+-20 +/- 20 -HS+-25 +/- 25 -LI+-30 +/- 30 -HS+-35 +/- 35 -LI+-40 +/- 40 -HS+-45 +/- 45 -LI+-45 +/- 45 -HS+-50 +/- 50 -LI+-50 +/- 50 -HS+-55 +/- 55 -LI+-60 +/- 60 -HS+-65 +/- 65 -LI+-70 +/- 70 -HS+-75 +/- 75 -LI+-80 +/- 80 -HS+-85 +/- 85 -LI+-90 +/- 90 -HS+-95 +/- 95 -LI+-100 +/- 100 -HS+-105 +/- 105 -LI+-110 +/- 110 -HS+-115 +/- 115 -LI+-120 +/- 120 -HS+-125 +/- 125 -LI+-130 +/- 130 -HS+-135 +/- 135 -LI+-135 +/- 135 -HS+-140 +/- 140 -LI+-140 +/- 140 -HS+-145 +/- 145 -LI+-150 +/- 150 -HS+-155 +/- 155

Rotary Stages

ADRT-260 Limits/Hardstops

ADRT Series ORDERING INFORMATION

ADRT

-200

-155

-S

-50mm

-AS

-NO

-LI±10

-PLOTS

Series

Width (mm)

Height

Bearing Type

Shaft Configuration

Position Transducer

Brake Options

Limits

Options

-100 -150 -200 -260

-85/-135 -115/-135/-180 -155/-185 -160/-180

-NO -BK

-UNLMITED -LI -HS -SRCE -HCW -NOP -24V

-PLOTS -HPD -D25 -RS

ADRT Series

Rotary Stages

Ordering Example

-S -P

-50mm -35mm

-AS -XX

ADRT Series Rotary Stage ADRT-100-85 ADRT-100-135 ADRT-150-115 ADRT-150-135 ADRT-150-180 ADRT-200-155 ADRT-200-185 ADRT-260-160 ADRT-260-180

Direct-drive rotary table with 13 mm clear aperture and 0.4 N-m continuous torque Direct-drive rotary table with 13 mm clear aperture and 1.96 N-m continuous torque Direct-drive rotary table with 50 mm clear aperture and 3.6 N-m continuous torque Direct-drive rotary table with 50 mm clear aperture and 6.5 N-m continuous torque Direct-drive rotary table with 50 mm clear aperture and 11.4 N-m continuous torque Direct-drive rotary table with 75 mm clear aperture and 16.9 N-m continuous torque Direct-drive rotary table with 75 mm clear aperture and 24.4 N-m continuous torque Direct-drive rotary table with 100 mm clear aperture and 30.4 N-m continuous torque Direct-drive rotary table with 100 mm clear aperture and 44.5 N-m continuous torque

Stage Bearing Options -S -P

Dual standard-grade bearings Dual precision-grade bearings

Shaft Configuration* -50mm -35mm

50 mm clear aperture 35 mm clear aperture

*Note: Required for ADRT-150-xxx only

Position Transducer -AS -X5 -X10 -X25 -X50

Standard feedback device; 1 Vpp sine wave output; 240 arc-sec resolution on ADRT-200/260; 360 arc-sec resolution on ADRT-150; final resolution multiplier dependent Square wave digital output; 12 arc-sec resolution on ADRT-200/260 and 18 arc-sec resolution on ADRT-150 Square wave digital output; 6 arc-sec resolution on ADRT-200/260 and 9 arc-sec resolution on ADRT-150 Square wave digital output; 2.4 arc-sec resolution on ADRT-200/260 and 3.6 arc-sec resolution on ADRT-150 Square wave digital output; 1.2 arc-sec resolution on ADRT-200/260 and 1.8 arc-sec resolution on ADRT-150

Note: Digital output encoder signals are synthesized with a 16 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is at least 16 MHz or higher. Slower clock rates are available on request.

Brake Options* -NO -BK

No brake Holding brake

*Note: Not available on ADRT-100

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series ORDERING INFORMATION Limits

Options -PLOTS -HPD

-D25

-S -P

Stage accuracy and repeatability documentation; included with -P; optional with -S 4-pin D-style motor power connector with 25-pin D-style feedback connector. Stage-mounted connectors on ADRT-150-xxx, ADRT-200-xxx, and ADRT-260-xxx. Strain-relieved 300 mm pigtail cable connection on ADRT-100-xxx 25-pin D-style motor power connector with 25-pin D-style feedback connector. Stage-mounted connectors on ADRT-150-xxx, ADRT-200-xxx, and ADRT-260-xxx. Strain-relieved 300 mm pigtail cable connection on ADRT-100-xxx Rear shaft seal on ADRT-100-xxx Air-purge fitting

www.aerotech.com

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

ADRT Series

Continuous Rotation Normally-closed limits at ±x degrees, where x=5/10/20/30/40/45/50/60/70/80/90/100/110/120/130 Hardstop end of travel at ±x degrees, where x=10/15/25/35/45/50/55/65/75/85/95/105/115/125/135 Current sourcing limits Home limit uses clockwise limit (counter clockwise default) Normally open limit (normally closed default) 24 VDC rated limits

Rotary Stages

-UNLIMITED -LI±x -HS±x -SRCE -HCW -NOP -24V