Your Partner for Vacuumand. Technologies

Your Partner for Vacuumand Thinfilm-Coating Technologies Development of the Company  1993 Founded as a sales company  1998 Consistent developme...
Author: Owen Gray
1 downloads 0 Views 2MB Size
Your Partner for Vacuumand Thinfilm-Coating Technologies

Development of the Company 

1993 Founded as a sales company



1998 Consistent development of in-house engineering and manufacturing of systems for HV and UHV applications



2008 Change of the company‘s legal form to JUST VACUUM GmbH is basis for further international expansion



2009 Cooperation with General Plasma Inc., an innovation leader in vacuum thinfilm-coating



2010 Development of system controls and automation technologies for vacuum systems



2011 European-wide installations of vacuum systems and linear coating systems for industrial and R&D applications



2014 Cooperation with Tecport Optics Inc., a leading manufacturer of Batch Deposition Systems

2 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Contact Persons Gerhard Just

Dr. Christian Hannke

General Manager Tel.: +49 (0) 63 71 - 92 76 10 [email protected]

General Manager Tel.: +49 (0) 63 71 - 92 76 24 [email protected]

Dipl.-Ing. (FH) Andreas Jörg Project Manager Tel.: +49 (0) 63 71 - 92 76 23 [email protected]

Alexander Zörner

Friedrich Rempuschefsky

Field Service South [email protected]

Field Service North [email protected]

Matthias Simon

Anatoli Schulz

Yvonne Amann

Sales and Quality Support Tel.: +49 (0) 63 71 - 92 76 27 [email protected]

Sales Support Tel.: +49 (0) 63 71 - 92 76 00 [email protected]

Sales Support and Purchasing Tel.: +49 (0) 63 71 - 92 76 14 [email protected]

3 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Product Range       

4 - 05/2015

Linear Coating Systems Batch Coating Systems Vacuum Systems and Chambers Vacuum Valves Vacuum Feedthroughs Standard Vacuum Parts Service & Maintenance

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Linear Coating Sources In cooperation with our partner General Plasma Inc., an innovation leader in vacuum thin film coating, JUST VACUUM offers high performance sputter magnetrons and ion sources. JUST VACUUM represents the products of GPi in Europe.

We supply magnetrons with excellent deposition film properties, low maintenance and increased target utilization. 

Rotary Magnetron Cathode RMC high-duty, excellent target utilization, up to 4 m target length



Linear PECVD Technology high deposition rates, long lifetime



Ion Sources high performance industrial ion sources



Planar Magnetron Mov-Mag™ great target utilization, high uniformity, low maintenance

5 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Rotary Magnetron Cathode RMC         

6 - 05/2015

Excellent deposition uniformity +/- 1,5% Target utilization > 80% possible Focused field magnetics improves deposition efficiency No lip seals Ferrofluid vacuum seals Ceramic rotary water seal Stiff, high quality design 3 endblock configurations possible Sputtering of magnetic materials possible

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Linear PECVD Technology

Linear PECVD Source

Dual PECVD Source in operation

New deposition technology for in-line, moving substrate coating  High deposition rate (e.g. 200 nm-m/min for SiO2)  Protected electrode (extended production runs)  Operating pressure compatible with sputtering

7 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

PPALS™ Pointed Pole Anode Layer Ion Source       

High dynamic etch rate (15 – 20 nm-m/min) Excellent uniformity 10x reduction in contamination Rugged construction Easy retrofit for existing Anode Layer Ion Sources of all manufacturers Lengths over 3 m possible Many applications, e.g.: • • • •

8 - 05/2015

Removal of surface contaminations Improved adhesion characteristics Removal of oxided surfaces Removal of sodium on glass surfaces

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Planar Magnetron Mov-Mag™        

9 - 05/2015

Improved target utilization 60% guaranteed with Mov-Mag 125 Excellent deposition film properties Compact design Enables direct retrofit of existing Planar Magnetrons ITO coatings Rare metals Dual AC sputtering of conductive materials Homogeneous deposition quality

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Batch Coating Systems Tecport is a market leader in manufacturing of Batch Deposition Systems and assures excellent product quality, continuous technical innovation and a first-class customer service. True to its motto "We Serve To Serve Again!" Tecport established itself on the market.

• •





10 - 05/2015

Flexible evaporation techniques Integration of the most sophisticated and timetested instruments by industrial leaders Advanced yet simplified software design to satisfy the most demanding engineer, and yet still provide a very user friendly interface for the beginning technician Complete process automation, remote control, trending, data analysis and recovery

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Systems and Chambers     

Customized Vacuum and Thinfilm-Coating Systems for industrial and R&D applications PC- and SPS-based system controls and process visualization State-of-the-art engineering and manufacturing equipment in house Dedicated engineers with long-time experience in the Vacuum and Thinfilm-Coating industry Full service package: from mechanical and electro-technical engineering to installation and start-up at customer site

Space Simulation Vacuum Chambers 11 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Systems and Chambers Materials  

Stainless steel1.4301 (304), 1.4307 (304L), 1.4435 (316L) and other qualities, aluminum, copper Mu-Metal equipment with 316LN-ESU flanges in UHV range

Designs and Sizes 

Cylindrical, ball-shaped and rectangular chambers

Applications      

12 - 05/2015

Space Simulation Leak Test Systems Cryo Technology Coating Systems Superconductor Technology and many more

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Systems and Chambers Benefits of In-House Production   

  

 

13 - 05/2015

CAD design of all necessary parts with Pro-Engineer Mechanical processing like turning, milling, drilling Assembly according to HV- and UHV-technical requirements: WIG / MAG welding Surface treatment: electro polished, bated or blasted with glass beads, depending on the application PC- and SPS-based system control and process visualization Helium leakage testing with test report depending on the application: from < 1 x 10-9 to 10-4 mbar l/s Installation and start-up at customer location Service and maintenance

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Systems and Chambers Software & Tools Mechanical Engineering  3D CAD System Pro/E Wildfire 4  AutoCAD  More than 10 years experience in designing and coordination of vacuum systems Electrical Engineering according to VDE  Siemens S7 • 300/400 SPS • 1200/1500 SPS  WAGO CodeSys  Programming in TIA-Portal  Visualization with WinCC / WinCC Advanced  Electric diagrams with E-Plan P8

14 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Systems and Chambers Quality JUST VACUUM has instituted and applies a certified Quality Management System according to DIN EN ISO 9001-2008. Our most important quality criteria is summarized in the following table: Leakage rate

< 1,0 x 10-9 mbar l/s • Welded parts are checked individually • With test certificate

Welding seams

Inside or welded-through from outside

Surface quality

Milled parts: • Blank • Roughness N8, sealing surface N6, N7 Welded parts: • KF and ISO: glass bead blasted inside and outside • CF: inside blank, outside polished or glass bead blasted • Roughness N8 or better • Elektro polished on request

Cleaning

• • • •

Oil- and grease-free Hydrocarbon-free Cleaned with de-ionized water Ultrasonic cleaning on request

Packaging

• • •

Dust-proof packed in bags or foil Protected against damage Clean room packaging on request

15 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Reference Projects Thermal-Vacuum-Chamber for simulation of space conditions For a German research institute Currently Europe-wide biggest space simulation system Consists of:  Vacuum chamber: 6 meters length, 3 meters Ø  Copper shroud: 5 meters length, 2,5 meters Ø  Segmented thermal table with ascending mechanism  Cryo and turbo pumps  Temperature control system from -175°C up to +120°C  Operating software, PLC and visualization Development, engineering, programming and manufacturing in house

Installation and start-up in a clean room at customer site 16 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Reference Projects Thermal-Vacuum-Chamber for simulation of space conditions For a German research institute Consists of:  Vacuum chamber: 1,2 meters length, 0,8 meters Ø  Copper shroud: 0,8 meters length, 0,6 meters Ø  Thermal table: 0,5 x 0,4 meters  Cryo- and rotary screw pump  Dynamic temperature control system, from -80°C up to +120°C  Operating software, PLC and visualization Development, engineering, programming and manufacturing in house

Installation and start-up in a clean room at customer site

17 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Reference Projects Thermal-Vacuum-Chamber TVAC 2.0 for simulation of space conditions Temperature controllable between -80°C and +120°C Consists of:  Vacuum chamber  Thermal table  Copper shroud  Cryo pump  Dynamic temperature control system  Sensor system  Lifting device  Operating software, PLC and visualization  Footprint 2 m x 2 m, height: 3 m Development, engineering, programming and manufacturing in house Installation and start-up at customer site in Norway 18 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Reference Projects HV Vacuum System for deposition of piezo elements for automotive industries Consists of:  Vacuum chamber with integrated x/y sliding unit  Pumping station with fore pump and high vacuum pump  Measuring and sensor technologies  SPS based system control and process visualization Development, engineering, programming and manufacturing in house

19 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Reference Projects Double-Wall UHV Chamber Designed and manufactured according to customer specifications With cooling system and heating elements

20 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

VAT® Valves & Gate Valves HV Angle- and Inline-Valves

Vacuum Gate Valves

• Actuation: manual, pneumatic or electromagnetic • Sizes: DN 16 to DN 100 • Material: stainless steel or aluminum • Optional w. shaft feedthrough or bellow

• Low cost aluminum gate valve with shaft feedthrough • Actuation: manual or pneumatic • Sizes: DN 63 to DN 320

UHV Angle- and Inline-Valves

HV Gate Valves

• • • • •

• General purpose gate valve with rotary feedthrough • Actuation compact and variable, optional manual or pneumatic • Sizes: DN 63 to DN 400

Actuation: manual or pneumatic Sizes: DN 16 to DN 63 Material: stainless steel Feedthrough: bellow Running cycles: 3 millions

UHV Gate Valves • Stainless steel gate valve with rotary feedthrough • Metallic head sealing • Actuation compact and variable, optional manual or pneumatic • Sizes: DN 63 to DN 320

21 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Valves DN 250 – 1000 HV Angle Valves in Big Sizes      

22 - 05/2015

Nominal size DN 250 up to DN 1000 Electro-pneumatically operated With bellow Position indicator with REED sensor Air Solenoid: 24 V DC, 24 V AC, 240 V AC Dimensions can be adapted individually

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Feedthroughs We manufacture the following vacuum suitable feedthroughs according to the customers need:      

23 - 05/2015

Electrical feedthroughs Cable feedthroughs Thermo couples Mechanical feedthroughs View ports Feedthroughs for liquids

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Vacuum Parts A major part of the vacuum technology are the vacuum parts. Using these components in vacuum applications asks for high standards regarding material quality and manufacturing. We have many standard components on stock:  KF flange parts  ISO-K clamping flange parts  CF flange parts  Nipples  Flanged bellows  Flexible hoses In addition, we are specified in manufacturing non-standard vacuum components according to your demands. You can also visit our Online-Shop.

24 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Service & Maintenance With our experienced and well trained service team we assure a complete after sales service:  

   

25 - 05/2015

Mechanical and electro-technical service and maintenance of your Vacuum System Service and maintenance of Rotary and Planar Magnetrons, Ion Sources and PECVD Systems Consulting regarding the operating of your Vacuum and Thinfilm-Coating System Process support for Thinfilm-Coating Systems Retrofit and upgrading of existing Vacuum and Thinfilm-Coating Systems 24 h delivery of spare parts

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Why JUST VACUUM?    

 

26 - 05/2015

Trained, multilingual qualified personnel Europe-wide service In close cooperation with leading international partners Complete service: from mechanical and electrotechnical design and assembling up to installation and start-up Wide range of available spare parts and standard vacuum parts Fast delivery

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com

Your Partner for Vacuumand Thinfilm-Coating Technologies

Thank you for your attention

We are looking forward to a close cooperation with mutual success.

27 - 05/2015

JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com