Your Partner for Vacuumand Thinfilm-Coating Technologies
Development of the Company
1993 Founded as a sales company
1998 Consistent development of in-house engineering and manufacturing of systems for HV and UHV applications
2008 Change of the company‘s legal form to JUST VACUUM GmbH is basis for further international expansion
2009 Cooperation with General Plasma Inc., an innovation leader in vacuum thinfilm-coating
2010 Development of system controls and automation technologies for vacuum systems
2011 European-wide installations of vacuum systems and linear coating systems for industrial and R&D applications
2014 Cooperation with Tecport Optics Inc., a leading manufacturer of Batch Deposition Systems
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Contact Persons Gerhard Just
Dr. Christian Hannke
General Manager Tel.: +49 (0) 63 71 - 92 76 10
[email protected]
General Manager Tel.: +49 (0) 63 71 - 92 76 24
[email protected]
Dipl.-Ing. (FH) Andreas Jörg Project Manager Tel.: +49 (0) 63 71 - 92 76 23
[email protected]
Alexander Zörner
Friedrich Rempuschefsky
Field Service South
[email protected]
Field Service North
[email protected]
Matthias Simon
Anatoli Schulz
Yvonne Amann
Sales and Quality Support Tel.: +49 (0) 63 71 - 92 76 27
[email protected]
Sales Support Tel.: +49 (0) 63 71 - 92 76 00
[email protected]
Sales Support and Purchasing Tel.: +49 (0) 63 71 - 92 76 14
[email protected]
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Product Range
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Linear Coating Systems Batch Coating Systems Vacuum Systems and Chambers Vacuum Valves Vacuum Feedthroughs Standard Vacuum Parts Service & Maintenance
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Linear Coating Sources In cooperation with our partner General Plasma Inc., an innovation leader in vacuum thin film coating, JUST VACUUM offers high performance sputter magnetrons and ion sources. JUST VACUUM represents the products of GPi in Europe.
We supply magnetrons with excellent deposition film properties, low maintenance and increased target utilization.
Rotary Magnetron Cathode RMC high-duty, excellent target utilization, up to 4 m target length
Linear PECVD Technology high deposition rates, long lifetime
Ion Sources high performance industrial ion sources
Planar Magnetron Mov-Mag™ great target utilization, high uniformity, low maintenance
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Rotary Magnetron Cathode RMC
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Excellent deposition uniformity +/- 1,5% Target utilization > 80% possible Focused field magnetics improves deposition efficiency No lip seals Ferrofluid vacuum seals Ceramic rotary water seal Stiff, high quality design 3 endblock configurations possible Sputtering of magnetic materials possible
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Linear PECVD Technology
Linear PECVD Source
Dual PECVD Source in operation
New deposition technology for in-line, moving substrate coating High deposition rate (e.g. 200 nm-m/min for SiO2) Protected electrode (extended production runs) Operating pressure compatible with sputtering
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
PPALS™ Pointed Pole Anode Layer Ion Source
High dynamic etch rate (15 – 20 nm-m/min) Excellent uniformity 10x reduction in contamination Rugged construction Easy retrofit for existing Anode Layer Ion Sources of all manufacturers Lengths over 3 m possible Many applications, e.g.: • • • •
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Removal of surface contaminations Improved adhesion characteristics Removal of oxided surfaces Removal of sodium on glass surfaces
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Planar Magnetron Mov-Mag™
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Improved target utilization 60% guaranteed with Mov-Mag 125 Excellent deposition film properties Compact design Enables direct retrofit of existing Planar Magnetrons ITO coatings Rare metals Dual AC sputtering of conductive materials Homogeneous deposition quality
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Batch Coating Systems Tecport is a market leader in manufacturing of Batch Deposition Systems and assures excellent product quality, continuous technical innovation and a first-class customer service. True to its motto "We Serve To Serve Again!" Tecport established itself on the market.
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Flexible evaporation techniques Integration of the most sophisticated and timetested instruments by industrial leaders Advanced yet simplified software design to satisfy the most demanding engineer, and yet still provide a very user friendly interface for the beginning technician Complete process automation, remote control, trending, data analysis and recovery
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Systems and Chambers
Customized Vacuum and Thinfilm-Coating Systems for industrial and R&D applications PC- and SPS-based system controls and process visualization State-of-the-art engineering and manufacturing equipment in house Dedicated engineers with long-time experience in the Vacuum and Thinfilm-Coating industry Full service package: from mechanical and electro-technical engineering to installation and start-up at customer site
Space Simulation Vacuum Chambers 11 - 05/2015
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Systems and Chambers Materials
Stainless steel1.4301 (304), 1.4307 (304L), 1.4435 (316L) and other qualities, aluminum, copper Mu-Metal equipment with 316LN-ESU flanges in UHV range
Designs and Sizes
Cylindrical, ball-shaped and rectangular chambers
Applications
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Space Simulation Leak Test Systems Cryo Technology Coating Systems Superconductor Technology and many more
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Systems and Chambers Benefits of In-House Production
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CAD design of all necessary parts with Pro-Engineer Mechanical processing like turning, milling, drilling Assembly according to HV- and UHV-technical requirements: WIG / MAG welding Surface treatment: electro polished, bated or blasted with glass beads, depending on the application PC- and SPS-based system control and process visualization Helium leakage testing with test report depending on the application: from < 1 x 10-9 to 10-4 mbar l/s Installation and start-up at customer location Service and maintenance
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Systems and Chambers Software & Tools Mechanical Engineering 3D CAD System Pro/E Wildfire 4 AutoCAD More than 10 years experience in designing and coordination of vacuum systems Electrical Engineering according to VDE Siemens S7 • 300/400 SPS • 1200/1500 SPS WAGO CodeSys Programming in TIA-Portal Visualization with WinCC / WinCC Advanced Electric diagrams with E-Plan P8
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Systems and Chambers Quality JUST VACUUM has instituted and applies a certified Quality Management System according to DIN EN ISO 9001-2008. Our most important quality criteria is summarized in the following table: Leakage rate
< 1,0 x 10-9 mbar l/s • Welded parts are checked individually • With test certificate
Welding seams
Inside or welded-through from outside
Surface quality
Milled parts: • Blank • Roughness N8, sealing surface N6, N7 Welded parts: • KF and ISO: glass bead blasted inside and outside • CF: inside blank, outside polished or glass bead blasted • Roughness N8 or better • Elektro polished on request
Cleaning
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Oil- and grease-free Hydrocarbon-free Cleaned with de-ionized water Ultrasonic cleaning on request
Packaging
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Dust-proof packed in bags or foil Protected against damage Clean room packaging on request
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Reference Projects Thermal-Vacuum-Chamber for simulation of space conditions For a German research institute Currently Europe-wide biggest space simulation system Consists of: Vacuum chamber: 6 meters length, 3 meters Ø Copper shroud: 5 meters length, 2,5 meters Ø Segmented thermal table with ascending mechanism Cryo and turbo pumps Temperature control system from -175°C up to +120°C Operating software, PLC and visualization Development, engineering, programming and manufacturing in house
Installation and start-up in a clean room at customer site 16 - 05/2015
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Reference Projects Thermal-Vacuum-Chamber for simulation of space conditions For a German research institute Consists of: Vacuum chamber: 1,2 meters length, 0,8 meters Ø Copper shroud: 0,8 meters length, 0,6 meters Ø Thermal table: 0,5 x 0,4 meters Cryo- and rotary screw pump Dynamic temperature control system, from -80°C up to +120°C Operating software, PLC and visualization Development, engineering, programming and manufacturing in house
Installation and start-up in a clean room at customer site
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Reference Projects Thermal-Vacuum-Chamber TVAC 2.0 for simulation of space conditions Temperature controllable between -80°C and +120°C Consists of: Vacuum chamber Thermal table Copper shroud Cryo pump Dynamic temperature control system Sensor system Lifting device Operating software, PLC and visualization Footprint 2 m x 2 m, height: 3 m Development, engineering, programming and manufacturing in house Installation and start-up at customer site in Norway 18 - 05/2015
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Reference Projects HV Vacuum System for deposition of piezo elements for automotive industries Consists of: Vacuum chamber with integrated x/y sliding unit Pumping station with fore pump and high vacuum pump Measuring and sensor technologies SPS based system control and process visualization Development, engineering, programming and manufacturing in house
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Reference Projects Double-Wall UHV Chamber Designed and manufactured according to customer specifications With cooling system and heating elements
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
VAT® Valves & Gate Valves HV Angle- and Inline-Valves
Vacuum Gate Valves
• Actuation: manual, pneumatic or electromagnetic • Sizes: DN 16 to DN 100 • Material: stainless steel or aluminum • Optional w. shaft feedthrough or bellow
• Low cost aluminum gate valve with shaft feedthrough • Actuation: manual or pneumatic • Sizes: DN 63 to DN 320
UHV Angle- and Inline-Valves
HV Gate Valves
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• General purpose gate valve with rotary feedthrough • Actuation compact and variable, optional manual or pneumatic • Sizes: DN 63 to DN 400
Actuation: manual or pneumatic Sizes: DN 16 to DN 63 Material: stainless steel Feedthrough: bellow Running cycles: 3 millions
UHV Gate Valves • Stainless steel gate valve with rotary feedthrough • Metallic head sealing • Actuation compact and variable, optional manual or pneumatic • Sizes: DN 63 to DN 320
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Valves DN 250 – 1000 HV Angle Valves in Big Sizes
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Nominal size DN 250 up to DN 1000 Electro-pneumatically operated With bellow Position indicator with REED sensor Air Solenoid: 24 V DC, 24 V AC, 240 V AC Dimensions can be adapted individually
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Feedthroughs We manufacture the following vacuum suitable feedthroughs according to the customers need:
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Electrical feedthroughs Cable feedthroughs Thermo couples Mechanical feedthroughs View ports Feedthroughs for liquids
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Vacuum Parts A major part of the vacuum technology are the vacuum parts. Using these components in vacuum applications asks for high standards regarding material quality and manufacturing. We have many standard components on stock: KF flange parts ISO-K clamping flange parts CF flange parts Nipples Flanged bellows Flexible hoses In addition, we are specified in manufacturing non-standard vacuum components according to your demands. You can also visit our Online-Shop.
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Service & Maintenance With our experienced and well trained service team we assure a complete after sales service:
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Mechanical and electro-technical service and maintenance of your Vacuum System Service and maintenance of Rotary and Planar Magnetrons, Ion Sources and PECVD Systems Consulting regarding the operating of your Vacuum and Thinfilm-Coating System Process support for Thinfilm-Coating Systems Retrofit and upgrading of existing Vacuum and Thinfilm-Coating Systems 24 h delivery of spare parts
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Why JUST VACUUM?
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Trained, multilingual qualified personnel Europe-wide service In close cooperation with leading international partners Complete service: from mechanical and electrotechnical design and assembling up to installation and start-up Wide range of available spare parts and standard vacuum parts Fast delivery
JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com
Your Partner for Vacuumand Thinfilm-Coating Technologies
Thank you for your attention
We are looking forward to a close cooperation with mutual success.
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JUST VACUUM GmbH | Daimlerstraße 17 | 66849 Landstuhl Tel.: +49 (0) 6371 / 9276 – 00 | Fax: +49 (0) 6371 / 9276 – 41 | www.justvacuum.com