Welcome. organized by: in collaboration with:

Welcome organized by: in collaboration with: 2008 Organizing committee • Symposium Chair Geert Vandenberghe (IMEC) • Co-chairs Bryan Rice (SEMATEC...
Author: Meagan Kelley
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Welcome organized by:

in collaboration with:

2008 Organizing committee • Symposium Chair Geert Vandenberghe (IMEC) • Co-chairs

Bryan Rice (SEMATECH/Intel) Takeshi Kato (Selete)

• Program Chair

Roel Gronheid (IMEC)

• Meeting logistics

Ariane Distelmans (IMEC) Marcy De Biccari (SEMATECH)

Geert Vandenberghe © imec 2008

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2008 Steering Committee

• • • • • • • • • •

Robert Bristol (Intel) Will Conley (Freescale) Ralph Dammel (AZ-EM) Donis Flagello (ASML) Toshiro Itani (SELETE) Winfried Kaiser (Carl Zeiss) Hyun-Woo Kim (Samsung) Jongwook Kye (AMD) Burn Lin (TSMC) Jan Macie (Makos) (Brewer Science)

• • • • • • • • • •

Arpan Mahorowala (IBM) Katsumi Ohmori (TOK) Soichi Owa (Nikon) Eric Panning (Intel) Kurt Ronse (IMEC) Mordechai Rothschild (MIT/LL) Bruce Smith (RIT) Akiyoshi Suzuki (Canon) Takayuki Uchiyama (NEC) David Van Steenwinckel (NXP)

Geert Vandenberghe © imec 2008

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2008 Immersion Lithography Symposium Sponsors

FUJIFILM

Electron

Materials

Flashback to the 2007 Symposium (in Keystone, CO) • 2007 Critical issues list 1 2 3 4 5 6 7 8 9 10 11 12 13

LuAG glass development Timing/Economics issues High index fluids -- G2 manufacturing readiness High Index fluids -- G3 research Double exposure material (2 flash/1 etch) development Double patterning development -- hardware/materials Double resist coats/sidewall imaging/resist freezing High index resist development Double patterning development -- modeling/pattern split Other lens material solutions for RI > 1.56 193 nm resist development (resolution/LWR/sensitivity) Intermediate goals? (BaLiF???) Large angle patterning

• Targeted topics for the 2008 symposium: – High Index Optical Materials - High Index Immersion Fluids - High Index Resists – Double Exposure/Double Patterning Materials and processes Design Split Methods – Process control – Hyper NA tools – Hyper NA imaging – Hyper NA Masks Geert Vandenberghe © imec 2008

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Change in symposium scope • Total number of abstracts: 66 (2007) Æ 63 (2008) • New symposium scope (towards extendibility of immersion lithography) is reflected in this year’s symposium title and program with > 25 abstracts on defectivity/top coats/…

40 35 30 25 20 15 10 5 0

34 abstracts on double patterning

2008 2007

2007

Hi gh

In de x

SP

2008

Im

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Do ub le

Pa tte rn in g Geert Vandenberghe © imec 2008

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Regional spread of abstracts

Australia, 1 Korea, 1 Japan, 18

US, 24

Europe, 19

Number of 2008 Symposium attendees: 232 (status this morning) Geert Vandenberghe © imec 2008

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Practical information • The Hague – information guide (musea, shopping), city maps, public transport (tram) map

• World Forum Convention Center – floor map

• Symposium Dinner: tonight – 6pm-10pm: Madurodam (miniature city)

• Sightseeing tours: Wednesday afternoon – Amsterdam tour – The Hague tour

• Meeting evaluation form Geert Vandenberghe © imec 2008

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Den Haag – The Hague

Geert Vandenberghe © imec 2008

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Practical information • The Hague – information guide (musea, shopping), city maps, public transport (tram) map

• World Forum Convention Center – floor map

• Symposium Dinner: tonight – 6pm-10pm: Madurodam (miniature city)

• Sightseeing tours: Wednesday afternoon – Amsterdam tour – The Hague tour

• Meeting evaluation form Geert Vandenberghe © imec 2008

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World Forum Convention Center International Criminal Tribunal for the former Yugoslavia (Karadžić)

Novotel World Forum Convention Center Golden Tulip hotel IMAX movie theater

Gemeentemuseum

Science Museum

Mondriaan, … Geert Vandenberghe © imec 2008

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World Forum Convention Center – 1st floor

Toilets

“WFCC-1”

Reg. desk

Stairs

Amazon Foyer Posters and breaks

Amazon Presentations

Yangtze 1 & 2 Breakfast/Lunch

Terrace

Practical information • The Hague – information guide, city maps, public transport (tram) map

• World Forum Convention Center – floor map

• Symposium Dinner: tonight – 6pm-10pm: Madurodam (miniature city)

• Sightseeing tours: Wednesday afternoon – Amsterdam tour – The Hague tour

• Meeting evaluation form

Geert Vandenberghe © imec 2008

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Symposium dinner @ Madurodam

Geert Vandenberghe © imec 2008

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Immersion Symposium Dinner – Tuesday September 23, 2008. • Shuttle buses from World Forum to Madurodam available from 5.30pm-6.00pm. • Walking distance from World Forum to Madurodam: 1200m (20min walk). • Dinner starts at 6pm with a reception and possibility to visit the miniature city. • Shuttle buses to the symposium hotels will be available after the dinner (10pm).

World Forum

Madurodam

Practical information • The Hague – information guide, city maps, public transport (tram) map

• World Forum Convention Center – floor map

• Symposium Dinner: tonight – 6pm-10pm: Madurodam (miniature city)

• Sightseeing tours: Wednesday afternoon – Amsterdam tour – 70$/45€ – The Hague tour – 50$/32€

• Meeting evaluation form

Geert Vandenberghe © imec 2008

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Sightseeing tours Wednesday afternoon: 1pm-7pm

• Amsterdam tour - 70$/45€ – canal cruise – visit Rijksmuseum

• The Hague tour - 50$/32€ – visit of Delft (incl. Delftware painting factory), beach resort Scheveningen and The Hague – visit Panorama Mesdag

Sightseeing tour tickets will be sold upon spaceavailable basis at the registration desk until 1.30pm today. Geert Vandenberghe © imec 2008

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Practical information • The Hague – information guide, city maps, public transport (tram) map

• World Forum Convention Center – floor map

• Symposium Dinner: tonight – 6pm-10pm: Madurodam (miniature city)

• Sightseeing tours: Wednesday afternoon – Amsterdam tour – 70$/45€ – The Hague tour – 50$/32€

• Meeting evaluation form – please return the yellow form to the registration desk by Thursday

Geert Vandenberghe © imec 2008

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Topical spread

35 Oral Poster Total

30 25 20 # papers 15 10 5 0 High Index

Single Patterning

Double Patterning

Geert Vandenberghe © imec 2008

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Program at a Glance Tue Sept. 23 Opening + Keynote Double Patterning Process Control Lunch High Index Materials

Wed Sept. 24 Double Patterning Materials Double Patterning Design Split Lunch -Networking -City Tours (optional)

Thu Sept. 25 Exposure Tools Double Patterning Materials Panel Discussion Lunch

Poster Session Symposium Dinner

Geert Vandenberghe © imec 2008

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Other Program Information • Abstracts available on memory stick in your bag • 2 Flyers with program/posters in your bag • Wednesday start at 8:25 (last minute cancellation of DM01) – Breakfast available from 7:30 onwards

• Posters will be displayed throughout the symposium • Presentations and posters will be distributed through the Sematech website after the symposium – Notification will be sent by e-mail to all Symposium attendees

• Poster/paper presenters: hand in your presentation for distribution through website – at the stage during one of the breaks

• Please use the audience microphones for your questions and put your cell phones in silent mode.

Geert Vandenberghe © imec 2008

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Keynote Presentation Presenter: C.P. Ausschnitt (IBM) “Pattern Control on the Precipice”

Geert Vandenberghe © imec 2008

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Lithographer’s Prayer by Kit Ausschnitt E-beams can raster but photons are phaster. Ions may take charge but be way too large. Should anyone ask the hard x-ray task is still in the mask. Reflective remorse doth EUV force by dim mask and source.

Through Lord Rayleigh’s dream we RETro careen to low-k extreme; While, heaven forfend, we all must pretend optics will extend extend extend extend . . . Lithographic world without end Amen Geert Vandenberghe © imec 2008

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