Vacuum Measurement Rough and Medium Vacuum Gauges and Controllers

Active Vacuum Gauges

Controllers for Active Vacuum Gauges 10

High and Ultra High Vacuum Gauges and Controllers

Beam Flux Monitor

Cables

Contents Criteria for the selection of vacuum gauges Vacuum pressure ranges Conversion of pressure units Product overview Glossary Typical measuring ranges of different vacuum gauges Measuring methods

Page Page Page Page Page Page Page Page

Rough and Medium Vacuum Gauges and Controllers

Page 10-10 to 10-18

Active Vacuum Gauges

Page 10-19 to 10-31

Controllers for Active Vacuum Gauges

Page 10-32 to 10-36

High and Ultra High Vacuum Gauges and Controllers

Page 10-37 to 10-48

Beam Flux Monitor

Page 10-49 to 10-50

Cables

Page 10-51 to 10-54

Introduction

10-3 to 10-9 10-3 10-3 10-3 10-4 to 10-5 10-6 10-7 10-7 to 10-9

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10-2

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Vacuum Measurement Instrumentation VACOM provides reliable vacuum measurement instruments for a wide range of applications between atmosphere and ultra high vacuum: technologically leading products, a comprehensive catalogue range, as well as OEM versions of own metrology products. In addition, VACOM offers     

Professional guidance - we support you in choosing the right instruments Instruments and other system components from one source Quick processing of quotes and orders Short delivery times In-house technical service

Call our customer consultants on work days from 7.30 a.m to 5.30 p.m CET: +49 (0)3641 4275-0, or e-mail to: [email protected]

Criteria for the selection of vacuum gauges Measurement range Which measurement method offers an appropriate measurement range? Is one single method sufficient or is it necessary to combine different methods? Are combination gauges applicable? Accuracy, reproducibility, response time What measurement accuracy does the vacuum application require? Which measuring method offers sufficient accuracy? What reproducibility and response time of the sensor is necessary? Composition of the process media Are correction factors for gas-type dependent measurements necessary and known? Is the gas composition variable? Process conditions and environmental conditions To which process media or conditions is the sensor exposed? (media: corrosive, hazardous, oxidizing / deoxidizing, etc.; process conditions: contaminating or coating, low / high temperatures, high voltages, magnetic fields, glow discharges and other plasmas, fast pressure rise or pressure shock, etc.). Is a protection of the gauge in front of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.? Which requirements result from environmental conditions? (vibration resistance, protection against contaminants and water, mechanical robustness, climatical and geographical conditions, ionizing radiation, etc.) Is there a danger of ignitable gas mixtures? Are explosion-proof gauges required? Bakeout capability What temperature stability is required for the gauge and the gauge cable? Need temperature sensitive parts to be removable? Readings display Is a pressure display required? If yes, is an active gauge with integrated display appropriate or a separate display unit for one or more gauges? Process control, data logging Which setpoints, analog outputs, PC or fieldbus interfaces need to be available? Signal transmission Which type of signal needs to be transmitted over which cable lengths and in which quality?

Vacuum pressure ranges

Conversion of pressure units 1 Pa 1 mbar 1 Torr

= 0.01 mbar = 0.0075 Torr = 100 Pa = 1 hPa = 0.1 kPa = 0.75 Torr = 1 mmHg = 133 Pa = 1.33 mbar

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1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar 1 psi = 6895 Pa = 69 mbar = 51.7 Torr 1 atm = 760 Torr = 1013 hPa = 1013 mbar = 14.7 psi

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10

Vacuum Measurement Instrumentation Product overview

Rough and medium vacuum gauges and controllers

Active vacuum gauges

10 Controllers for active vacuum gauges

High and ultra high vacuum gauges and controllers

Beam Flux Monitor

10-4

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Vacuum Measurement Instrumentation Features of active vacuum gauges

Possible combinations of active or passive vacuum gauges and controllers

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Features of vacuum gauge controllers and meters

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10-5

Vacuum Measurement Instrumentation Glossary Absolute pressure indicates the pressure relative to absolute vacuum. I.e. absolute vacuum = 0 mbar absolute, atmospheric pressure = 1013 mbar absolute (under normal conditions). The absolute pressure of a gas is defined as the force of the gas particles per surface unit. Relative pressure (or gauge pressure) indicates the pressure relative to atmospheric pressure. I.e. absolute vacuum = -1013 mbar gauge, atmospheric pressure = 0 mbar gauge. Overpressure is indicated with a positive sign. Differential pressure indicates the difference in pressure between two measuring points. Vacuum Means that the absolute pressure of a gas within a system is smaller than the ambient air pressure. Some technical vacuum applications require a low pressure of just a few mbar, other applications reach pressures below 10-9 mbar absolute. This is a thousandth of a billionth of the normal atmospheric pressure and points out the complexity of vacuum measurement. Vacuum gauge, vacuum measurement instrument, vacuum meter Electronic or mechanical instrument for measuring vacuum pressure (sometimes also called manometer). Due to physical constraints, there exists no measuring method that covers the whole range of technically used vacuum (atmospheric pressure to < 10-12 mbar). For different pressure ranges are different gauge types available, limited by physical effects, with different accuracies. The most sensitive vacuum gauges measure absolute pressures of less than 10-12 mbar (15 decades smaller than atmospheric pressure). In general a vacuum measurement instrument comprises a pressure transducer (electronic or mechanical), measurement and control electronics (if applicable), a reading display (electronic or mechanical), and further optional functionalities. Passive vacuum gauge Transducer which turns the measurand (vacuum pressure) into a voltage or electric current according to its characteristic curve. Passive vacuum gauges are used in virtually all cases together with an external measurement and control electronics unit (refer to "controller"). Both are connected with a measurement or gauge cable.

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Active vacuum gauge Device containing a pressure transducer (passive gauge) and a measurement and control electronics. Active gauges provide analog data, e.g. as a 0 … 10 V or 4 … 20 mA output signal, or digital data via interfaces like RS232 or ProfiBus. Digital interfaces additionally allow control of various gauge functions through a programmable logic control. Partially, setpoint relays for process control, digital control inputs, status outputs or readings displays are integrated into the gauge, or available as an option. Controller a) Device containing measurement and control electronics for a passive gauge, which interprets and processes the transducer signal. The electronics supply the transducer with power, controls the measuring circuit, and determines the readings. Usually a readings display is contained. In many cases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relays for process control are integrated or optionally available. b) Device which supplies active gauges with power and displays their output signal in pressure units (mbar, Pa, Torr, etc.). In many cases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relays for process control are integrated or optionally available. Gas-type independent measurement Direct pressure measurement which uses the force that gas particles exert on a surface. Pressure is defined as force per surface unit (in SI units: 1 N/m2 = 1 Pa). According to the kinetic gas theory, the force depends on the number of gas particles per volume (particle density), but is independent of the molar mass of the particles. I.e. the gas type does not affect the measurement. Typical gauges: Bourdon gauge, diaphragm gauge. Gas-type dependent measurement Indirect pressure measurement which doesn't use the force, but another physical property of the gas which depends on the particle density and therefore indirectly on the pressure. E.g. thermal conductivity or ionization. However, these properties not only depend on the particle density, but also on the gas type. To obtain comparability of the readings of different gas-type dependent gauges, they are usually calibrated for nitrogen, since nitrogen is the main component (approx. 80%) of normal air. Typical gauges: thermocouple gauge, Pirani gauge, convection Pirani gauge, ionization gauge. Exponential notation 1.0E-3 mbar = 1.0 x 10-3 mbar.

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Vacuum Measurement Instrumentation Typical measuring ranges of different vacuum gauges

Measuring methods Bourdon gauge Simple mechanical vacuum gauge. A thin metal spiral tube is closed at one end and connected to the vacuum system at the other end. Outside the tube is either normal atmospheric pressure or a defined absolute pressure, dependent on the model. The inside of the tube is evacuated together with the vacuum system. Depending on the pressure difference between inside and outside, the tube bends to a certain extent in the way of a spiral spring. By means of a lever system, the bend is transferred to a calibrated indicator needle and scale which displays the pressure of the vacuum system. Diaphragm vacuum gauges A diaphragm is exposed to a pressure difference between its two sides. One side is exposed to the vacuum, the other side is exposed to normal air pressure (in the case of a relative pressure gauge) or a defined reference pressure (e.g. < 10-6 mbar absolute in the case of an absolute pressure gauge). The pressure difference leads to a deformation of the diaphragm. The extent of the deformation is a measure for the pressure. Diaphragm gauges generate a linear transducer signal, because the force on the diaphragm is directly proportional to the pressure. This principle can be used for vacuum as well as for high pressure. Two common technical designs are the piezo-resistive and the capacit-ance diaphragm gauge. Both types require periodic zero adjustments for accurate measurements.

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Bourdon gauge

Piezo-resistive diaphragm vacuum gauges contain a diaphragm with a piezo-resistive element. The specific resistance of the element changes with deformation of the diaphragm. The resolution reaches usually approx. 0.1% full scale (F.S.), i.e. the usable span is 3 pressure decades. Common piezo-resistive vacuum gauges offer 1300 … 1500 mbar F.S. (well above air pressure). Their longterm and temperature stability as well as their resolution is inferior to capacitive diaphragm vacuum gauges, in return they are significantly lower-priced.

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10-7

Vacuum Measurement Instrumentation Measuring methods (continued) Capacitance diaphragm vacuum gauges The diaphragm acts as one of the two plates of a plate-type capacitor. The capacity changes with deformation of the diaphragm. The lower measurement limit is approx. 0.01% full scale, i.e. the usable span is 4 pressure decades. Capacitive vacuum gauges are available in different versions with 0.1 to 1000 mbar F.S. (or Torr F.S.). The 0.1 mbar F.S. versions require complex temperature control of the gauge in order to reach a lower measurement limit of 10-5 mbar absolute. Heat loss vacuum gauges Heat loss gauges are absolute pressure gauges which are used extensively for medium vacuum measurement, some types also for rough vacuum measurement. They are comparatively cheap, easy to install and are proven in a multitude of applications. The basic principle uses the fact that the thermal conduction of the residual gas depends on its particle density and thus on the pressure. The characteristics of such gauges are not linear, instead they flatten to the lower and the upper measurement limits. Therefore accuracy and reproducibility fall off at the measurement limits. In addition, the measurement is gas-type dependent, since different gases show different thermal conductivity coefficients. Heat loss vacuum gauges are usually calibrated for air or nitrogen. For use with other gases correction factors need to be applied.

Capacitance diaphragm gauge

Thermocouple vacuum gauges Two thin wires of different noble metals cross each other and are welded at the cross-point. This welded point forms a thermocouple. One of the wires is heated by means of a constant current. The resulting temperature of the thermocouple as well as its thermo-electrical voltage depends on the residual gas density. Thus the thermoelectrical voltage is a measure for the vacuum. Thermocouple gauges are robust and inexpensive. They measure between 0.001 mbar and approx. 20 mbar (absolute).

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Pirani vacuum gauges A heated thin wire within the vacuum is part of an adjusted Wheatstone bridge circuit. Due to thermal conduction of the residual gas, more or less energy is dissipated from the wire, depending on the gas density. The heating power required for maintaining a constant wire temperature (approx. 150 °C) serves as a measure for the gas pressure. Pirani gauges are employed for the measurement range 5 x 10-4 mbar to atmospheric pressure. However, starting from approx. 10 mbar upwards, uncontrolled convection effects impair the accuracy and reproducibility increasingly. Above 1 mbar the gas-type dependency increases and can lead to strongly incorrect readings for gases other than air or nitrogen.

Thermocouple gauge

Convection-enhanced Pirani vacuum gauges Convection effects, which are problematic in the case of standard Pirani gauges, can be exploited in a defined way by means of a special sensor design. The sensor wire is mounted along the axis of a small tube which has to be installed horizontally. A thermal resistor wire coiled around the tube leads to an improved compensation of the ambient temperature in the bridge circuit. Both features together improve the accuracy and reproducibility of the gauge in the rough vacuum range and also at the lower end of the measurement range. The measurement range is extended down to 10-4 mbar. However, the gas-type dependency of the measurement method remains. Wheatstone bridge circuit

10-8

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Vacuum Measurement Instrumentation Measuring methods (continued) Ionization vacuum gauges To measure high and ultra high vacuum, ionization vacuum gauges are most commonly used. The residual gas inside the gauge is ionized by electron impact, the ions are attracted towards a cathode where they are neutralized. The ion current via the cathode is proportional to the absolute pressure. The measurement is gas-type dependant, because gases show specific ionization probabilities. Therefore each particular composition of the residual gas requires a correlating calibration or at least a correction factor. Ionization vacuum gauges are mainly built in two designs, with cold cathode or with hot cathode. Cold cathode ionization vacuum gauges The internal volume of the gauge is penetrated by the magnetic field of a permanent magnet. A high voltage of 2 ... 3 kV is applied between the rod-shaped anode and the cylindrical cathode. Electrons, which are produced by spontaneous emission, are accelerated on spiral paths through electric and magnetic field and ionize the residual gas. Ions are collected by the cathode, electrons by the anode, and the pressure dependant discharge current is measured. The measurement range is approximately 10 -9 to 10-2 mbar. Under clean vacuum conditions, cold cathode gauges are lowmaintenance and long-living. Attention should be paid to the drifting characteristics. The gauges show a pumping effect due to cathode sputtering and gas gettering, resulting in an initially lower pressure inside the gauge than in the vacuum chamber. The gettered gases remain in the gauge, and after some operating time the gauge measures a higher pressure. Also, the magnetic field can potentially interfere with other system components or processes. Depending on the particular gauge design, it is possible that switching the gauge on is problematic at high vacuum (< 10-6 mbar), if the gas discharge ignites poorly due to the low gas density. The common technical design is the inverted magnetron, also called inverted Penning gauge. Hot cathode ionization vacuum gauges The electrons which are necessary for ionizing the residual gas are emitted from a hot cathode. Sometimes a second hot cathode exists as a spare filament. The most common design is the Bayard-Alpert gauge with a measurement range from 10-11 ... 10-9 to 10-2 mbar. Another design according to the so-called extractor method has a range from 10-13 to 10-4 mbar. The hot filament (potential approx. 30 V) of the Bayard-Alpert type is located outside a cylindrical wire grid anode (potential approx. 180 V). Electrons are accelerated towards the anode, penetrate the cylinder grid and ionize the residual gas. Ions are collected from another electrode inside the anode grid (the collector wire, potential 0 V), and the ion current is measured. Hot cathode gauges show high measurement stability because the emission current from the filament is controlled electronically to a constant value, and sputtering and pumping effects are negligible. To a certain extent, a degas function can work against gauge contamination. There exist neither magnetic fields nor problems with switching on at high vacuum. Voltages are low enough to make unwanted gas discharges inside the gauge improbable. Oxide coated filaments have a long life cycle and are stable to inrush of air. The measurement range depends largely on the design of the anode grid and the collector wire. The more delicate the structure is, the lower the measurement range ends, because the so-called X-ray limit is reduced. The X-ray limit describes a pressure-independent collector current which is generated when "bremsstrahlung" (retardation radiation) hits the collector wire and releases electrons. Bremsstrahlung is mainly produced during collisions of electrons with the anode grid.

Inverted magnetron gauge

10

Bayard-Alpert gauge

Combined vacuum gauges Many vacuum processes require the application of two or more vacuum measuring methods in order to meet the required measurement range and/or accuracy. For such applications different combination gauges were developed that combine two or three measurement methods in one single device. Typical combinations are Pirani + capacitive (THERMOVAC TTR 100), inverted magnetron + Pirani (PENNINGVAC PTR 90) and Bayard-Alpert + Pirani (ATMION®). The ATMION® wide range vacuum gauge offers a measurement range of 13 decades (10-10 mbar to air pressure), while the combination of the hot cathode sensor with an always active Pirani sensor enables a safe, fully automated gauge operation.

ATMION® wide range vacuum gauge (Bayard-Alpert / Pirani) at the load lock chamber of a thermal annealing system

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10-9

Rough and Medium Vacuum Gauges and Controllers RFM Bourdon Gauge Bourdon gauge, standard version and stainless steel version (corrosion resistant), rough vacuum Visual monitoring of roughing lines and evacuation processes Relative pressure manometer with absolute pressure scale (ambient pressure = 1000 mbar; vacuum = 0 mbar) Two versions: RFM (standard) and RFMC (corrosion resistant)

Technical data

Standard txtAbstand

Measurement range Measuring method Units Temperature range (operation) Max. media temperature Materials in vacuum Housing Protection category Scope of delivery

Order code Corrosion resistant txtAbstand

RFMG

< 10 ... 1020 mbar Bourdon tube gauge mbar -40 … +60 °C RFM: 60 °C RFMC: 200 °C RFM: copper alloy RFMC: stainless steel 316L RFM: plastics (black), size 80 mm RFMC: stainless steel, size 63 mm RFMC: IP 65 vacuum gauge

Description

Vacuum connection

D

H

RFM, standard

G 1/4” B

80

115

RFM, standard

DN16KF

80

115

RFMCG

RFM, stainless steel

G 1/4” B

63

86

RFMCK

RFM, stainless steel

DN16KF

63

86

RFMK

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RFM-I Bourdon Gauge with Analog Output Bourdon gauge, stainless steel version (corrosion resistant), rough vacuum, linear analog output Visual and electronic monitoring of roughing lines and evacuation processes A non-contact electronic rotary position sensor converts the position of the needle into a 4 … 20 mA analog output signal Relative pressure manometer with absolute pressure scale (ambient pressure = 1000 mbar; vacuum = 0 mbar)

Technical data Measurement range Measuring method txtAbstand

txtAbstand

Units Analog outputs Temperature range (operation) Max. media temperature Materials in vacuum Housing Protection category Power supply Electrical connectors Scope of delivery

Order code

10-10

< 10 ... 1000 mbar | < 1000 … 1E+5 Pa | < 10 … 750 Torr Bourdon tube gauge, rotary position sensor (non-contact) on the needle shaft mbar linear, 4 … 20 mA, 2-wire -40 … +60 °C 100 °C stainless steel 316L stainless steel, nominal size 63 mm IP 54 12 … 30 VDC, max. 1 W cable, 2 m, loose ends (DC in, analog out) vacuum gauge

Description

Vacuum connection

D

H l b

RFM-I-063-CG

RFM-I, stainl. st., analog output

G 1/4” B

63 86

RFM-I-063-CK

RFM-I, stainl. st., analog output

DN16KF

63 86

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Rough and Medium Vacuum Gauges and Controllers DVR 2 Capacitance Diaphragm Gauge Battery-operated vacuum gauge, rough vacuum, internal ceramic transducer

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Gas-type independent measurement Fully electronic Long-term stable Fast (analog) trend indication, precise (digital) reading Corrosion resistant ceramic diaphragm Splash-proof High electromagnetic interference resistance Battery-operated with a durable lithium battery Programmable Auto switch-off ATEX version on request

Technical data

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Measurement range Measuring method Accuracy Temperature coefficient Measurement rate Units Display Temperature range (operation) Max. media temperature Materials in vacuum Housing Power supply Vacuum connection Scope of delivery

Order code VB-682902

1 ... 1080 hPa | 1 ... 1080 mbar | 1 ... 810 Torr diaphragm (Al2O3, capacitive, absolute pressure) < ± 1 hPa ±1 digit | < ± 1 mbar ±1 digit | < ± 0.75 Torr ±1 digit < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / K automatic, 3 s, 1 s, 1/3 s hPa, mbar, Torr (switchable) LCD, digital and analog 10 ... 60 °C 80 °C at the pressure transducer aluminium oxide, stainless steel, chemically resistant fluoro elastomer, PBT / PPS plastics internal lithium battery, 9 V, 1.2 Ah flange DN16KF with stepped screw-in hose nozzle DN6/DN10 vacuum gauge, battery

Description DVR 2

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par connection H D

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Accessories txtAbstand

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Order code VB-612220

Description Replacement battery 9 V Lithium 1.2 Ah

VB-900216

DKD calibration of a new DVR 2

VB-900217

DKD re-calibration of a DVR 2

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par lbl03par lbl02par

10-11

Rough and Medium Vacuum Gauges and Controllers DCP 3000 Capacitance Diaphragm Gauge Vacuum gauge, rough vacuum, 1 to 4 external ceramic transducers, analog and digital display, serial interface, connector for vent valve Gas-type independent and long-term stable measurement Optional venting function Connection for up to 4 diaphragm gauges and 1 venting valve Self-configuring (device identification) Fast (analog) trend indication, precise (digital) reading Corrosion resistant ceramic diaphragm gauges Splash-proof (controller and gauges) Internal data logger

Technical data

txtAbstand

txtAbstand

Measurement channels Measurement range Measuring method Resolution Accuracy Temperature coefficient Units Display

Interfaces Temperature range (operation) Max. media temperature Materials in vacuum Housing Protection category Power supply Electrical connectors

10

Vacuum connection Connectable gauges Connectable vent valves Scope of delivery txtAbstand

Order code VB-683170

4 0.1 ... 1080 hPa | 0.1 ... 1080 mbar | 0.1 ... 810 Torr diaphragm (Al2O3, capacitive, absolute pressure) 0.1 hPa | 0.1 mbar | 0.1 Torr ±1 hPa | ±1 mbar | ± 0.75 Torr < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / K hPa, mbar, Torr (switchable) graphical LCD, multilingual, analog plus digital (5 digits) for one channel (channel selectable) or digital for all 4 channels simultaneously RS232C 10 … 40 °C 80 °C (short-time) Al2O3, PPS, chemically resistant fluoro elastomer, PP, aluminium plastics (support clip detachable) DCP 3000: IP 42 (front side) VSK 3000: IP 54 18 … 30 VDC, 3.4 W 2 x VACUU.BUS (gauges and vent valve), D-Sub 9 pin (RS232), socket (DC in) flange DN16KF, fitting for hose DN 8/10 mm, hose nozzle SW 6/10 mm VSK 3000 (diaphragm gauge) vent valve 24 VDC with VACUU.BUS connector Controller, 1 gauge VSK 3000 with cable 2 m, wall power supply 90 ... 264 VAC / 24 VDC (EU, UK, US, AU)

Description DCP 3000

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par connection H D

Accessories Order code VB-636657 txtAbstand

Description VSK 3000 (transducer for DCP 3000)

VB-682920

VACUU.CONTROL PC software

VB-612552

Extension cable VACUU.BUS, 2 m

VB-636656

Y-adapter VACUU.BUS, 1 x plug, 2 x socket

VB-674217

VB M-B venting valve VACUU.BUS, DN16KF / G1/4" I

VB-612566

Valve cable VACUU.BUS for venting valve VB M-B, 2 m

VB-900214

DKD calibration of a new DCP 3000

VB-900215

DKD re-calibration of a DCP 3000

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par lbl03par lbl02par

txtAbstand

10-12

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Rough and Medium Vacuum Gauges and Controllers HPM 4/6 Thermocouple Vacuum Gauge Meter Battery-operated, handheld vacuum gauge, rough and medium vacuum, for a DV series passive thermocouple gauge tube Hand-held display and control unit for budget-priced thermocouple gauge tubes DV-4 and DV-6 Switch with 3 positions (DV-6 / OFF / DV-4) Calibration with a potentiometer for DV-4 and DV-6, respectively Calibration reference tubes (NIST traceable) available mbar and Torr versions available Rugged carrying case included

Technical data txtAbstand

Measurement channels Measurement range Display Temperature range (operation) Housing Power supply Electrical connectors Connectable gauges Scope of delivery

txtAbstand

Order code

1 with DV-4: 0.01 … 20 mbar | 0.01 ... 20 Torr with DV-6: 0.001 ... 1.3 mbar | 0.001 … 1 Torr LCD, 3 ½ digits -20 … +50 °C plastics, hand-held 9 VDC, 11 mA (one 9 V battery) 9 V block, coiled cable with connector (gauge) DV-4 series (20 Torr) and DV-6 series (1000 mTorr) control unit w. coiled gauge cable, 9 V battery, carrying case. Please order vacuum gauges separately.

HPM-4-6-mbar

Description HPM 4/6, unit mbar

HPM-4-6-torr

HPM 4/6, unit Torr

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par connection H D

10

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10-13

Rough and Medium Vacuum Gauges and Controllers DIGITAL VT Thermocouple Vacuum Gauge Meter Vacuum gauge, rough and medium vacuum, for a DV series passive thermocouple gauge tube

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Long-living controllers for budget-priced passive thermocouple gauges High stability and reliability under demanding conditions Easy installation and operation Adjustment of VAC and ATM via two potentiometers at the front panel Calibration Reference Tubes (NIST traceable) available Two versions with different measurement ranges (VT-4 and VT-6)

Technical data Measurement channels Measurement range txtAbstand

Accuracy Temperature coefficient Units

txtAbstand

Display Temperature range (operation) Housing Power supply Electrical connectors Connectable gauges Scope of delivery

Order code

10

1 VT-4: 0.01 ... 20 Torr VT-6: 1 ... 1000 mTorr VT-4: ±(30 % of reading + 0.02 Torr) VT-6: ±(15 % of reading + 1 mTorr) VT-4: ±(1 % of reading +2 mTorr) / °C VT-6: ±(1 % of reading + 0.2 mTorr) / °C VT-4: Torr VT-6: mTorr LED, 3 digits, green 5 ... 50 °C plastics, 1/8 DIN, for panel mounting 4.5 ... 5.3 VDC, 155 mA terminal clamp (DC in, gauge) DV-4 series (20 Torr) and DV-6 series (1000 mTorr) control unit, wall power supply (US adapter, cable 2 m) 90 ... 240 VAC / 5 VDC, gauge cable 2.5 m (other lengths on request). Please order gauges separately

55-288DV4

Description DIGITAL VT-4 (20 Torr)

55-288DV6

DIGITAL VT-6 (1000 mTorr)

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par connection H D

Accessories Order code

10-14

12-01-164

Description EU adapter for included wall power supply

12-01-165

UK adapter for included wall power supply

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par lbl03par lbl02par

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Rough and Medium Vacuum Gauges and Controllers DV Series Thermocouple Gauge Tubes Passive heat loss gauge tubes, rough and medium vacuum Two versions with different measurement ranges (DV-4 and DV-6) Corrosion resistant Stable calibration Temperature compensated Gauges are matched and interchangeable without calibration adjustments Rugged under demanding conditions Inexpensive DV-6S: designed for outdoor use, vibration and shock applications (cryogenic tanks etc.), with protective cap

Technical data Measurement range txtAbstand

txtAbstand

Measuring method Most sensitive range Accuracy Temperature range (operation) Mounting position Heat loss sensor Materials in vacuum Electrical connectors Display and control units Scope of delivery

DV-4: 0.01 ... 20 Torr DV-6: 1 ... 1000 mTorr heat loss (thermocouple) DV-4: 0.2 ... 5 Torr DV-6: 10 ... 200 mTorr see DIGITAL VT 5 … 50 °C any noble metal thermocouple nickel-plated steel, stainless steel, glass, noble metal special connector HPM 4/6, DIGITAL VT, GP 307 gauge tube (gauge cables see control units)

DV-4 Order code

txtAbstand

DV-4D

Description DV-4

DV-4R

DV-4

Rugged 1/8” NPT

DV-4D-KF-16

DV-4

DN16KF

DV-4D-KF-25

DV-4

DN25KF

DV-34

DV-4

Stl. steel 1/8" NPT

Calibration reference DV-4

none

DB-16D

Vacuum connection lbl03par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par Standard 1/8” NPT 10

DV-6 Order code DV-6

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Description DV-6

Vacuum connection 1/8" NPT

DV-6S

DV-6 (w. protect. cap)

1/8" NPT

DV-36

DV-6

Stl. steel 1/8" NPT

DV-6-KF-16

DV-6

DN16KF

DV-6-KF-25

DV-6

DN25KF

DV-6-VCR

DV-6

VCR

DV-6-CF

DV-6

DN16CF

DV-20

DV-6

Glass 3/8" O.D.

DB-20

Calibration reference DV-6

none

10-15

Rough and Medium Vacuum Gauges and Controllers VGC-301 Convection Vacuum Gauge Controller Vacuum controller, rough and medium vacuum, for a passive convection-enhanced Pirani gauge, analog output, setpoints, serial interfaces

txtAbstand

Budget-priced, compact controller Extensive functions Measurement range of 7 decades All functions and gauge adjustment programmable via 4 front keys (menu-driven) Analog output configurable Compatible with Granville-Phillips® series 275 controllers and gauges

Technical data

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txtAbstand

Measurement channels Measurement range Resolution Units Display Display update rate Analog outputs

Setpoint relays Interfaces Temperature range (operation) Housing Power supply Electrical connectors Connectable gauges Scope of delivery

1 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 Torr 0.01 Pa | 1E-4 mbar | 1E-4 Torr Pa, mbar, Torr (switchable) graphical LCD with backlight, 2 to 4 digits 0.5 s switchable: non-linear 0.375 ... 5.659 V linear 0 ... 10 V, scaleable log-linear 1 ... 8 V (1 V / decade) 2 relays (SPDT), 1 A max. at 30 V RS232 and RS485 0 ... 40 °C aluminium, 1/8 DIN, for panel mounting 100 ... 240 VAC (50/60 Hz) or 12 ... 30 VDC (approx. 4.5 W) IEC plug (AC), 2 pin terminal (DC in), D-Sub 9 pin (gauge), D-Sub 9 pin (I/O connector), 6 pin terminal (relays) CVG-101, GP 275 controller, mains cable 1.5 m (EU) (please order gauge and gauge cable separately)

Order code

10

Description VGC-301

VGC301A-EU

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par connection H D

Accessories Order code

10-16

CB421-1-10F

Description Cable for CVG-101

CB421-1-25F

Cable for CVG-101

CB421-1-50F

Cable for CVG-101

Length (m)lbl04par lbl14par lbl13par lbl12par llbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par bl03par 3 7.5 15

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Rough and Medium Vacuum Gauges and Controllers CVG-101, CVG-102 Convection-enhanced Pirani Gauges Passive heat loss gauge with convection enhancement, rough and medium vacuum

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Budget-priced, rugged gauge Wide measurement range (7 decades) Good accuracy and repeatability Improved accuracy compared to standard Pirani gauges due to convection enhancement and improved temperature compensation Short response time Best accuracy at horizontal mounting position Replaceable without previous calibration Compatible with Granville-Phillips® series 275 controller and gauges Replacement gauge for CVM-201 and GP Mini-Convectron®

Technical data Measurement range Measuring method Accuracy (typical) txtAbstand

Temperature range (operation) Max. bakeout temperature Mounting position Heat loss sensor Materials in vacuum Housing Electrical connectors Display and control units Scope of delivery

Order code

0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 Torr heat loss (Pirani) with convection enhancement ± 2 % of reading (500 ... 1000 mbar) ± 10 % of reading (1E-3 ... 500 mbar) 0 ... 50 °C 150 °C (without cable) horizontal (recommended) gold plated tungsten wire Au on W, stainless steel, glass, Ni, PTFE stainless steel with plastics enclosure special connector VGC-301, GP 275, GP 307, GP 350, GP 370 gauge (gauge cable see control units)

CVG101GA

Description CVG-101

Vacuum connection 1/8” NPT / 1/2” tube

Hlbl05par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par H 25.4

CVG101GB

CVG-101

DN16KF

33

CVG101GC

CVG-101

DN25KF

33

CVG101GD

CVG-101

DN40KF

33

CVG101GE

CVG-101

DN16CF

27.4

CVG101GF

CVG-101

DN40CF

21.6

CVG101GG

CVG-101

1/4” VCR, female

47.2

CVG101GH

CVG-101

1/2” VCR, female

44.5

10

Accessories Order code

Description Mating connector for CVG-101

CK431-01

Vacuum lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par connection H

Replacement gauge for CVM-201 and Mini Convectron® modules Order code

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CVG102GA

Description CVG-102

Vacuum connection 1/8” NPT / 1/2” tube

Hlbl04par lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par 25.4

CVG102GB

CVG-102

DN16KF

33

CVG102GC

CVG-102

DN25KF

33

CVG102GD

CVG-102

DN40KF

33

CVG102GE

CVG-102

DN16CF

27,4

CVG102GF

CVG-102

DN40CF

21.6

CVG102GG

CVG-102

1/4” VCR, female

47.2

CVG102GH

CVG-102

1/2” VCR, female

44.5

10-17

Rough and Medium Vacuum Gauges and Controllers GP 275 Convectron® Convection-enhanced Pirani Gauges Passive heat loss gauge with convection enhancement, rough and medium vacuum

txtAbstand

Industry standard, rugged Wide measurement range (7 decades) Good accuracy and repeatability Improved accuracy compared to standard Pirani gauges due to convection enhancement and improved temperature compensation Short response time Best accuracy at horizontal mounting position Replaceable without previous calibration Compatible with VGC-301 and CVG-101 Replacement gauge for GP Mini-Convectron® and CVM-201

Technical data Measurement range Measuring method Accuracy (typical) Temperature range (operation) Max. bakeout temperature Mounting position Heat loss sensor Materials in vacuum Housing Electrical connectors Display and control units Scope of delivery

Order code

10

0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 Torr heat loss (Pirani) with convection enhancement ± 2 % of reading (500 ... 1000 mbar) ± 10 % of reading (1E-3 ... 500 mbar) 0 ... 50 °C 150 °C (without cable), or 105 °C (with cable) horizontal (recommended) gold plated tungsten wire Au on W, stainless steel, glass, Kovar®, Al2O3, NiFe, polyimide stainless steel, plastics (connector enclosure) special connector VGC-301, GP 275, GP 307, GP 350, GP 370 gauge (gauge cable see control units)

275071

Description 275 Convectron®

Vacuum connection 1/8” NPT / 1/2” tube

275203

275 Convectron®

DN16KF

275196

275 Convectron®

DN25KF

275316

275 Convectron®

DN40KF

275256

275 Convectron®

DN16CF

275238

275 Convectron®

DN40CF

275186

275 Convectron®

1/4” VCR, female

275282

275 Convectron®

1/2” VCR, female

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par H

Replacement gauge for CVM-201 and Mini Convectron® modules Order code

10-18

275810

Description Mini-Convectron® gauge

Vacuum connection 1/8” NPT / 1/2” tube

275816

Mini-Convectron® gauge

DN16KF

275817

Mini-Convectron® gauge

DN25KF

275818

Mini-Convectron® gauge

DN40KF

275813

Mini-Convectron® gauge

DN16CF

275814

Mini-Convectron® gauge

DN40CF

275811

Mini-Convectron® gauge

1/4” VCR, female

275864

Mini-Convectron® gauge

1/2” VCR, female

lbl14par lbl13par lbl12par lbl11par lbl10par lbl09par lbl08par lbl07par lbl06par lbl05par lbl04par H

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Active Vacuum Gauges ZSE60F Digital Precision Pressure Switch Module Active relative pressure diaphragm gauge (piezo), rough vacuum and positive pressure, two Open Collector outputs, digital display, low leak rate

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Small, budget-priced relative pressure switch Stainless steel diaphragm for gas-type independent measurement Versatile use between rough vacuum and 1 bar positive pressure Leak rate compatible with high vaccum requirements Two transistor setpoint outputs and either an analog output or an auto reference input Transistor outputs with adjustable setpoints, switchable output modes (inverted or non-inverted), and further options "hysteresis mode" or "window comparator mode" Auto reference is a potential free input for a reed contact or an electronic signal generator Auto reference is used to adjust the transistor setpoints in the case of strong fluctuations of the pressure source

Technical data Measurement range Measuring method Resolution Accuracy Reproducibility Temperature coefficient Response time Units txtAbstand Display Display update rate Analog outputs Setpoint relays

txtAbstand

Operating elements Temperature range (operation) Leak rate Materials in vacuum Housing Protection category Power supply Electrical connectors Scope of delivery

Order code

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-100 … +100 kPa (relative to atmosphere) diaphragm (stainless steel, piezo resistive, relative pressure) 0.1 kPa | 1 mbar display: ±2 % F.S. max. ±1 digit analog out: ±5 % F.S. setpoints: ±0.2 % F.S. max. ±1 digit ± max. 3 % F.S. max. 2.5 ms (with deactivated anti chatter function) kPa, bar, psi, mmHg, inHg, kgf/cm² (user selectable) version …-M: kPa (non-changeable) LED, 3½ digits, red; one status LED per setpoint 0,2 s either linear output, 1 ... 5 V, or auto reference input (without analog output) NPN or PNP open collector (O.C.), 2 outputs; NPN: max. 30 VDC / 80 mA; PNP: max. 80 mA, max. 1 V 3 front keys (UP / SET / DOWN) 0 … 50 °C 1E-10 Pa·m3/s | 1E-9 mbar·l/s | 7.5E-10 Torr·l/s stainless steel 304 and ASTM630 plastics IP65 12 … 24 VDC, max. 55 mA (no load) 5-wire oil-resistant cable (DC in, analog I/O, transistors) pressure switch with connection cable, 3m

Vacuum connection

In- / outputs

ZSE60F-A2-22L

1/4" VCR

2 x NPN O. C., 1 x analog output

ZSE60F-A2-30L

1/4" VCR

2 x NPN O.C., 1 x auto-reference input

ZSE60F-A2-62L

1/4" VCR

2 x PNP O.C., 1 x analog output

ZSE60F-A2-70L

1/4" VCR

2 x PNP O.C., 1 x auto-reference input

ZSE60F-B2-22L

1/4" Swagelok

2 x NPN O. C., 1 x analog output

ZSE60F-B2-30L

1/4" Swagelok

2 x NPN O.C., 1 x auto-reference input

ZSE60F-B2-62L

1/4" Swagelok

2 x PNP O.C., 1 x analog output

ZSE60F-B2-70L

1/4" Swagelok

2 x PNP O.C., 1 x auto-reference input

10

H l b

10-19

Active Vacuum Gauges HPM 760S Piezo Vacuum Transducer Active piezo-resistive diaphragm gauge, rough vacuum, temperature compensated Gas-type-independent measurement Rugged, corrosion resistant (ss diaphragm) Silicon sensor chip with integrated piezo transducer, sealed vacuum reference, temperature compensation network and resistive bridge circuit High accuracy and stability E. g. for process control, etc. Zero and span adjustable at the gauge Versions with linear voltage or current output available

Technical data Measurement range Measuring method txtAbstand

Accuracy Response time Analog outputs Temperature range (operation) Materials in vacuum Power supply Electrical connectors Display and control units Scope of delivery

Order code txtAbstand

10

10-20

13.3 … 1.33E+5 Pa | 0.13 … 1330 mbar | 0.1 ... 1000 Torr diaphragm (stainless steel, piezoresistive, absolute pressure, temp. compensated) 0.25 % F.S.