ULVAC Group ISO 9001:2008

Certificate JP13/062569 The management system of ULVAC Group ULVAC, Inc. Headquarters and Headquarters Plant 2500 Hagisono, Chigasaki-shi, Kanagawa...
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Certificate JP13/062569

The management system of

ULVAC Group ULVAC, Inc. Headquarters and Headquarters Plant

2500 Hagisono, Chigasaki-shi, Kanagawa-ken Japan

has been assessed and certified as meeting the requirements of

ISO 9001:2008 For the following activities

The scope of registration appears on page 2 of this certificate This certificate is valid from 24 December 2015 until 13 January 2018 and remains valid subject to satisfactory surveillance audits Re certification audit due before 5 December 2017 Issue 4 Certified since 24 April 1995 This is a multi-site certification Additional site details are listed on the subsequent pages

Authorised by

SGS United Kingdom Ltd Systems & Services Certification Rossmore Business Park Ellesmere Port□Cheshire□CH65 3 EN□UK t +44 (0)151 350-6666□f +44 (0)151 350-6600 www.sgs.com SGS 9001-8 01 0614 Page 1 of 10

This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4 Detailed scope

Development, manufacture, sales, customer support and machinery importing/exporting activities related to vacuum equipment, peripheral devices, vacuum components and materials for the display, solar cell, semiconductor, electronics, electrics, metals, machinery, automotive, chemical, food and pharmaceutical industries, and for universities and research centers, research guidance and technical consulting on all aspects of vacuum technology Further clarifications regarding the scope of this certificate and the applicability of ISO 9001:2008 requirements may be obtained by consulting the organization Additional facilities

ULVAC, Inc. Fuji-Susono Plant MATERIALS DIVISION Kagoshima Office MATERIALS DIVISION Chiba Sammu Plant MATERIALS DIVISION Chiba Tomisato Plant ULVAC KYUSHU CORPORATION Kumamoto Processing Technology Center ULVAC TOHOKU, Inc.

1220-14 Suyama, Susono-shi,Shizuoka-ken Japan 3313 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan 516 Yokota, Sammu-shi, Chiba-ken Japan 10-1 Misawa, Tomisato-shi, Chiba-ken Japan

3313-1 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan 100-31 Yoshitomi, Shisui-machi, Kikuchi-shi, Kumamoto-ken Japan 6-1-16 North-Interchange Industrial Park, Hachinohe-shi, Aomori-ken Japan

Page 2 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

ULVAC TECHNO, Ltd. Head Office

2609-5 Hagisono, Chigasaki-shi, Kanagawa-ken Japan 1220-14 Suyama, Susono-shi, Shizuoka-ken Japan

Human Power Development Department, Education Center Tohoku Headquarters, 15-35 Ryutsu Center, Kitakami-shi, Iwate-ken Japan Iwate CS Center Tohoku Headquarters, 4-1838-10 Nishiki-cho, Chitose-shi, Hokkaido Japan Iwate CS Center, Chitose Office Tohoku Headquarters, 2-3-5 Hiyoridai, Tomiya-machi, Kurokawa-gun, Miyagi CS Center Miyagi-ken Japan Tohoku Headquarters, 1863-13 Kanisawa, Higashine-shi, Yamagata CS Center Yamagata-ken Japan Kitakanto Headquarters, 430-2 Shimonomiya, Tamamura-machi, Sawa-gun, Gunma CS Center Gunma-ken Japan Kitakanto Headquarters, 1232-12 Mukoyama, Naka-shi, Ibaraki-ken Japan Ibaraki CS Center Kitakanto Headquarters, 2455-2 Fukuoka, Tsukubamirai-shi, Tsukuba CS Center Ibaraki-ken Japan Kitakanto Headquarters, 2-14-11 Hirosedai, Sayama-shi, Saitama-ken Japan Saitama CS Center Syutoken Headquarters, 5-5-8 Minamikase, Saiwai-ku, Kawasaki-shi, Kawasaki CS Center Kanagawa-ken Japan Syutoken Headquarters, Mobara 3210-7 Honno, Mobara-shi, Chiba-ken Japan CS Center Syutoken Headquarters, 2609-5 Hagisono, Chigasaki-shi, Chigasaki CS Center Kanagawa-ken Japan Hokuriku Koushinetsu Headquarters, 1805-3 Hirooka Nomura, Shiojiri-shi, Nagano CS Center Nagano-ken Japan Hokuriku Koushinetsu Headquaters, 238-3 Kudama-cho, Kofu-shi, Nagano CS Center, Yamanashi-ken Japan Yamanashi Office Page 3 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

Hokuriku Koushinetsu Headquarters, 1140 Urushijima-machi, Hakusan-shi, Ishikawa CS Center Ishikawa-ken Japan Hokuriku Koushinetsu Headquarters, 2-4 Toyo-cho, Myoko-shi, Niigata-ken Japan Niigata CS Center Tokai Headquarters, 31 Enokida, Ohira-cho, Okazaki-shi, Aichi CS Center Aichi-ken Japan Tokai Headquarters, 2-5 Yasaki-cho, Kakegawa-shi, Shizuoka-ken Japan Aichi CS Center, Shizuoka Office Tokai Headquarters, 1206-1 Seki-cho Ege, Kameyama-shi, Mie CS Center Mie-ken Japan Tokai Headquarters, 2-10-17 Horiki, Yokkaichi-shi, Mie-ken Japan Yokkaichi CS Center Kinki Headquarters, 2-7-18 Kinrakuji-cho, Amagasaki-shi, Osaka CS Center Hyogo-ken Japan Kinki Headquarters, Souchimura B, 18 Takumi-cho, Sakai-ku, Sakai-shi, Osaka CS Center, Osaka-fu Japan Service Engineering Section 3 Kinki Headquarters, 100-20 Shohoji, Oshinohara, Yasu-shi, Shiga CS Center Shiga-ken Japan Nishinihon Headquarters, 532-1 Noriyashiki, Domoto, Tatsuno-cho, Himeji CS Center Tatsuno-shi, Hyogo-ken Japan Nishinihon Headquarters, 258-25 Okui, Tottori-shi, Tottori-ken Japan Himeji CS Center, Tottori Office Nishinihon Headquarters, 2-17 Okihamahigashi, Tokushima-shi, Himeji CS Center, Tokushima-ken Japan Tokushima Office Nishinihon Headquarters, 5-23 Yoshikawa-kogyodanchi, Higashihiroshima-shi, Hiroshima CS Center Hiroshima-ken Japan Nishinihon Headquarters, 23-4 Megumi-cho, Yonago-shi, Tottori-ken Japan Hiroshima CS Center, Yonago Office Page 4 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

Nishinihon Headquarters, Hiroshima CS Center, Ehime Office Kyushu Headquarters, Fukuoka CS Center Kyushu Headquarters, Fukuoka CS Center, Kitakyushu Office Kyushu Headquarters, Oita CS Center Kyushu Headquarters, Kumamoto CS Center Kyushu Headquarters, Miyazaki CS Center Kyushu Headquarters, Kagoshima CS Center Kyushu Headquarters, Kyushu Sales Department Global CIP Headquarters, Chigasaki CIP Center Global CIP Headquarters, Kyushu CIP Center Global CIP Headquarters, Design Center Semiconductor CIP Headquarters, Susono CIP Center Semiconductor CIP Headquarters, TS Center Chemical Center Headquarters Chemical Center Headquarters, Kagoshima Manufacturing Department

18-70 Isoura-cho, Niihama-shi, Ehime-ken Japan 839-1 Nijomasue, Itoshima-shi, Fukuoka-ken Japan 3-1-12 Kamikatsuki, Yahatanishi-ku, Kitakyushu-shi, Fukuoka-ken Japan 1-12-41 Aosaki, Oita-shi, Oita-ken Japan 100-31 Yoshitomi, Shisui-machi, Kikuchi-shi, Kumamoto-ken Japan 3191-2 Kamitonda, Shintomi-cho, Koyu-gun, Miyazaki-ken Japan 3313 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan 839-1 Nijomasue, Itoshima-shi, Fukuoka-ken Japan 2500 Hagisono, Chigasaki-shi, Kanagawa-ken Japan 100-31 Yoshitomi, Shisui-machi, Kikuchi-shi, Kumamoto-ken Japan 2500 Hagisono, Chigasaki-shi, Kanagawa-ken Japan 1220-14 Suyama, Susono-shi, Shizuoka-ken Japan 1220-14 Suyama, Susono-shi, Shizuoka-ken Japan 2658-19 Hagisono, Chigasaki-shi, Kanagawa-ken Japan 3313 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan

Page 5 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

Refurbish and Surface Treatment Headquarters, Engineering Department Refurbish and Surface Treatment Headquarters, Chiba Refurbish and Surface Treatment Center Refurbish and Surface Treatment Headquarters, Wakayama Refurbish and Surface Treatment Center Refurbish and Surface Treatment Headquarters, Kagoshima Refurbish and Surface Treatment Center Refurbish and Surface Treatment Headquarters, Kagoshima Refurbish and Surface Treatment Center

516 Yokota, Sammu-shi, Chiba-ken Japan 516 Yokota, Sammu-shi, Chiba-ken Japan

2-8-3 Ominedai, Hashimoto-shi, Wakayama-ken Japan 3313 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan 3265-1 Kamino, Yokogawa-cho, Kirishima-shi, Kagoshima-ken Japan

ULVAC COATING CORPORATION

2804 Terao, Chichibu-shi, Saitama-ken Japan

Fine Surface Technology Co., LTD.

2804 Terao, Chichibu-shi, Saitama-ken Japan

ULVAC KIKO, INC. Yokohama branch Osaka branch ULVAC-PHI, Inc.

291-7, Oaza Chausubaru, Saito-shi, Miyazaki-ken Japan 1-10-4 Kitashinyokohama, kohoku-ku, Yokohama-shi, Kanagawa-ken Japan Uemura Nissay Bldg., 3-3-31 Miyahara, Yodogawa-ku, Osaka-shi, Osaka-fu Japan 370 Enzo, Chigasaki-shi, Kanagawa-ken Japan

Page 6 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

ULVAC CRYOGENICS, INCORPORATED Head Office & Factory 1222-1 Yabata, Chigasaki-shi, Kanagawa-ken Japan Osaka Branch Office Uemura Nissay Bldg., 3-3-31 Miyahara, Yodogawa-ku, Osaka-shi, Osaka-fu Japan ULVAC (SHANGHAI) TRADING CO., LTD. TRADING CO., LTD. BEIJING BRANCH TRADING CO., LTD. CHENGDU BRANCH TRADING CO., LTD. DALIAN BRANCH

TRADING CO., LTD. SHENZHEN BRANCH TRADING CO., LTD. SUZHOU BRANCH ULVAC (SUZHOU) CO., LTD.

1st 3rd Floor, Building A, No.1000 Qixin Road, Minhang District, Shanghai, P.R.China 1F,C Block,No.2 Xingye Street, BDA, Beijing, P.R.China No.229, Teng Fei Road, Qinyang, Chengdu, Sichuan Province, P.R.China Room 105, No.A Building, Hi-Tech Business Incubator, No.20 East Liaohe Road, DD Port, Dalian Hi-Tech Industrial Zone Dalian, Liaoning Province, P.R.China 1F,B Zhongkenuo Building, Seventh Rd.No.7, Tongguan Road, Tianliao Street, Shenzhen, Guangdong Province, P.R.China No. 277, Suzhou East Road, Suzhou Industrial Park, Suzhou, P.R.China No.277 Suhong East Road Suzhou Industrial Park, Suzhou, Jiangsu, 215026, China

Page 7 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

ULVAC Orient (Chengdu) Co., Ltd. ULVAC Automation Technology (Shanghai) Corporation ULVAC Vacuum Furnace (Shenyang) Co., Ltd. ULVAC (CHINA) HOLDING CO., LTD. ULVAC CRYOGENICS (NINGBO) INCORPORATED ULVAC Materials (Suzhou) CO., LTD. ULVAC Opto-electronics Thin Film Technology (Shenzhen) Co., Ltd. ULVAC Tianma Electric (Jingjiang) Co., Ltd. ULVAC KOREA, Ltd. PYEONGTAEK PLANT HYEONGOK PLANT SEOUL BRANCH ULVAC KOREA PRECISION, Ltd. ULVAC Materials KOREA, Ltd.

No.1189 Baicao Road, Hi-Tech West Zone, Chengdu, Sichuan, China B Building of ULVAC Mansion, No.1000, Qixin Road, Minhang District, Shanghai, 201199, China No.10 Huiquandong Road Hunnan New District, Shenyang,110168, China No.1000,Qixin Road, Minhang, Shanghai 201199, China 3rd Floor No.2 Building, Lingyun Industry Park, No.1177 Lingyun Road, Ningbo National Hi Tech Zone, Ningbo City, Zhejiang Province, P.R.China No.55, Pingsheng Road, Industrial Park, Suzhou, China 2/F, Hivac Building, Langshan Rd No. 2, Hi-tech Industry Park, Nanshan District, Shenzhen, 518057, China No.8, Yudai Road Jingjiang city Jiangsu China 214500 5, Hansan-gil, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea 123, Hyeongoksandan-ro, Cheongbuk-myeon, Pyeongtaek-si, Gyeonggi-do, Korea 5F, Clifford B/D, 315, Gangnam-daero, Seocho-gu, Seoul, Korea 60, Hyeongoksandan-ro 93beon-gil, Cheongbuk-myeon, Pyeongtaek-si, Gyeonggi-do, Korea 451-831 51, Dangdong 2-ro, Munsan-Eup, Paju-si, Gyeonggi-Do, Korea 413-902

Page 8 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

Pure Surface Technology, Ltd. Hyeongok Plant Poseung Plant ULVAC CRYOGENICS KOREA INCORPORATED UF TECH, Ltd. ULVAC TAIWAN INC. Tainan Science lndustrial Park Branch

ULVAC SOFTWARE CREATIVE TECHNOLOGY, CO., LTD. Ultra Clean Precision Technologies Corp.

Taoyuna Branch ULVAC Materials Taiwan, Inc. ULCOAT TAIWAN, Inc. ULVAC SINGAPORE PTE LTD.

60, Hyeongoksandan-ro 93beon-gil, Cheongbuk-myeon, Pyeongtaek-si, Gyeonggi-do, Korea 282, Poseung jangahn ro, Poseung eup, Pyeongtaek si, Gyeonggi do, Korea 107, Hyeongoksandan-ro, Cheongbuk-myeon, Pyeongtaek-si, Gyeonggi-do Korea 115-8, Gwangsung-gil, Cheongbuk-myeon, Pyeongtaek-si, Gyeonggi-do, Korea 8F., No. 5, Keji Rd., Hsinchu Science Park, Hsinchu City 30078, Taiwan (R.O.C) No. 27, Nanke 2nd Rd., Southerm Taiwan Science Park, Sinshih District, Tainan City, 74147, Taiwan (R.O.C) 23F., No.27-9, Sec. 2, Zhongzheng E. Rd., Tamsui Dist., New Taipei City 25170, Taiwan (R.O.C.) No. 27, Sec. 1, Huandong Rd., Southern Tainan Science Park, Xinshi Dist., Tainan City 74146, Taiwan (R.O.C) No.20, Ln. 211, Puzhong Rd., Zhongli Dist., Taoyuan City 32083, Taiwan (R.O.C) No.37 Keya Road Daya District, Taichung City 42281, Taiwan (R.O.C.) No.60, IndustryⅢRoad, An-Nan District, Tainan, 709 Taiwan (R.O.C) 11 Tampines Street 92, Tampines Biz-Hub, #02-08, Singapore 528872 Page 9 of 10

This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.

Certificate JP13/062569, continued

ULVAC Group ISO 9001:2008 Issue 4

ULVAC MALAYSIA SDN. BHD. KL Factory Kulim Branch

ULVAC (THAILAND) LTD. ULVAC Technologies, Inc.

No.8 Jalan Gitar 33/3, Elite Industrial Estate Off Jalan, Bukit, Kemuning 40350, Shah Alam, Selangor Darul Ehsan, Malaysia Plot 10, Kawasan Industry, Lot 120 & 122, Mukim Sungai Seluang, 09000, Kulim, Kedah Darul Aman, Malaysia 110/6 Moo 13 Soi 25/2 Kingkaew Road, Tambol Rachathewa Amphur Bangplee, Samutprakarn 10540 Thailand 401 Griffin Brook Drive Methuen, MA 01844, U.S.A.

Page 10 of 10 This document is issued by the Company subject to its General Conditions of Certification Services accessible at www.sgs.com/terms_and_conditions.htm. Attention is drawn to the limitations of liability, indemnification and jurisdictional issues established therein. The authenticity of this document may be verified at http://www.sgs.com/en/Our-Company/Certified-Client-Directories/Certified-ClientDirectories.aspx. Any unauthorized alteration, forgery or falsification of the content or appearance of this document is unlawful and offenders may be prosecuted to the fullest extent of the law.