The Fei Koala Architecture & why we hope it is future proof

Contents ! ! ! ! !

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Introduction to Fei Why ‘future proof architecture’? Architecture model Fei Koala Architecture Conclusions

2004-1-6

Pybe Faber

5 min 5 min 10 min 10 min 5 min

Introduction to Fei History ! 1949: Philips Electron Optics sold first commercial TEM ! 1971: Fei (Field Electrons & Ions) is founded ! 1997: Fei and PEO merge Operations in ! Hillsboro (Oregon) – Main Office ! Peabody (Massachusetts) ! Eindhoven (Netherlands) ! Brno (Czech Republic) About 1600 employees worldwide, nasdaq FEIC ($26.51 on 2828-1-2004) 3

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Fei Products Fei Products ! Transmission Electron Microscope (TEM) ! Scanning Electron Microscope (SEM) ! Focussed Ion Beam (FIB) ! Dual Beam (DB = SEM + FIB)

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Contents ! ! ! ! !

5

Introduction to Fei Why ‘future proof architecture’? Architecture model Fei Koala Architecture Conclusions

2004-1-6

Pybe Faber

5 min 5 min 10 min 10 min 5 min

What is architecture?

!

Standardized interfaces between modules

Examples: ! Standardized dimensions (e.g. for plumbing pipes & joints or screws & bolts) ! Standardized pin-out & voltages for connectors (e.g. telephone and mains power) ! Standardized software interfaces (e.g. http, COM) 6

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Why architecture? ! !

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Share infrastructure Independent development of modules (by many people) Reuse of modules

→ Reduce cost

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Why not architecture? ! ! ! !

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Expensive to design Limitations (things that cannot be done) Education of people Modules may be more expensive / complex because they must match the architecture

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Why future proof? !

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To avoid designing a new architecture » Which costs a lot of time » Which makes existing modules & tools obsolete » Which makes existing education obsolete

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Why new architecture? ! ! ! !

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Desire for better performance Obsolete parts, knowledge, tools Price reduction Get rid of top-heavy old architecture (due to add-ons over time)

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Long-lived architectures 1795 France adopted the metric system (again in 1840) 1804 Steam locomotive (standardized tracks) 1876 Telephone 1882 Electricity (Edison’s first power station) 1969 TCP/IP

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Why long-lived?

! !

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Prohibitively expensive to replace Good design (gradual improvements possible)

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Contents ! ! ! ! !

13

Introduction to Fei Why ‘future proof architecture’? Architecture model Fei Koala Architecture Conclusions

2004-1-6

Pybe Faber

5 min 5 min 10 min 10 min 5 min

UI

User Interfaces

App. Srvr.

Automation

Application Behavior

Layers

Client layer

Application layer (translate between machine and user states)

User Sessions

Automatically degauss optics

Automation layer (Optional behavior)

Hardware

Raw Behavior

Microscope Server

Synchronization layer (non-optional interconnections between models)

Source off if vacuum not OK

Detectors off if vacuum not OK

Vacuum model

e-Source model

Vacuum Firmware layer firmware (safety, performance) (PUC)

e-Source firmware (2xPUC)

Safety layer (interlocks)

Model layer (standalone, no interconnections)

Electronics layer (hardware)

Hardware Interlocks layer

Vacuum electronics (VIU, MUC)

vacuum interlock

e-Source electronics (HTSU, FGSU)

Application UI's

User Preferences and presets

Active Quad

Detector presets

Simplify machine states

Add 'commercial' states

Move stage down on vent

Spot size changes detector gain

Auto Contrast & Brightness

Pause CCD when BSD selected

Blank beam during long stage moves

Source and Optics use same HV value

Scan and acquisition use same settings

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Position with stage and optics

Load Lock (Load, Unload)

Stage collision prevention

Optics model

Optics electronics

Scan model

Aquisition model

Scan firmware (DSP?)

Aquisition firmware (DSP)

Scan electronics (DSPB or ISAS)

Aquisition electronics (Viper Quad or ISAS)

Detector model

Motion model

Motion firmware (Nyquist)

Detector electronics

Motion electronics (STAB)

vacuum interlock

Hardware Interconnection layer (high bandwidth and time critical connections)

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Third parties

Scan

Video

Grouping of system behavior into logical layers. An actual implementation will have less layers than shown here, combining several layers into one. Interconnections within a single layer are forbidden: if two modules need to share data this must be done in a higher layer, and at least at the level of the Safety layer (for software) or in one of the two lowest layers (for electronics). On the left you can see a coarse behavior split between Raw (hardware specific) and Application (market specific) behavior, and how the xT Nova functionality it is split over the Microscope Server, Application Server and UI (there is still too much functionality in the Microscope Server). Note that only a few of the actual modules and interconnections are shown.

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Contents ! ! ! ! !

15

Introduction to Fei Why ‘future proof architecture’? Architecture model Fei Koala Architecture Conclusions

2004-1-6

Pybe Faber

5 min 5 min 10 min 10 min 5 min

Fei Architecture History !

±1985

!

±1995 1998

!

2001

!

2003

!

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xL: first mouse-controlled SEM, P80 electronics xP: 32 bit (mainly xL electronics) Tecnai: first mouse-controlled TEM, COM, P80 electronics Quanta: new electronics, CAN bus, modularized server software, digital video Nova&Quanta3D: application server, topdown software interconnections

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Hardware interfaces

Electronics consoles

Microscope console

Microscope Computer

100 Mb ethernet

198.211.143.65 Ethernet Adapter

Second Ethernet Adapter

HUB

Power supplies

STage Amplifier Board (STAB)

Optics Scan (OPSS)

CAN

198.211.143.93 CCB 14

P80

TestLine (OPTD)

sta

198.211.143.82 Motion controller (Nyquist)

EOptics

GIS

HTSU

FGSU

System Services (SSIB)

HVPS

IOptics (EOCU)

Detectors (IQI)

Vacuum Interface Unit (VIU)

IGP supplies

Analog Detector outputs Analog Scan signals

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Analog Scan signals

Acquisition (Viper Quad)

Digital Scan and Patterning

Digital Scan and Patterning

Support PC

Software interfaces !

!

!

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(D)COM interface between instrument server, application server and UI. Object Model: structured way to organize the interface, target is to have a single OM for all Fei products (will take a few years still…). Visio tool to graphically display connections between ‘bricks’ (software modules) – see next slide.

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Node Template : 1 = "explorer style" 2 = Square blob style

Drawing Control Panel

Bricks

filename.exe

2

Node Template Connector Template

1

Positioning Algorithm

3

Data Source

1

Connector Template : 1 = Straight line

Entity

Positioning Algorithm : 1 = Explorer small icon style 2 = Levels based on Tecnai dependancy file 3 = brick prefix

-

Source File Dim All Connections

Remove All Connections

c:\TecnaiSimpleMap.txt

Save Position Nodes

Restore Position Nodes

C:\tools\visio\Solo3n.txt

Nodes can be moved and the diagram will be updated. Right click on nodes to highlight and dim individual nodes.

Position File

Clear Diagam

Refresh All

Refresh Nodes

(duration ~1 minute!)

XT Smart Architecture Diagram OMInstrument

ObjectModel 1

OMDetectors

OMVacuum

OMDataSources 1

1

OMIBeam

1

OMSpecimenCu rrentMeter 1

1

OMPatterning

OMEBeam 1

BhvSimIBeam

OMService 1

1

1

BhvSpecimenEx change 1

1

BhvAutofunction s 1

1

BhvMaintenance 2 1

BhvSimEBeam

BhvPredict

OMPositioning

1

1

HlfUserDataServ er 1 HlfAlignments

BhvAdapter 1

1

HlfSDB 1

BhvConditions

HlfMemento 1

BhvAreaOfIntere stFinding 1

BhvMaintenance 1

1

BhvPatterning

BhvStateManage r 1

1

BhvVacuum

BhvImageForma tion 1

1

BhvBeamCorrec tions 1

BhvImageMeme nto 1

BhvNormalizatio n 1

BhvSafety

MdlPositioning

1

1

BhvDatasource 1

Mdlvacuum

MdlMagnumFIB Optics 1

1

Mdlvacruleset

1

MdlOpticsBrick

MdlLogicalDetect ors 1 MdlService

1

MdlSingleAvaBri ck 1

MdlFibgunBrick

MdlMotion

1

1

1

MdlPhysicalDete ctors 1

TadRegulators

1

MdlGunFegBrick

1

MdlImaging

1

MdlCurrentSens e 1

HalImaging

HalHwdRegulato r 1

HalRegulator

1

1

HalVacuum

halmotionAVA 1

1

HalMagnumFIBR egulator 1 HalMagnumFIBO ptics 1

HalSsib

HalDriver 1

HalRack 1

HalMux 1

HalSta 1

HalFIBGun

1

1

2004-1-6

1

HalGunHT

1

HalCcb14

19

halmotion

HalGunFEG 1

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1

Contents ! ! ! ! !

20

Introduction to Fei Why ‘future proof architecture’? Architecture model Fei Koala Architecture Conclusions

2004-1-6

Pybe Faber

5 min 5 min 10 min 10 min 5 min

Hardware Trends !

!

!

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Bare PC, only standard network connections (ethernet, possibly also USB2, firewire or CAN). Standalone modules with standardized power and network connections (ethernet or CAN). Second (‘support’) PC for 3rd party applications, post-processing, data storage (keeping the server PC load predictable).

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Software Trends !

!

!

!

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More modular software, in a more hierarchical structure, distributed over more than one PC. As a result: focus on standardized software interfaces, with ability of ‘remoting’ (network connections). Databases for result storage (data from Fei systems, but also from 3rd party equipment). Tighter integration of 3rd party equipment, needed to automate complex tasks (focus on ‘solutions’ rather than ‘tools’). Moving to C# / .NET for application software (highest level). 2004-1-6

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Lessons from Fei’s past !

!

! ! ! !

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Complex parts are long-lived: the knowledge to design them is gone. High-risk parts are long-lived: a new design may introduce big problems. Embedded software is hardest to maintain. A new architecture MUST be linked to a product. Lean design: only standardize what is needed Don’t add bells & whistles, provide ‘convenience’ as stand-alone tools, not as part of the architecture 2004-1-6

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