Sekidenko Optical Fiber Thermometers & Emissometers • OR4000T multi-channel optical fiber thermometer (OFT) • OR4000E real-time emissivity-compensated OFT • OR400T precision, single-channel OFT

Benefits In-situ, non-contact temperature measurement Immunity to RF and other sources of EMI Enhanced wafer-to-wafer uniformity Increased productivity, yield, and throughput High stability and reliability

Advanced Energy®’s (AE®’s) line of Sekidenko multi-channel optical fiber thermometers (OFTs) builds on the highly successful OR2000 product family and provides industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MOCVD, UV cure, and a variety of other semiconductor processes. Our family of OFTs includes the OR4000T, OR4000E, and OR400T models. The OR4000T model provides multi-channel capability and supports read rates up to 2 kHz for the most demanding semiconductor applications. The OR4000E model delivers the same high-speed performance as the OR4000T with the added benefit of real-time emissivity compensation. The OR400T model is a cost-effective, noncontact solution that provides a viable alternative to thermocouple-based temperature measurements. All models are modular in design and can be rapidly tailored to meet the unique requirements of each process application.

Features Industry-leading temperature and emissivity read rates Real-time emissivity-compensated temperature measurements Highly flexible, module-based platform architecture Full I/O and external trigger/ synchronization suite Background subtraction techniques and improved low-temperature performance

Highly Accurate Measurement Advanced Energy’s line of Sekidenko multi-channel optical fiber thermometers (OFTs) provides superior, non-contact temperature and emissivity measurements in a small, modular platform. Extended-range, low-temperature measurements are acquired through improved optical signal gathering, background subtraction techniques, and enhanced electronics resolution. AE’s OFTs are ideally suited for your most tightly controlled temperature and emissivity-dependent applications, such as laser annealing, RTP, MOCVD, HDPCVD, PECVD, PVD, metal etch, and other applications where uniform substrate temperatures enable critical process results.

In-Situ, Non-Contact Temperature Measurement Unlike thermocouple systems that require contact for measurement or measure a surface close to the wafer, AE’s OFTs measure direct wafer temperature in situ— without contacting the wafer. Each OFT system consists of a precision controller, a sophisticated sensor, and optical fiber cables. The use of a fiber optic cable allows for remote positioning of the controller away from RF and other sources of EMI. Each sensor is custom-designed to meet both the functional and mechanical requirements of your unique application. The sensor detects emitted near-infrared (NIR) light— without removing or contacting the wafer. A fiber optic cable transmits the NIR light from the sensor to the controller, where signal processing converts the light collected to a temperature reading. The result: shorter processing times, increased productivity, and the most accurate temperature measurement available today.

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OR4000T The OR4000T model provides multichannel temperature measurement utilizing 1 to 4 independently operating channels tailored to your operating requirements. This feature enables uniform, integrated Figure 1. Accurate temperature measurement using either lightpipes

measurements within multiple

or lens-based pyrometer sensors

chambers. With read rates up to 2 kHz, the OR4000T enables the

A Solution for Your Unique Process Requirements

tracking of temperature ramp rates to 200,000°C per sec for leading-edge

Your unique application requirements, combined with our applications and

thermal applications. Designed for

integration expertise, will determine the product that best fits your environment.

RTP, HDP-CVD, epi, ALD, and HDD

The OR4000T model provides multi-channel capability and high-speed performance,

applications, the OR4000T model

the OR4000E model enables real-time emissivity compensated measurement, and the

integrates sophisticated hardware

OR400T model supports cost-effective, precision temperature measurement.

and firmware to enable applicationspecific performance, including

950°C

background subtraction and a trigger/ synchronization control feature for

Temperature

850°C

moving targets.

Significance of 2 kHz Output Rate

750°C

Figure 2 illustrates the benefit of measuring an equivalent 50,000°C

650°C

550°C

200 Hz 2 kHz Reference Source

per sec temperature change at a 2 kHz versus a 200 Hz output rate. The 10 msec transition is effectively over-sampled at 2 kHz, providing excellent tracking of the

450°C Time (100 µs per sample)

Figure 2. OR4000T at 2 kHz versus a typical pyrometer at 200 Hz

source temperature in comparison to the substantially delayed response at 200 Hz. In high-speed applications, such as laser annealing, the accurate tracking of rapid temperature changes enables closed-loop temperature control and optimizes process yield.

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OR4000E

OR400T

The OR4000E model delivers the same high-speed performance as the

The OR400T is a precision instrument

OR4000T with the added benefit of real-time emissivity-compensated temperature

that enables cost-effective temperature

measurement. The dual-channel capability enables real-time emissivity monitoring

measurement in a compact form

and supports growth rate and temperature monitoring typically found in MOCVD.

factor. The single-channel product

Designed for RTP, HDP-CVD, MOCVD, and UV cure, the OR4000E model provides

provides a cost-competitive alternative

accurate measurements across a wide variety of processes.

to thermocouples with the added benefit of non-contact, in-situ

Significance of Real-Time Emissivity Compensation Measurement

temperature measurement and

During wafer fabrication, generating accurate, multi-point temperature

immunity from RF noise. The OR400T

measurements of a device is critical to the process. Utilizing in-situ, non-contact

is ideally suited for several high-

temperature sensors, the OR4000E enables the simultaneous measurement of

volume semiconductor applications,

both wafer temperature and emissivity through the radiant energy that a heated

including PECVD, LPCVD, PVD,

wafer emits and the coherent beams of light that the wafer reflects. The result is a

and metal etch.

real-time measurement that enables accurate and repeatable temperature readings regardless of the substrate material’s emissivity. For example, the wafer emissivity during an MOCVD process will vary significantly as different materials are deposited. Without correcting for emissivity, temperature errors can easily exceed 40°C, but with the use of real-time emissivity correction, the error can be reduced to < 1.0°C. 1360°C

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1355°C 1350°C

Temperature

1345°C 1340°C

0.6

1335°C 0.4

1330°C 1325°C

0.2

1320°C 1315°C 1310°C

50

55

60

65

70

75 80 Time (sec)

85

90

95

Desired Temperature Profile

Emissivity Compensated (Actual) Temperature

Substrate Emissivity

Uncompensated Tempertature Profile

0 100

Figure 3. The OR4000E enables highly accurate temperature measurements with real-time emissivity compensation

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Substrate Emissivity

0.8

A Solution For Every Process AE’s optical fiber thermometers deliver exceptional stability and product flexibility to meet the stringent requirements of today’s leading-edge applications. OR4000T and OR4000E OFTs provide the high-speed performance and multi-channel capability to accurately monitor and track rapid changes in temperature and emissivity at multiple in-situ measurement points. The OR400T is ideally suited as a low cost, non-contact instrument to replace thermocouple-based measurements. Product

Features

Primary Applications

OR4000T

Multi-channel capability, high-speed performance, with read rates up to 2 KHz

RTP, laser annealing, HDP-CVD, epi, ALD, HDD

Channel Configurations

1 to 4 channels of temperature measurement capability utilizing selectable/fixed emissivity; channels individually configurable

Temperature Range

50 to 3500°C

Filter Range

250 to 2300 nm

Read Rate

Up to 2 kHz temperature read rate

Accuracy

±1.5°C; NIST traceable

Resolution

0.001°C

Control/Repeatability

±0.1°C

Drift

< 0.2°C per year

Display

Internal, 4 x 20 LCD with keypad entry

Data IO

RS-232, RS-422/485, and Ethernet

Analog Output

0 to 10 V or 4 to 20 mA outputs

Control Interface

External trigger input, synchronization output, high and low alarms

Power Requirements

AC: 90 to 263 VAC; 47 to 63 Hz DC: +24 VDC

Environmental

Operational: 5 to 40°C (41 to 104°F)

Physical Dimensions

8.6 cm (H) x 15.2 cm (W) x 21.8 cm (D); 3.4" (H) x 6.0" (W) x 8.6" (D)

Figure 4. Model OR4000T with multi-channel capability and read rates up to 2 kHz

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Product

Features

Primary Applications

OR4000E

Real-time, dual-channel emissivity-compensated measurement, with read rates up to 2 KHz

RTP, laser annealing, HDP-CVD, MOCVD, UV cure

Channel Configurations

Single-or dual-channel, real-time emissivity-corrected temperature via pulsed laser(s); channels individually configurable

Temperature Range

50 to 3500°C

Real-Time Emissivity Range

0.03 to 1.0

Filter Range

250 to 2300 nm

Read Rate

Up to 2 kHz read rate for fixed emissivity temperature Up to 500 Hz read rate for real-time emissivity-corrected temperature

Accuracy

±1.5°C; NIST traceable

Resolution

0.001°C

Control/Repeatability

±0.1°C

Drift

< 0.2°C per year

Display

Internal, 4 x 20 LCD with keypad entry

Data IO

RS-232, RS-422/485, and Ethernet

Analog Output

0 to 10 V or 4 to 20 mA outputs

Control Interface

External trigger input, synchronization output, high and low alarms

Power Requirements

AC: 90 to 263 VAC; 47 to 63 Hz DC: +24 VDC

Environmental

Operational: 5 to 40°C (41 to 104°F)

Physical Dimensions

8.6 cm (H) x 15.2 cm (W) x 21.8 cm (D); 3.4" (H) x 6.0" (W) x 8.6" (D)

Figure 5. Model OR4000E with real-time, dual-channel emissivity-compensated measurement, and read rates up to 2 kHz

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Product

Features

Primary Applications

OR400T

Cost-effective, precision temperature measurement

PECVD, LPCVD, PVD, metal etch

Channel Configurations

Single-channel temperature measurement capability with selectable/fixed emissivity; channel is configurable

Temperature Range

50 to 3500°C

Filter Range

250 to 2300 nm

Read Rate

Up to 10 Hz temperature read rate

Accuracy

±1.5°C; NIST traceable

Resolution

0.001°C

Control/Repeatability

±0.1°C repeatability

Drift

< 0.2°C per year

Display

External display; set up via PC

Data IO

RS-232

Analog Output

0 to 10 V or 4 to 20 mA outputs

Power Requirements

AC: 90 to 263 VAC; 47 to 63 Hz DC: +24 VDC

Environmental

Operational: 5 to 40°C (41 to 104°F)

Physical Dimensions

3.3 cm (H) x 5.6 cm (W) x 19.6 cm (D); 1.3" (H) x 2.2" (W) x 7.7" (D)

Figure 6. Model OR400T shown with lightpipe sensor and fiber optic cable for cost-effective, precision temperature measurement

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Specifications are subject to change without notice.

Advanced Energy Industries, Inc. • 2501 SE Columbia Way, Suite 230 • Vancouver, WA 98661 U.S.A. T: 360.694.7871 • F: 360.694.4213 • [email protected] • www.advanced-energy.com Please see www.advanced-energy.com for worldwide contact information. Advanced Energy ® and AE® are trademarks of Advanced Energy Industries, Inc.

© Advanced Energy Industries, Inc. 2006 All rights reserved. Printed in U.S.A. ENG-OR4000-210-02 0M 12/06