RUSSIAN ACADEMY OF SCIENCES NATIONAL RESEARCH NUCLEAR UNIVERSITY «MEPHI» MOSCOW STATE UNIVERSITY ST. PETERSBURG STATE POLYTECHNIC UNIVERSITY MOSCOW AVIATION INSTITUTE YAROSLAVL BRANCH OF INSTITUTE OF PHYSICS AND TECHNOLOGY RAS INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS RAS

PROGRAM OF THE XXII INTERNATIONAL CONFERENCE ON

ION - SURFACE INTERACTIONS (ISI-2015) 20th – 24th August 2015

Moscow 2015

Sponsors of ISI - 2015: Russian Foundation for Basic Research «Elsevier» National Research Nuclear University «MEPhI»

Organizers

Russian Akademy of Sciences (RAS)

National Research Nuclear University «MEPhI»

Moscow State University

St. Petersburg State Polytechnic University

Moscow Aviation Institute

Institute of Microelectronics Technology and High Purity Materials RAS

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ORGANISING COMMITTEE Yu.A.Ryzhov – Chairperson, Academician of RAS M.N.Strikhanov – Co chairperson, National Research Nuclear University «MEPhI» V.E.Yurasova – Vice chairperson, Moscow State University A.I.Titov – Vice chairperson, St. Petersburg State Polytechnic University V.A.Kurnaev – Vice chairperson, National Research Nuclear University «MEPhI» A.F.Vyatkin – Vice chairperson, Institute of Microelectronics Technology and High Purity Materials RAS E.D.Marenkov – Scientific secretary, National Research Nuclear University «MEPhI» Members of organizing committee V.I. Bachurin

– Yaroslavl branch of Institute of Physics and Technology RAS

L.B. Begrambekov – National Research Nuclear University «MEPhI» A.M. Borisov

– Moscow Aviation Institute

J.S. Colligon

–The University of Huddersfield

Yu.M.Gasparyan – National Research Nuclear University «MEPhI» V.A.Ivanov

– General Physics Institute of RAS

P.A. Karaseov

– St. Petersburg State Polytechnic University

G.V. Kornich

– Zaporozhye National Technical University

L.M. Kovrizhnikh – General Physics Institute of RAS A.N.Petrovskii

– National Research Nuclear University «MEPhI»

A.A. Pisarev

– National Research Nuclear University «MEPhI»

A.A.Semyonov

– Moscow Aviation Institute

I.I. Shkarban

– Moscow Aviation Institute

E.Yu.Zykova

– Moscow State University

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PROGRAM COMMITTEE

V.E. Yurasova

– Chairperson, Moscow State University, Russia

Members of programme committee A.G. Borisov – University of Paris-Sud, France V.T. Gritsyna – Kharkov State University, Ukraine S.O. Kucheyev – Lawrence Livermore National Laboratory, USA Yu.V. Martynenko – National Research Center «Kurchatov Institute», Russia E.S. Mashkova – Institute of Nuclear Physics of MSU, Russia T. Michely – University of Koeln, Germany A.N.Mikhailov – University of Nizhni Novgorod, Russia A.A. Pisarev – National Research Nuclear University «MEPhI», Russia B.N.Popok – Aalborg University, Denmark D.I. Tetelbaum – University of Nizhni Novgorod, Russia S. Zhang – Nanyang Technological University, Singapore

INTERNATIONAL ADVISORY BOARD A.Aleksandrov (Russia), A.Bazhin (Ukraine), J.Burgdorfer (Austria), F.Dzhurabekova (Finland), V. Esaulov (France), R. Hoekstra (The Netherlands) F.F. Komarov (Belorussia), U.Kh. Rasulev (Uzbekistan), P. Sigmund (Denmark), A.I. Titov (Russia), R.Webb (UK), J. Williams (Australia), H.Winter (Germany), Y.Yamazaki (Japan).

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SCIENTIFIC SECTIONS 1. 2. 3. 4. 5. 6.

Sputtering, surface structure, desorption. Ion scattering and propagation. Emission of ions, electrons, photons and X-rays under ion-surface interaction. Ion implantation and surface modification. Ion-assisted processes in thin films and nanostructures. Plasma-surface interaction - physics and technology.

Oral reports will be held in the conference hall from 20 to 24 August from 9 to 1800. Invited talks will be allowed 25 minutes and additional 5 minutes for discussion. Oral contributions will be 10 minutes and additional 5 minutes for discussion. 00

The working time of poster sessions is from 1800 to 2000. Poster reports should be put on board 60 cm x 80 cm in the evening before the working day of the respective poster section. Poster stands will be marked with numbers corresponding to the numbers of the poster reports in this program.

Poster schedule: 20 August – sections 1, 2 and 3; 21 August – sections 4 and 5; 22 August – section 6.

830-900 – Breakfast, 1045-1100 – Coffee break, 1300-1400 – Lunch, 1600-1615 – Tea break, 2000-2030 – Dinner.

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20 August, Thursday PLENARY SESSION Chairs: Yu. Ryzhov, V.Kurnaev 830-1000

REGISTRATION OF THE PARTICIPANTS

1000-1010

OPENING OF THE CONFERENCE

1015–1040

Friedrich Aumayr (Vienna University of Technology, Austria) Interaction of slow highly charged ions with ultrathin carbon nanomembranes and graphene.

1045-1110

Arnaud Delcorte (Universite' Catholique de Louvain, Belgium) Fundamentals of soft matter desorption, molecular analysis and depthprofiling using massive keV clusters.

1115-1130

Coffee break

1130-1155

Kenji Kimura (Kyoto University, Japan) Temperature measurement of thermal spike using desorption of nanoparticles.

1200-1125

Thomas Michely (University of Cologne, Germany) New phenoma in 2D-layer irradiation with low energy ions.

1230-1255

Alexander Pisarev (National Research Nuclear University, Russia) Technological applications of plasma surface interactions.

1300-1310

Taking a photo of the conference participants

1315-1400

Coffee break

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INVITED TALKS AND ORAL CONTRIBUTIONS 20 August, Thursday Section 1. Sputtering, surface structure, desorption Chairs: L.Begrambekov, Yu.Gasparyan 1400-1425

Vladimir Popok (Aalborg University, Denmark) Low-energy interaction of metal cluster ions with surfaces.

1430-1455

Gregor Hlawacek (Helmholtz-Zentrum Dresden-Rossendorf, Germany) High resolution surface patterning with the Helium Ion Microscope.

1500-1525

Stefan Facsko (Helmholtz-Zentrum Dresden-Rossendorf, Germany) Spontaneous pattern formation on ion irradiated semiconductor surfaces.

1530-1555

Christina Trautmann (GSI Helmholz Center, Germany) Sputtering with heavy ions in the electronic stopping regime.

1600-1615

Tea break

1615-1640

Lothar Bischoff (Helmholtz-Zentrum Dresden-Rossendorf, Germany) Surface modification with heavy mono- and polyatomic ions.

1645-1710

Tomáš Škereň (Czech Technical University in Prague, Czech Republic) Ion induced nanopatterning of metals.

1715-1725

H.H.Brongersma, V.S.Chernysh, P.Brüner, T.Grehl. Surface composition of ion bombarded alloys.

1730-1740

D.V.Shyrokorad, G.V.Kornich, S.G. Buga. Molecular dynamics simulation of bimetal atomic clusters under low energy Ar ion bombardment.

1745-1755

A.A.Eksaeva, E.D.Marenkov, D.Borodin, A.Kirshner, M.Laenger, V.A.Kurnaev, A. Kreter. ERO-PSI code for numerical simulation of experiments on tungsten sputtering in linear plasma device PSI-2.

1800-2000

POSTERS, sections 1, 2 and 3.

2000-2030

Dinner

7

21 August, Friday

Section 2. Ion scattering and propagation Chairs: G.Kornich, V.Bachurin 900-925

Srdjan Petrović (Vinča Institute of Nuclear Sciences, Serbia) Classical and quantum rainbow channeling of charged particles in very thin silicon crystals and carbon nanotubes.

930-955

Franciszek Krok (Jagiellonian University, Poland) Pillars formation on compound semiconductor surfaces under focused and broad ion beam irradiation.

1000-1025

David Tetelbaum (Lobachevsky State University of Nizhnii Novgorod, Russia) Surface-oxide-related long-range effect under ion and light irradiation of solids.

1030-1040

Dong-Hai Zhang, Jun-Sheng Li, S. Kodaira and N. Yasuda. Projectile fragment emission in the fragmentation of silicon on carbon and polyethylene targets at 684 A MeV.

1045-1100

Coffee break

1100-1125

Stefan Nagele (Vienna University of Technology, Austria)
 Attosecond chronoscopy of photoemission.

1130-1140

Yu.A.Belkova, N.V.Novikov, Ya.A.Teplova. Equilibrium thickness of carbon interacting with nitrogen and neon beams.

1145-1155

P.Yu.Babenko, A.N.Zinoviev, A.P.Shergin. Focusing of particles scattered at a solid surface.

1200-1210

V.S.Bronsky, S.N.Shilobreeva, V.I.Shematovich, A.V.Khokhlov, S.Barabash, M.Wieser. Modeling of ice sputtering and scattering by the H+, O+ ions for the conditions of the Moon and Jupiter's moons surfaces.

1215-1225

A.M.Ionov, R.N.Mozhchil, A.F.Redkin, S.G.Protasova, N.S.Vorobyova. Influence of ion bombardment on the electronic structure and the valence states of uranium in oxygen-containing compounds.

1230-1240

S.A.Ryabtsev, Yu.M.Gasparyan, M.S.Zibrov, A.A.Pisarev. Deuterium thermal desorption from radiation defects in tungsten.

1245-1255

G. Filippov. Passage of particle through a cylindrical structure.

1300-1400

Lunch

8

21 August, Friday

Section 3. Emission of ions, electrons, photons and X-rays under ion-surface interaction Chairs: V.Popok, S.Krasheninnikov 1400-1425

Roger Webb (University of Surrey, UK)
 Ambient Pressure MeV Secondary Ion Mass Spectrometry.

1430-1455

Philippe Roncin (Université Paris-Sud, France) Grazing Incidence Fast Atom Diffraction (GIFAD) and Molecular Beam Epitaxy.

1500-1525

Eli Kolodney (Israel Institute of Technology, Israel)
 Velocity correlated cluster emission: a new surface sputtering mechanism by a large polyatomic projectile.

1530-1555

Toshio Seki (Kyoto University, Japan) Imaging mass spectrometry with MeV-energy heavy ion beams.

1600-1615

Tea break

15

40

16 -16

Paolo Milani (University of Milano, Italy)
 Supersonic cluster beam implantation in polymers: a novel tool for stretchable electronics and optics.

1645-1655

D. Bachiller-Perea, A.Muñoz-Martín, D.Jiménez-Rey, A.Debelle, F.Agulló-López. Ionoluminescence as a sensor of the defects creation and damage kinetics: application to fused silica.

1700-1710

V.V.Khvostov, E.Yu.Zykova. Inelastic processes in ion interaction with ZrO2 surface.

1715-1725

M.V.Sorokin, A.Dauletbekova, K.Schwartz, M.Baizhumanov, A.Alkilbekov, M.Zdorovets. Energy loss effect on color center creation in lithium fluoride crystals.

1730-1740

Yu.V.Kapitonov, P.Yu.Shapochkin, Yu.V.Petrov, V.A.Lovcjus, S.A.Eliseev, Yu.P.Efimov, V.V.Petrov and V.V.Ovsyankin. InGaAs/GaAs quantum well modification by focused ion beam.

1745-1755

D.N.Makarov, V.I.Matveev. Mass spectra of clusters at ion sputtering metal.

1800-2000

POSTERS, sections 4 and 5.

2000-2030

Dinner

9

22 August, Saturday

Section 4. Ion implantation and surface modification Chairs: А.Titov, А.Azarov 900-925

Kai Nordlund (Helsinki University, Finland)
 Ion irradiation of Si, GaN and Au nanowires: order-of-magnitude enhancements of damage production and sputtering.

930-955

Vladimir Popov (Rzhanov Institute of Semiconductor Physics, Russia) Formation, properties and applications of NV-centers in ion-implanted diamond.

1000-1025

Aurélien Debelle (Universite' Paris-Sud, France) Modification of ceramic material surfaces under ion irradiation.

1100-1115

Coffee break

15

40

11 -11

Igor Kossyi (Prokhorov General Physics Institute of the RAS, Russia) Explosive emission phenomena on the plasma-metal interface. Physics and applications.

1145-1210

Alexander Azarov (University of Oslo, Norway) Diffusion and trapping of Zn vacancies and interstitials in ion implanted ZnO.

1215-1240

Johan Malherbe (University of Pretoria, South Africa) Some ion bombardment effects in SiC.

1245-1255

C.Bundesmann, R.Feder, H.Neumann. The ion beam sputter deposition process of Ag.

1300-1400

Lunch

10

22 August, Sunday

Section 4. Ion implantation and surface modification Chairs: V.Popov, Z.Insepov 1400-1425

Thomas Greber (University of Zurich, Switzerland) Low energy ion implantation beneath 2D materials like boron nitride or graphene: Nanotents and Can opener effect.

1430-1455

Vjacheslav Ivanov (Prokhorov General Physics Institute of the RAS, Russia) Microplasma discharge on a metal surface covered with a dielectric film: Experiment, theory, and applications.

1500-1525

Zinetula Insepov (Purdue University, USA) Radiation modification of graphene with gas cluster ion beams.

1530-1555

Ivan Santos (University of Valladolid, Spain) Multiscale defect modeling: from fundamental properties to macroscopic effects

1600-1615

Coffee break

1615-1625

V.V.Privezentsev, V.S.Kulikauskas, V.V.Zatekin, A.V.Goryachev, A.A.Batrakov. Nanoparticle formation in Zn+ ion hot implanted Si.

1630-1640

Nana Pradhan, S.K.Dubey. Silicon ion irradiation into manganese implanted gallium nitride DMS.

1645-1655

F.F.Komarov, O.V.Milchanin, V.A.Skuratov, M.A.Makhavikou, A.Janse van Vuuren, J.N.Neethling, E.Wendler, L.A.Vlasukova, I.N.Parkhomenko, V.N.Yuvchenko. Ion-beam formation and track modification of InAs nanoclusters in silicon and silicon dioxide.

1700-1710

V.V.Vorobev, Y.N.Osin, V.F.Valeev, V.I.Nuzhdin, A.L.Stepanov. Structural changes and formation of porous in silicon during implantation with silver ions.

1715-1725

A.V.Naumkin, A.Yu.Pereyaslavtsev. Ion-induced auger electron spectroscopy of some Al-Mg alloys.

1730-1740

P.A.Karaseov, A.I.Titov, K.V.Karabeshkin, M.W.Ullah, A.Kuronen, F.Djurabekova, K.Nordlund. Experimental study and MD simulation of damage formation in GaN under atomic and molecular ion irradiation.

1745-1755

D.Sinelnikov, V.Kurnaev, D.Kolodko, N.Solovev. Tungsten nano-fuzz surface degradation under ion beam.

1800-2000

POSTERS, section 6

2000-2200

Conference dinner

11

23 August, Sunday

Section 5. Ion-assisted processes in thin films and nanostructures Chairs: A.Pisarev, А.Borisov 900-925

Xiao-Tao Hao (Shandong University, China) Hydrogenated oxide semiconductor films by sputtering.

930–955

Mike Russell (University of Pretoria, South Africa) Non-linear transport of energy in thin films and surface interactions.

1000-1025

Iva Bogdanović Radović (Rudjer Bošković Institute, Croatia) Formation and tailoring of metal and semiconductor quantum dots in amorphous matrices by MeV ions.

1030-1040

Brandon Holybee (University of Illinois at Urbana-Champaign, USA) Compositional and structural evolution of self-organized nanostructures during early stage ion irradiation of GaSb.

1045-1100

Coffee break

1100-1110

O.V.Ogorodnikova. Migration, trapping and release of deuterium from tungsten in the presence of high density of defects: theory and experiment.

1115-1125

N.N.Andrianova, A.M.Borisov, V.A.Kazakov, E.S.Mashkova, Yu.N.Palyanov, V.P.Popov, E.A.Pitirimova, R.N.Rizakhanov, S.K.Sigalaev. Graphitization of diamond surface at high-dose ion bombardment.

1130-1140

S.V.Konstantinov, F.F.Komarov, A.D.Pogrebnjak. Influence of ion irradiation on structure of high-entropy coatings (Ti, Hf, Zr, V, Nb)N.

1145-1155

N.N.Cherenda, V.V.Uglov, A.K.Kuleshov, V.M.Astashynski, A.M.Kuzmitski. Alloying and nitriding steels by compression plasma flows treatment.

1200-1210

D. Kogut, K. Achkasov, J.M. Layet, A. Simonin, A. Gicquel, J.Achard, G.Cartry. Negative-ion production on the surface of diamond materials in low pressure hydrogen plasmas.

1215-1225

K.Gutorov, I.Vizgalov, F.Podolyako, I.Sorokin. Study of plasma interaction with fusion reactor materials at the linear simulator with a beam-plasma discharge.

1230-1240

R.A.Andrievski. The interface role in the nanostructured films behavior under ion irradiation.

1245-1255

A.V.Lubenchenko, A.A.Batrakov, A.B.Pavolotsky, D.A.Ivanov, O.I.Lubenchenko, I.V.Shurkayeva. Modification of niobium oxide films with low-current ion beams.

1300-1400

Lunch

1420 -1930

Excursions

00

00

20 -22

Dinner 12

24 August, Monday

Section 6. Plasma-surface interaction - physics and technology Chairs: V.Ivanov, V.Kurnaev 00

25

9 -9

Sergei Krasheninnikov (National Research Nuclear University, Russia) Future directions in edge plasma physics and plasma material interactions in fusion devices: some results from the FES community planning workshops 2015.

930–955

Pavel Strelkov (Prokhorov General Physics Institute of the RAS, Russia
) Generation and amplification of microwave radiation by the injection of strong relativistic electron beam in a plasma waveguide.

1000-1025

Ahmed Hassanein and HEIGHTS Team (Purdue University, USA) Plasma-Surface Interactions during normal and abnormal Tokamak operation.

1030-1040

A.V.Rogov, Yu.V.Martinenko, Yu.V.Kapustin, N.E.Belova. Fabrication of fine-dispersed coatings at deposition with simultaneous sputtering.

1045-1100

Coffee break

1100-1110

S.Krat, Yu.Gasparyan, A.Pisarev, M.Mayer, G.de Saint-Aubin, I.Bykov, P.Coad, J. Likonen, W. van Renterghem, C.Ruset, A.Widdowson, JETEFDA contributors. Comparison of erosion and deposition in jet during carbon and ITER-like campaigns.

1115-1125

A.Kuzmin, H.Zushi, I.Takagi, K.Hanada, Y.Oyama, S.Sharma, A.Rusinov, Y.Hirooka, H.Zhou, M.Kobayashi, M.Sakamoto, N.Youshida, K.Nakamura, A.Fujisawa, K.Matsuoka, H.Idei, Y.Nagashima, M.Hasegawa, T.Onchi, K.Mishra, S.Banerjee. Permeation probes for hydrogen retention measurements.

1130-1140

Yu.N.Devyatko, V.V.Novikov, O.V.Khomyakov, D.A.Chulkin. А model of radiation-induced densification of oxide nuclear fuel.

1145-1155

A.S.Kaplevsky, L.B.Begrambekov, O.A.Dvoychenkova, A.E.Evsin, A.M.Zakharov, P.A.Shigin. On the possibility of decreasing thermal desorption from titanium during ion irradiation.

1200-1230

Conference discussion

1235-1255

Summary

1300-1400

Lunch

30

14 and later

Departure of participants from Moscow

13

POSTER REPORTS 20 August, Thursday

Section 1. Sputtering, surface structure, desorption 1. T.T.Thabethe, T.T.Hlatshwayo, J.B.Malherbe, E.G.Njoroge and T.G.Nyawo. The effect of thermal annealing in different atmosphere on Tungsten (W) deposited in 6H-SiC. 2. I.I.Bardyshev, V.A.Kotenev, A.D.Mokrushyn, A.Yu.Tsivadze. Interaction of positrons beam with surface charge on the metal-polymer interface. 3. S.F.Belykh, A.B.Tolstogouzov, A.A.Lozovan. The model of dimers emitted from metals in the non-linear sputtering mode. 4. V.N.Berzhansky, A.N.Shaposhnikov, A.R. Prokopov, A.V. Karavainikov, T.V.Mikhailova, V.I.Belotelov, N.E.Khokhlov, Yu.E. Vysokikh. The effect of the ion etching of sputtered Bi: YIG films on their surface morphology and magneto-optical properties. 5. I.E.Borodkina, I.V.Tsvetkov. Plasma-facing surface sputtering estimation using a model of the electric potential distribution in the presence of secondary electron emission in oblique magnetic field. 6. N.V.Volkov, D.A.Safonov. High-dose sputtering and erosion of tungsten surface at higher temperatures (100-500оС) under irradiation by flow of He and Ar ions with a wide energy spectrum. 7. E.V.Duda, G.V.Kornich. Simulating the dynamics of incident Cu3 cluster on the Cu(100) surface with monatomic step. 8. O.А.Yermolenko, G.V.Kornich, S.G.Buga. Sputtering of metal clusters on hydrocarbon surfaces: a comparative molecular dynamics study. 9. A.E.Ieshkin, Yu.A.Ermakov, V.S.Chsernysh. Angular distributions of particles sputtered from metals with gas cluster ions. 10. G.V.Kornich. Simulation of sputtering of surface metal nanoclusters under low energy ion bombardment. 11. A.V.Lubenchenko, A.A.Batrakov, A.B.Pavolotsky, S.Krause, D.A.Ivanov, O.I. Lubenchenko, I.V. Shurkayeva. Sputtering of thin films of niobium nitride by argon ions. 12. S.E.Maksimov, N.Kh.Dzhemilev, S.F.Kovalenko, V.I.Tugushev, O.F.Tukfatullin, Sh.T.Khojiev. Average decay rate constants and excitation energies of metal clusters sputtered by SF5+ and inert gas ions. 13. V.I.Matveev, S.N.Kapustin. Cluster sizes under ion sputtering of solids considering fragmentation processes. 14. K.F.Minnebaev, K.A.Tolpin, V.E.Yurasova. Anisotropy of sapphire single crystal sputtering. 15. B.L.Oksengendler, S.E.Maksimov, N.Yu.Turaev. Possible mechanisms of sputtering under bombardment by polyatomic ion beams (synergetic approach). 16. V.N.Samoilov, A.I.Musin. The peculiarities of distributions of overfocused atoms ejected from (001) Ni with energy and angular resolution. 17. A.N.Sutygina, N.N.Nikitenkov, I.A.Shulepov, E.B.Kashkarov. Plasma immersion ion implantation of aluminium into titanium. 14

Section 2. Ion scattering and propagation 1. J.S.Li, D.H.Zhang, H.H.Ao, M.M.Tian, Z.Feng, Ya.Q.Sun, S.Kodaira, N.Yasuda. Fragmentation cross section of 800 A MeV silicon ions on polyethylene target. 2. A.Zugarramurdi, M.Debiossac, P.Lunca-Popa, A.Mayne, A.Momeni, A.G.Borisov, Z. Mu, P.Roncin, H. Khemliche. Atomic and topographic corrugations of graphene on 6HSiC(0001) derived from Grazing Incidence Fast Atom Diffraction. 3. P.Yu.Babenko, A.N.Zinoviev, A.P.Shergin. Multiple scattering and inelastic energy loss in ion-surface collisions. 4. I.K.Gainullin. 3D effects in resonant charge transfer between atomic particles and nanosystems. 5. D.L.Zagorskiy, V.V.Korotkov, S.A.Bedin, D.A.Parfenov. Different track matrixes for obtaining of nanomaterials by template synthesis. 6. A.N.Zinoviev, D.S.Meluzova. Potentials obtained from RBS measurements and electron screening in nuclear synthesis reactions. 7. A.V.Ivanov. Scattering of charged particles on the chain of carbon atoms. 8. V.P.Koshcheev, Yu.N.Shtanov, D.A.Morgun, T.A.Panina. Atomic, electronic and nuclear diffusion coefficient of channeled particles. 9. I.V.Lysova, A.N.Mikhailov. Energy characteristics of the atomic beam channeling in nanotubes. 10. A.D.Mokrushin, E.V.Egorov, V.A.Smirnov. Analysis of oxide and reduced graphene films by usage of backscattered ion beam. 11. A.N.Pustovit. The depth of the output for the sputtered particles at an inclined incidence of the primary beam. 12. G.M.Filippov, V.A.Aleksandrov. Estimation of probability of porous formation at multicharge ion incidence on the ultrathin film.

Section 3. Emission of ions, electrons, photons and X-rays under ionsurface interaction 1. B.G.Atabaev, R.Dzabbarganov, B.A.Ziyaev. The investigation of emission of negative-ion clusters 3C-SiC under cesium Cs+ ion bombardment. 2. B.G.Atabaev, R.Dzabbarganov, B.A.Ziyaev. The effect of Se and Zn atoms dimerization on (Ge2)1-x(ZnSe)x solid solution surface. 3. V.P.Afanas’ev, P.S.Kaplya. Invariant imbedding method. The small angle approximation and the exact numerical solutions for electron spectroscopy analysis. 4. V.P.Afanas’ev, P.S.Kaplya, A.S.Gryazev, D.S.Efremenko, Y.O.Andreyeva. Differential inverse inelastic mean free path reconstruction methods from electron energy loss (EELS), photoemission (PES) and Auger spectra. 5. V.P.Afanas’ev, P.S.Kaplya, A.S.Gryazev, N.V.Lyapunov. Beryllium Be and tungsten W photoemission spectra.

15

6. I.A.Afanas’eva, V.V.Bobkov, V.V.Gritsyna, I.S.Zelenina, I.I.Okseniuk, D.A.Ryzhov, D.I.Shevchenko. On the mechanisms of sputtering of excited yttrium atoms under ion bombardment of yttrium and yttrium-aluminum garnet. 7. P.A.Borisovsky, E.N.Moos, A.I.Rudenko, Ja.P.Rusakova. Crystalline state features of quasi two-dimensional graphite layers. 8. A.F.Vladimirov. Simulation of the external electric field on the charge and energy state of an atom, leaving the surface of a solid. 9. S.S.Volkov, T.I.Kitaeva. Analytical features of SIMS in the study of the composition of quartz concentrates. 10. O.L.Golubev, N.M.Blashenkov. About the effect of isotope mass of evaporated ion on a field evaporation of ions at high temperatures of an emitter. 11. I.A.Zeltser, E.N.Moos, O.V.Savushkin. Energy dispersion dependences of true secondary electrons after implantation. 12. S.Parviainen, F.Djurabekova, S.P.Fitzgerald, A.Ruzibaev and K.Nordlund. Atom Probe Tomography by atomistic simulations. 13. O.A.Koval’, I.V.Vizgalov. The use of auto-oscillating beam-plasma discharge for ion implantaing in the dust particles. 14. V.A.Litvinov, D.I.Shevchenko, I.I.Okseniuk, V.V.Bobkov. The study of the surface of alloy for hydrogen storage based on the magnesium by SIMS. 15. K.F.Minnebaev, A.A.Khaidarov, V.E.Yurasova. Temperature dependence of secondary ion emission from copper single crystal. 16. S.N.Morozov, U.Kh.Rasulev. Secondary ion emission of GaAs single crystal under bombardment by Bim+ cluster projectiles. 17. S.N.Morozov. Secondary ion, ion-electron and ion-photon emission under bombardment of yttrium by Bim+ cluster projectiles. 18. N.A.Nurmatov, Y.S.Ergashov, N.Talipov, Kh.M.Sattorov, I.Kh.Khamidjonov. Study the electronic structure of alloys based on Nb-Zr at transition in intermetallic compounds. 19. E.I.Rau, A.A.Tatarintsev, V.V.Khvostov , В.Е.Юрасова. Secondary electronic, emission and charge characteristics of ion-irradiated sapphire. 20. A.A.Tishchenko, D.Yu.Sergeeva and M.N.Strikhanov. Properties of polarization radiation from charged particles beam brushing surface of a solid. 21. Yu.I.Tyurin, S.Kh.Shigalugov, V.D.Khoruzhii, V.P.Grankin, A.S.Dolgov, Van Yaomin. Luminescence from willemite Zn2SiO4–Mn surface under О, Н, О+Н atomic beams.

21 August, Friday

Section 4. Ion implantation and surface modification 1. N.D.Abrosimova, D.Yu.Zudin. Influence of hydrogen implantation mode on geometrical parameters of silicon-on-insulator structures. 2. A.V.Alekseev, G.G.Gumarov, V.A.Shustov, V.Yu.Petukhov, V.I.Nuzdin. Investigation of magnetic uniaxial anisotropy at ion-beam synthesis of iron silicides. 3. D.Bachiller-Perea, L.Thomé, A.Debelle. Damage processes in MgO irradiated with 1.2 MeV Auions and effect of irradiation temperature. 4. V.I.Bachurin, S.A.Krivelevich. Definition of order parameters for simulation of phase formation in the double metal systems under ion bombardment conditions. 16

5. S.Biira, J.B.Malherbe, P.Crouse, J. van der Walt. The impact of substrate temperature on the surface morphology and layer microstructure of ion-bombarded CVD polycrystalline zirconium carbide thin films. 6. V.V.Bobkov, L.P.Tishchenko, R.I.Starovoitov, Yu.I.Kovtunenko, L.A.Gamayunova. Implantation of deuterium and helium ions in deposited tungsten coatings during sequential irradiation. 7. E.A.Bobrova, A.V.Leonov, V.N.Mordkovich, A.P.Bibilashvili, N.D.Dolidze, K.D.Shcherbachev. Influence of chemical nature of implanted ions on a formation of radiation defects in Si. 8. Yu.V.Borisyuk, N.M.Oreshnikova, M.A.Berdnikova, A.V.Tumarkin, G.V.Khodachenko, A.A.Pisarev. Plasma nitriding of titanium alloy Ti5Al4V2Mo. 9. A.I.Vilensky, G.K.Sabbatovskii. Latent tracks of heavy ions in the polyethylenterephthalate. 10. R.A.Valikov, A.S.Yashin, B.A.Kalin, N.V.Volkov. Features of modification of the cylindrical surface under argon radial beam impact with energies up to 5 keV. 11. D.V.Guseinov, S.A.Denisov, A.V.Nezhdanov, I.N.Antonov, D.I.Tetel’baum, P.A.Yunin, V.N.Trushin, D.O.Filatov, M.V.Stepikhovа, Z.F.Krasil’nik, V.G.Shengurov. P+ ions irradiation of Ge layers on Si(100) for light emitting devices. 12. V.I.Zinenko, Yu.Agafonov, V.V.Saraykin. The redistribution of iron atoms implanted in silicon by irradiation with helium ions. 13. A.E.Ieshkin, V.S.Chsernysh, Yu.A.Ermakov, A.V.Molchanov, A.E.Serebryakov, M.V.Chirkin. High smoothing of glass-ceramic surface with gas cluster ion beam. 14. T.S.Kavetskyy, Y.Y.Kukhazh, J.Borc, A.L.Stepanov. Nanoindentation of boron-ion implanted polymethylmethacrylate up to 1100 nm indentation depth. 15. T.S.Kavetskyy, A.L.Stepanov. Spectroscopic investigations of ion-induced processes in polymethylmethacrylate at low-energy boron-ion implantation. 16. K.V.Karabeshkin, P.A.Karaseov, A.I.Titov. Crystal lattice damage formation in silicon during PFn+ ion implantation: part II. 17. V.S.Kovivchak, T.V.Panova. Modification of polycrystalline metal oxides by high power ion beam.

18. S.A.Krivelevich, V.I.Bachurin. Waves changeover and ion induced phase transitions in the double metal system. 19. F.N.Mikhailov. Optimization of parameters in the self-assembly LCC, molecular dynamics force field «ReaxFF». 20. S.J.Nimatov, D.S.Rumi. Modification of the Si(111) surface under the low energy of the alkali ion bombardment.

21. O.S.Odutemowo, J.B.Malherbe, C.C.Theron, E.G.Njoroge, E.Wendler. In-situ RBS studies of strontium implanted glassy carbon. 22. B.L.Oksengendler, F.G.Djurabekova, S.E.Maksimov. Features of ion sputtering of nanocrystals and instability zone of defects. 23. V.V.Poplavsky, A.V.Dorozhko, V.G.Matys. Ion beam formation of electrocatalysts for fuel cells with polymer membrane electrolyte. 24. V.S.Prosolovich, D.I.Brinkevich, V.B.Odzhaev, A.I.Prostomolotov, Y.N.Yankovski. Ioninduced processes on the surface of the naphthoquinondiazide-novolac resist. 25. V.I.Pryakhina, D.O.Alikin, I.S.Palitsin, S.A.Negashev and V.Ya.Shur. Influence of Ar+ ion irradiation on formation of domain structure in LiNbO3 during polarization reversal. 17

26. V.I.Psarev, L.A.Parkhomenko. Dissolution and nucleation of disperse precipitation an ionirradiated alloys. 27. A.V.Rogov, Yu.V.Kapustin, Yu.V.Martynenko. Defectiveness reduction of the nanocrystalline coatings deposited on the polycrystalline substrates after preliminary ion sputtering with simultaneous deposition. 28. M.K.Ruzibaeva, B.E.Umirzakov. Study of the profile of distribution of the implanted impurity at high irradiation doses. 29. A.S.Rysbaev, J.B.Khujaniyazov, I.R.Bekpulatov, R.F.Fayzullayev, Sh.A.Talipova. The thermosensitive structure created by implantation ionic Р + and B+ in Si (111). 30. A.S.Rysbaev, J.B.Khujaniyazov, I.R.Bekpulatov, A.M.Rakhimov. Way of additional clearing of a surface of monocrystals of silicon. 31. A.S.Rysbaev, J.B.Khujaniyazov, I.R.Bekpulatov, R.F.Fayzullayev. Influence thermal and laser annealing on superficial properties and profiles of distribution of atoms Р and B, implanted in Si (111). 32. A.A.Smirnov, S.I.Bozhko, A.M.Ionov, S.G.Protasova, S.V.Chekmazov, A.A.Kapustin. Sb (111): surface evolution under ion etching. 33. B.E.Umirzakov, S.J.Nimatov, H.H.Boltaev, B.D.Donaev. Investigation of the depth distribution profile of atoms in the multilayer system based on silicon. 34. B.F.Farrakhov, Ya.V.Fattakhov, M.F.Galyautdinov. Dynamic thermometry of a solid based on combination of optical diffraction and interference methods. 35. C.Herbig, E.H.Åhlgren, W.Jolie, C.Busse, J.Kotakoski, A.V.Krasheninnikov, T.Michely. Low energy ion irradiation of supported 2D layers and their annealing. 36. T.T.Hlatshwayo, J.B.Malherbe, N.G. van der Berg, R.J.Kuhudzai, E.Wendler. Diffusion of silver in bombardment-induced amorphous SiC. 37. I.P.Chernov, E.V.Berezneeva, N.S.Pushilina, P.A.Beloglazova. Modification of zirconium alloy by pulsed particle beams. 38. V.V.Chirkov, G.G.Gumarov, V.Yu.Petukhov, V.F.Valeev, Magnetopolarimetric investigation of ion-beam-synthesized Co-silicide films.

A.E.Denisov.

39. A.A.Shemukhin, A.V.Nazarov, Yu.V.Balaksin, V.S.Chernysh. Defect formation and recrystallization in the silicon-on-sapphire films under Si+ irradiation. 40. A.G.Shirokova, E.A.Bogdanova, V.M.Skachkov, L.A.Pasechnik, N.A. Sabirzyanov. Creation of bioactive implants by different methods.

S.V.Borisov,

41. K.D.Shcherbachev, E.A.Skryleva, D.A.Kiselev. Influence of a chemical activity of implanted ions on a structure of a damaged Si surface of SIMOX substrates. 42. K.B.Eidelman, N.Yu.Tabachkova, K.D.Shcherbachev, V.V.Privezentsev. Modification of ion-beam synthesized Zn nanoparticles in Si (001) by subsequent annealing. 43. Y.S.Ergashov, D.A.Tashmukhamedova, F.G.Djurabekova, B.E.Umirzakov. Influence of microroughnesses of the surface on composition and electron properties of CdTe/Mo (111) films. 44. M.B.Yusupjanova, D.A.Tashmukhamedova, M.T.Normuradov, B.E.Umirzakov. Investigating of processes of creation nanodimensional structures in SiO2 films at ion bombardment.

Section 5. Ion-assisted processes in thin films and nanostructures 18

1. M.Yu.Barabanenkov, A.I.Il'in, V.T.Volkov, Yu.A.Agafonov, V.I.Zinenko, A.A.Podkopaev. Annealing stage modelling of low energy ion beam synthesis of submicrometer periodical silicon oxide pillars in silicon. 2. A.L.Bondareva, G.I.Zmievskaya. Stochastic simulation of pores formation in thin layer of silicon carbide. 3. L.A.Vlasukova, F.F.Komarov, V.N.Yuvchenko, O.V.Mil’chanin,А.K. Dauletbekova, A.E.Al’zanova, A.T.Akilbekov. Etching of latent track in amorphous SiO2 and Si3N4: simulation and experiment. 4. N.V.Volkov, T.V.Yakutkina, I.V.Oleynikov, N.V.Sysoeva. Dynamic patterns of ion mixing in multilayer film systems under irradiation by ion beams with a wide energy spectrum. 5. A.A.Dmitrievskiy, D.G.Guseva, V.M.Vasyukov, V.V.Korenkov, A.V.Shuklinov. Decrease in AlN/Si-structure adhesion induced by low-flux of beta-irradiation. 6. S.B.Donaev, E.Rabbimov, A.K.Tashatov, D.A.Tashmuhamedova. Formations threecomponental nanofilms on surface GaAs at bombardment by low-energy Na+ and Al+ ions. 7. V.S.Efimov, Yu.M.Gasparyan, A.A.Pisarev, I.B.Kupriyanov. Investigation of deuterium retention in beryllium under high flux pulsed plasma irradiation. 8. A.F.Zatsepin, E.A.Buntov, A.I.Slesarev. Ionization effects in implanted SiO2/Si structures under high-energy α-particles impact. 9. G.I.Zmievskaya, A.L.Bondareva. Damage of silicon carbide thin film due to vacancygaseous defects. 10. E.B.Kashkarov, N.N.Nikitenkov, Yu.I.Tyurin, M.S.Syrtanov, Zhang Le. Influence of pulsed bias on structure and element distribution in titanium nitride thin film deposited by arc ion plating. 11. D.V.Kolodko, D.N.Sinelnikov, A.V.Kaziev, A.V.Tumarkin. Metal-ion Penning source for thin films deposition. 12. D.S.Korolev, A.N.Mikhaylov, A.I.Belov, V.A.Sergeev, I.N.Antonov, O.N.Gorshkov, A.P.Kasatkin, D.I.Tetelbaum. Effect of ion irradiation on resistive switching parameters of silicon-oxide-based MIM structures. 13. E.G.Njoroge, C. C. Theron, J.B.Malherbe, N.G. van der Berg and T.T.Hlatshwayo. Surface and interface effects of annealing Zr thin films on 6H-SiC in vacuum. 14. R.V.Selyukov, V.V.Naumov, I.I.Amirov. Changes of platinum film texture caused by ion-plasma treatment. 15. N.A.Smolanov. Integrated research microparticle deposition from arc discharge plasma on the wall of the vacuum chamber. 16. A.S.Sohatsky, K.A.Kornieieva, J.OʼConnel, V.A.Skuratov, A.A.Nikitina, J. Neethling. Effect of the steel sample preparation technique on the quality of structure investigation by transmission electron microscopy. 17. A.V.Stepanov. Influence of carbon nanotube’s elastic perturbation on slow atomic particles channeling: first principles calculation. 18. A.V.Stepanov. Channeling of particles in carbon nanotubes heterostructures with defects. 19. S.V.Tomilin, A.S.Yanovsky, V.N.Berghansky, А.N.Shaposhnikov, О.А.Tomilina. Ionfield processes in island metallic nanofilms. 20. V.V.Uglov, G.Abadias, N.T.Kvasov, S.V.Zlotski, I.A.Saladukhin, V.I.Shymanski. Ioninduced processes in thin multilayer films based on zirconium and silicon nitrides irradiated with xenon ions. 19

22 August, Sunday

Section 6. Plasma-surface interaction - physics and technology 1. A.V.Filimonov, N.V.Andreeva, E.Y.Koroleva. Low temperature surface modification of potassium tantalate doped with lithium ions by means of piezoresponse force microscopy. 2. A.A.Airapetov, L.B.Begrambekov, Ya.A.Sadovskiy. Gasification and removal redeposited carbon layers from plasma devices by interaction with oxygen-ozone mixture. 3. I.I.Amirov, M.O.Izyumov, V.V.Naumov. Selective low energy sputtering of metal films in the density argon plasma with additive of oxygen. 4. V.V.Andreev, L.A.Vasilyeva. Investigation of dielectric barrier discharge in a cell with periodic arrangement of metal strips- electrodes which are disposed in the depth of dielectric. 5. V.N.Arustamov, K.B.Ashurov, I.Kh.Khudaykulov, B.R.Kahramonov. On the issue of plasma flow generation by vacuum arc discharge and coating deposition. 6. V.N.Arustamov, K.B.Ashurov, I.Kh.Khudaykulov, B.R.Kahramonov. On the issue of structural transformations of constructional material surface under vacuum arc action. 7. V.N.Arustamov, K.B.Ashurov, R.B.Nagaibecov, I.Kh.Khudaykulov, B.R.Kahramonov. Simulation of field amplification processes on cathode microasperities under vacuum arc discharge. 8. V.N.Arustamov, K.B.Ashurov, I.Kh.Khudaykulov, B.R.Kahramonov. Special features of ion ionization in cathode spots of vacuum arc discharge. 9. V.N. Arustamov, K.B. Ashurov, I.Kh. Khudaykulov, B.R Kahramonov. The electric field role in cathode spot formation by vacuum arc discharge. 10. V.N. Arustamov, K.B. Ashurov, I.Kh. Khudaykulov, B.R. Kahramonov. Thin film formation in deposition from vacuum arc discharge plasma. 11. A.A.Barat, D.D.Grigoryan, V.V.Manukhin. Design procedure of energy spectra of physical sputtering in engineering material interacting with plasma. 12. A.A.Batrakov, A.V.Ryzhenkov, O.S.Zilova, G.V.Kachalin, A.A.Burmistrov, A.P.Lepekhov. Depth profiling protective coating titanium nitride based on glow discharge optical emission spectrometry. 13. N.N.Bozhko, V.P.Stolyarov, F.A.Doronin, V.G.Nazarov. treatment of polymeric films.

Plasma-chemical surface

14. G.G.Bondarenko, V.I.Kristya, M.R.Fisher. Modeling of the effect of field electron emission from the cathode with a thin dielectric film on the Townsend discharge ignition voltage in argon–mercury mixture. 15. A.M.Borisov, V.G.Vostrikov, A.V.Vinogradov, B.L.Krit, V.B.Lydin, M.N.Polyansky, S.V.Savushkina, N.V.Tkachenko. The study of plasma electrolytic oxidation coatings on Zr and Zr-1% Nb alloy. 16. L.I.Bryukvina, S.V.Lipko. Influence of plasma in femtosecond laser pulses focus on the morphology of near-surface layer of alkali fluorides. 17. A.G.Gorobchuk. Numerical investigation of silicon surface polymerization in CF4/H2 plasma. 18. D.V.Grankin, A.I.Bazhin, V.P.Grankin. Electronic excitation of a surface by atoms of the hydrogen plasma in the presence of UV radiation. 20

19. A.E.Evsin, L.B.Begrambekov, A.A.Gordeev. Plasma methods of formation of surface layers on zirconium for mitigation of hydrogen penetration. 20. V.K.Egorov, E.V.Egorov, M.S.Afanas’ev. Total X-ray fluorescence analysis in conditions of ion beam excitation. 21. M.Zibrov, Yu.Gasparyan, A.Shubina, and A.Pisarev. Determination of hydrogen binding energies with defects in metals from thermal desorption measurements with different heating rates. 22. S.P.Zimin, I.I.Amirov, E.S.Gorlachev, V.V.Naumov, E.Abramof, P.H.O.Rappl. Plasma sputtering of Pb1−xEuxTe films with varied composition and structure. 23. S.V.Ivanova, L.N.Lesnevskiy, M.A.Lyakhovetskiy, O.A.Nagovitsina. Structure and properties of surface layers forming on zirconium alloys using microarc oxidation method. 24. A.I.Kamardin, R.Kh.Saidahmedov, G.A.Khamraeva. Use of magnetrons with the hot cathode for decorative coats. 25. E.S.Kiselyova, N.N.Nikitenkov, V.S.Sypchenko. Study of the composition, optical properties of the coating based on titanium dioxide deposited by reactive magnetron sputtering. 26. V.I.Kristya, Ye Naing Tun. Calculation of sputtering characteristics of the cathode with a dielectric fifm of non-uniform thickness in glow discharge. 27. K.I.Kruglov, V.К.Abgaryan, Kh.Leb. Numerical simulation of structural units heating for ion sources with radio-frequency plasma discharge heating. 28. E.Marenkov, S.Krasheninnikov. Ablation of high-Z material dust grains in edge plasmas. 29. E.Meshcheryakova, M.Zibrov, A.Kaziev, G.Khodachenko, A.Pisarev. Characterisation of plasma parameters of inductively-coupled plasma source and its application for nitriding of steels. 30. A.B.Nadiradze, R.R.Rahmatullin, S.V.Urnov. Formation relief on the surface of borosilicate glasses under xenon plasma at glazing incidence. 31. L.S.Novikov, E.N.Voronina, V.N.Chernik, E.A.Vorobieva, A.V.Makunin, K.B. Vernigorov, K.S.Yakovlev, M.Yu.Yablokova. Erosion of CNT-based polymer nanocomposites exposed to oxygen plasma. 32. L.S.Novikov, E.N.Voronina, V.N.Chernik, L.A.Zhilyakov. Change in properties of polyimide films as a result of combined irradiation with protons and oxygen plasma. 33. F.S.Podolyako, I.A.Sorokin, K.M.Gutorov, I.V.Vizgalov, E.G.Shustin. Formation of monoenergetic ion flux from the plasma to the dielectric sample. 34. A.S.Popkov, S.A.Krat, Yu.M.Gasparyan, A.A.Pisarev. Interaction of lithum-deuterium films with atmospheric gases. 35. A.A.Pshenov, A.A.Eksaeva, S.I.Krasheninnikov, E.D.Marenkov. Vapour shielding of solid targets exposed to high heat flux. 36. T.D.Radjabov, A.M.Nazarov, S.V.Koveshnikov. polycrystalline silicon for solar cells.

The

purification

methods

of

37. T.D.Radjabov, A.I.Kamardin, A.A.Simonov, Z.T.Khakimov. Ion assisted deposition of the multilayer metal coats. 38. B.K.Rakhadilov, T.R.Tulenbergenov, I.A.Sokolov, D.A.Ganovichev. Research of steadystate plasma interaction with tungsten. 39. R.I.Romanov, S.N.Grigoriev, V.Yu.Fominski, M.A.Volosova. Regulation of ion bombardment parameters for preparation of low-friction coatings with improved properties. 21

40. А.Savchenkov, K.Gubskiy, А.Kuznetsov, E.Nikitina, S.Tugarinov, О.Buzhinskij. The system of laser cleaning of mirror surface for optical diagnostic systems of the ITER. 41. I.A.Sorokin, I.V.Vizgalov, O.A.Bidlevich. Analysis of ion fluxes in linear plasma devices. 42. M.A.Stepovich, M.N. Shipko, V.G. Kostishin, V.V. Korovushkin. Ion-induced processes in the corona discharge superdispersive magnetite particles. 43. N.N.Cherenda, A.P.Laskovnev, A.V.Basalai, V.V.Uglov, V.M.Astashynski, A.M. Kuzmitski. Structural and phase transformations in bronze alloyed by titanium atoms under the action of compression plasma flows. 44. V.I.Shymanski, N.N.Cherenda, V.V.Uglov, V.M.Astashynski, A.M.Kuzmitski. Modification of structure and phase composition of Nb/Ti system by compression plasma flows. 45. M.N.Shipko, V.G.Kostishin, M.A.Stepovich, V.V.Korovushkin. Modification of properties of ferrite materials with the hexagonal structure by treatment in corona discharge plasma.

22