NanoPWM Drives for High Performance Positioning Applications. Ze ev Kirshenboim ACS Motion Control
NanoPWM Drives for High Performance Positioning Applications Ze’ev Kirshenboim ACS Motion Control
Market Need Wafer Inspection Wafer Inspection – 30...
Smooth constant velocity - ±3nm following error @ < 100mm/sec.
> Next generation of 450 mm wafers
2
>
Similar and better positioning performance
>
Much higher power due to size >
Bus voltage > 100Vdc,
Preferred: 160Vdc, 320Vdc
>
Motor phase current > 30A peak
Market Needs OLED FPD Inspection > Positioning performance > Standstill jitter < 5 Nanometer > Smooth constant velocity ±10nm following error @ 100mm/sec. > High power due to size > Bus voltage > 320Vdc > Motor phase current > 30A peak
3
Market Needs High Performance Positioning Linear Air Bearing Stages Air bearing spindles Linear Servo Stages Lens Grinding Equipment Laser Steering Ultrasonic Scanning Coordinate Measuring Machines (CMM)
4
Present Drive Solutions Linear Servo Drives Using Linear Servo Drives due to: > Low noise > High bandwidth > Zero crossover distortion (linearity) > No current ripple
5
Present Drive Solutions Linear Servo Drives Linear servo drives drawbacks > > > >
Low efficiency, high heat dissipation Large size Difficult / expensive fault protection Complex supply requirements >
+/-15vdc Bias Supply
>
Two (+/-) DC Motor Bus Supplies
> Analog current loop tuning requires changing components > Available products are limited in voltage ( Expensive
High efficiency, low heat dissipation Compact size Excellent fault protection Simple supply requirements > Single Motor Bus Supply > High voltage and current > Low(er) cost
NanoPWMTM Drives Better than Linear Drives Linear drive +/‐50V, 6/30A
> > > >
A much smaller package Better reliability Fully digital control Simpler power supply requirements > Better price
NanoPWMdrive 320V, 15/30A 11
NanoPWMTM Two Lines of Drives > NPM > EtherCAT slaves – Similar to other ACS’ drive modules > Expanding the line of ACS’ EtherCAT drives
> NPD > Drive with ±10V current commutation commands > Direct replacement for linear drives 12
ACS Motion Controller
EtherCAT
NanoPWM Drive
M E
Direct replacement to Linear drive
Any Motion Controller
+/‐10V
NanoPWM Drive
M E
NPM / NPD Three Form Factors Chip like Bookshelf, panel mounted Rack mounted
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NPM / NPD 100Vdc drives Main Specifications (per axis/motor) Max Voltage [Vdc]
Cont Current [A]
Peak current [A]
Cont Power [W}
Peak Power [W]
100
3.3
10
340
950
100
6.6
20
680
1900
100
10
30
1,020
2850
100
13.3
40
1,380
3,800
For wafer inspection & metrology, optical lenses processing > Standstill Jitter Following error at constant velocity Jitter Following error at constant velocity > >
Test system: a linear stage, ironless motor, cross roller bearings, 0.4um Laser encoder Sub‐nanometer position jitter Nanometer stepping: ±0.4nm jitter
