Low Temperature Deposition of Polycrystalline Lithium Transition Metal Oxide Thin Films for Micro Batteries K.-F. Chiua, C. C. Chena, P. Y. Chena and W.-H. Hob a
Department of Materials Science and Engineering, Feng Chia University, 100 Wen Hua Rd., Taichung, Taiwan b Taiwan Textile Research Institute, 6 Chengtian Rd., Tucheng City, Taipei County, Taiwan The choices of substrates for lithium micro batteries or thin film batteries have been limited by the high annealing temperatures, which are generally required in the fabrication of polycrystalline thin film cathodes. In this paper, a plasma assisted technique has been developed for low temperature fabrication of polycrystalline lithium transition metal oxides as thin film cathodes. The thin films were deposited by magnetron sputtering, followed by thermal annealing and plasma treatments. By applying plasma treatments, polycrystalline films of LiCoO2, LiMn2O4 and LiFePO4 have been obtained under relatively lower annealing temperatures (
