Only existing high power Laser Platforms can be provided as a LPP EUV driver (availability, reliability, costs,… )
20 kW CO2 Trumpf
8 kW Nd:YAG Rod ROFIN
16 kW Yb:YAG Disk
Archivierungsangaben
Trumpf
? 10 (32) kW Yb:Fiber IPG
1994
1998
2002
2006
2010
2014Seite 5
Time scale shows estimation for principle readyness of each platform for pulsed high power amplifier operation (Fiber design requires significant modifications)
High Power Solid State Lasers for LPP
Archivierungsangaben
Basic Laser Design – MOPA (Master Oscillator Power Amplifier)
Oscillator defines:
Amplifier defines:
• pulse duration
• beam quality
• repetition rate
• output power
• beam quality
• efficiency • system size and weight • system costs
-> High Power Oscillators do not meet all requirements simultaneously !
Seite 6
High Power Solid State Lasers for LPP
Basic DPSSL Configurations for kW output power
Archivierungsangaben
Transversally pumped rodlaser
Thin disk laser
Slab Laser INNOSLAB
Fibre laser Seite 7
High Power Solid State Lasers for LPP
Archivierungsangaben
Industrial Multi kW Laser Platforms – CW Operation Rod
Thin disk
Fiber
Average Power [kW]
8
8 (16)
10 (36)
20
Pulse Power
-
-
-
-
Beam quality [mmxmrad]
25
6.6
6
10
Efficiency e-o [%]
10
25
25
10
Industrial Maturity
+
+
+
+
Costs in € / 10 kW
750.000
750.000
750.000
400.000
[MW]
* Costs assume industrial numbers of lasers per year, single devices are more expensive
Slab
CO2
Seite 8
High Power Solid State Lasers for LPP
Archivierungsangaben
Industrial Laser Platforms – Pulsed Operation Rod
Thin disk
Fiber
Slab
CO2
Average Power [kW] Æ single beam
1.4
8?
1?
0.2
6
Pulse Power
10
10?
2?
4
-
Beam quality [mmxmrad]
3
3?
0.6?
0.6
10
Efficiency e-o [%]
3
15-20?
20?
20
2.4
?
?
1.700.000
[MW]
Costs in € / 10 kW (*)
2.500.000 1.500.000?
* Costs are rescaled by reduced efficiency in pulsed mode of operation compared to CW operation. Costs for low power oscillator, beam forming system, additional mechanics and electronics are not included
Proposed Laser Design for LPP Driver • 10 kW single beam output can be provided by InnoSlab – ThinDisc MOPA architecture • Industrial 16 kW CW Solid State Laser Platform will be available in 2008 • Estimated Development for pulsed 10 kW MOPA Prototype is about 2-3 years
Archivierungsangaben
• Single beam output meeting requirements on peak power (10 MW) and focus size (100 µm) can be achieved • Power doubling to 20 kW (single beam) by polarization coupling, further power scaling by beam combining Seite 13
High Power Solid State Lasers for LPP
Conclusion • Yb-based InnoSlab Oscillator is not commercially yet • Laser efficiency defines footprint, costs, … • Pulsed operation requires development effort of 2 to 3 years
Archivierungsangaben
• Actually there are no other applications, driving laser development for pulsed Multi 10 kW Systems • Power consumption will be below the 500 kW of CO2 if new technolgies are developed • Initial price of about 5 M$ is expected Seite 14
