High Precision Filter for Liquids Series FGH
Filtration efficiency: 99% or more HEPO2element Filtration accuracy: 2, 4, 6 or 13 µm (Filtration efficiency 99%)
Membrane element Filtration accuracy: 0.2 or 0.4 µm (Filtration efficiency 99.9%)
FGD FGE FGG FGA FGB FGC FGF FGH EJ ED FQ1 FN EB첸 ES첸
797
High Precision Filter for Liquids
Series FGH Filtration efficiency: 99% or more Prevents particle generation in the housing Internal particle generation is eliminated by using stainless steel 316 and PTFE for the wetted material and adopting a clamp ring system.
High cleanliness and high quality High cleanliness and high quality are ensured by manufacturing elements in a clean room (Class M 5.5 (ISO Class 7)∗) and performing 100% inspection of integrity. ∗ Per FED-STD 209E (ISO14644-1).
Prevents residual liquid accumulation in the case A simple structure prevents the residual liquid from accumulating in the case.
Application examples Ultrasonic cleaning machine • Manufacture of electric and electronic industrial components • Manufacture of semiconductor-related components Dual chamber ultrasonic cleaning machine
Jet cleaning machine • Camera, lens and bearing for
Triple chamber ultrasonic cleaning machine
manufacture of highprecision processing components • Nozzle for manufacture of automobile components
Series FGH
Cleaning
Cleaning
Steam Dipping Ultrasonic chamber chamber
Ultrasonic Boiling chamber chamber
Pre-filter
798
Series FGH
Series FGH
Steam chamber
Clean tank
Dirty tank
Clean tank
Dirty tank
Pre-filter Pre-filter
Series FGH
Pre-filter
HEPO1 1Element Filtration accuracy: 2, 4, 6 or 13 µ m (Filtration efficiency 99%)
High precision filtration: 99% or more High accuracy filtration is achieved by using a HEPO1 1element with filtration accuracy of 2, 4, 6 or 13 µm (Filtration efficiency 99%). Schematic diagram of filtration efficiency data measuring circuit
m EJ-2 µ
Dust feeder
µm
100 99
EJ-4
Tank Differential pressure gauge
EJ-13
95
µm
EJ-6 µm
Initial filtration efficiency (%)
[Test conditions] Fluid: water / Test dust: ACFTD / Flow rate: 35 l/min Dust concentration: 10 mg/l / Temperature: 20°C Element: EJ801S
Pressure gauge
90 0
2
4
6
8
Flow meter
10
12 13 14
Downstream side sampling
Pump Upstream side sampling
Particle diameter (µm)
Measuring filter
Automatic particle measuring instrument
No outflow of fibers or elution of components from the filter media There is almost no outflow of fibers or elution of components from the filter media because it uses ultrafine and long polyester fiber nonwoven fabric with no binder.
FGD
Applicable for a wide range of liquids
FGE
The element is applicable for a wide range of liquids because it adopts PTFE seals.
FGA
FGG
FGB
Applicable fluids Classification Water
Alcohol
Hydrocarbon Ester Oil/fuel oil Others
FGC
Description Tap water, industrial water, distilled water, ion-exchange water, pure water, ultrapure water Isopropyl alcohol (IPA, propanol) Ethyl alcohol (ethanol) Methyl alcohol (methanol) Butyl alcohol (butanol) Ethylene glycol
FGF FGH EJ
Petroleum ether, petroleum benzene
ED
Methyl acetate, ethyl acetate, methyl acrylate Hydraulic fluid, lubricating oil, light oil, kerosene, cutting oil, grinding oil
FQ1
Ammonia (10% solvent), ethyl ether, isopropyl ether
FN EB첸 ES첸
799
Membrane Element Filtration accuracy: 0.2 or 0.4 µ m (Filtration efficiency 99.9%)
High precision filtration: 99.9% or more High accuracy filtration is achieved by using a membrane element with filtration accuracy of 0.2 or 0.4 µm (Filtration efficiency 99.9%) Schematic diagram of filtration efficiency data measuring circuit
Test conditions Fluid: pure water Contaminant: polystyrene latex particles Particle measuring method: 0.2 µm automatic particle measuring instrument Filtration Particle Number of particles (/10 ml) Filtration rating diameter efficiency (µm) Upstream side Downstream side (µm) (%) 0.208 99.999 146380 1 0.2 0.4
0.309
103957
2727
97.4
0.41
95019
29.9
99.97
Tank
Differential Flow meter pressure gauge Pressure gauge Downstream side sampling Measuring filter
Pump Upstream side sampling
Automatic particle measuring instrument
Easy to handle There is no need of hydrophilic treatment using IPA and the like, because the element uses a hydrophilic filter media.
Long filtration life The element has a long filtration life because of the high porosity and low pressure drop of the filter media. The dust retention amount of the 0.2 µm version is 90 g.
Pre-rinsed with ultrapure water (0.2 µm version only)
Resistivity recovery characteristics
Classification Water
Alkalis Aldehyde Alcohol Ether Hydrocarbon
0.2 µm
0.4 µm
Tap water, ultrapure water, ion-exchange water, distilled water Sodium hydroxide (10%) Potassium hydroxide (10%) Ammonia water (28%)
Ammonia water (28%)∗
Formaldehyde (35%)
Formaldehyde (35%)∗
Methyl alcohol, butyl alcohol, ethyl alcohol, propyl alcohol Dioxane∗ Ethyl ether∗ Ethyl ether∗ Benzene∗, toluene∗, Benzene∗ hexane∗, xylene∗ Hexane∗
∗ Can be used depending on temperature conditions (please consult with SMC).
[Measuring conditions] Element used: ED801S-X20 Element size: ø70 x L247
Filtration area: 4000 cm2 Fluid: Ultrapure water (resistivity value 17.9 MΩ·cm) Flow rate: 10l/min
20 18
Resistivity value (MΩ·cm)
Applicable fluids
16 14 12 10 8 0
0
5
10 15 20 25 30 35 40 45 50 55 60
Flow time (min) ∗ Per JISK3834
800
High Precision Filter for Liquids
Series FGH How to Order
FGH 100
03
J 002 T
High precision filter for liquids
Element seal Symbol Material PTFE T
Filtration accuracy
Body size Symbol Element length l117 100 l246 200 l496 300
Symbol Filtration accuracy Applicable for: Applicable body 2 µm 002 Filtration 4 µm 004 HEPO 2 FGH100 to 300 efficiency 6 µm 006 99% 13 µm 013 X20 0.2 µm Filtration efficiency Membrane FGH200 to 300 X40 0.4 µm 99.9%
Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S
∗ The membrane element cannot be selected for FGH100.
Element classification Note)
Port size 03 04 06 10
Rc3/8 Rc1/2 Rc3/4 Rc1
Symbol
J D
Element HEPO 2 Membrane
Note) Refer to pages 806 to 809 for details about specifications, models, dimensions, etc. regarding the elements.
Specifications Model
FGH100
FGH200
FGH300
1(125)
1(250)
1(500)
Number of built-in elements (element length) (mm) Operating pressure Operating temperature
MAX. 80°C (Not above the boiling point)
FGE
Each kind of fluid (See the table of applicable fluids on pages 799 and 800)
Applicable fluid Port size (Rc) Material
FGD
MAX. 1 MPa
FGG
3/8, 1/2, 3/4, 1
FGA
Stainless steel 316 (Electrolytic polishing)
Housing
FGB
PTFE
Seals Mass (kg)
2.6
3.2
4.3
Internal capacity (l)
1.0
1.8
3.3
FGC FGF
Accessories for FGH 100-300 (Option)
FGH
Tool for tightening clamp rings Description
Part number
Tightening tool
FTT410S
EJ ED FQ1 FN EB첸 ES첸
801
Series FGH Flow Rate Characteristics of Built-in HEPO 2 Elements (Fluid: water, temperature: 20°C) Series FGH100 FGH100-03 {Rc3/8}
Series FGH200 FGH200-03 {Rc3/8}
0.005
30
50
70
0.01
0.005
0.001 10
100
Flow rate (l/min)
50
70
30
50
70
50
0.01
0.005
50
70
Flow rate (l/min)
100
30
50
70
100
Flow rate (l/min)
FGH300-10 {Rc1} 0.05
0.01
0.005
0.001 10
100
0.005
0.001 10
70 100
0.05
Pressure drop (MPa)
Pressure drop (MPa)
30
FGH200-10 {Rc1}
0.05
70
0.01
Flow rate (l/min)
FGH100-10 {Rc1}
50
0.05
0.005
0.001 10
100
30
Flow rate (l/min)
FGH300-06 {Rc3/4}
0.01
Flow rate (l/min)
30
0.005
0.001 10
70 100
Pressure drop (MPa)
Pressure drop (MPa)
Pressure drop (MPa)
0.005
802
50
0.05
0.01
0.001 10
30
FGH200-06 {Rc3/4}
0.05
100
0.01
Flow rate (l/min)
FGH100-06 {Rc3/4}
70
0.05
0.005
Flow rate (l/min)
50
FGH300-04 {Rc1/2}
0.01
0.001 10
100
30
Flow rate (l/min)
Pressure drop (MPa)
Pressure drop (MPa)
Pressure drop (MPa)
0.005
30
0.005
0.001 10
70 100
0.05
0.01
0.001 10
50
FGH200-04 {Rc1/2}
0.05
013 (13 µm)
0.01
Flow rate (l/min)
FGH100-04 {Rc1/2}
0.001 10
30
Pressure drop (MPa)
0.001 10
006 (6 µm)
0.05
Pressure drop (MPa)
0.01
004 (4 µm)
Series FGH300 FGH300-03 {Rc3/8}
0.05
Pressure drop (MPa)
Pressure drop (MPa)
0.05
002 (2 µm)
30
50
70 100
Flow rate (l/min)
0.01
0.005
0.001 10
30
50
70
Flow rate (l/min)
100
High Precision Filter for Liquids
Series FGH
Flow Rate Characteristics of Built-in Membrane Elements (Fluid: water, temperature: 20°C) Series FGH200 FGH200-04 {Rc1/2} Pressure drop (MPa)
X20 (0.2 µm) X40 (0.4 µm)
Pressure drop (MPa)
FGH200-03 {Rc3/8}
Flow rate (l/min)
FGH200-10 {Rc1} Pressure drop (MPa)
Pressure drop (MPa)
FGH200-06 {Rc3/4}
Flow rate (l/min)
Flow rate (l/min)
Flow rate (l/min)
Series FGH300 FGH300-04 {Rc1/2}
Pressure drop (MPa)
FGD FGE FGG FGA FGB
Flow rate (l/min)
FGH300-06 {Rc3/4}
Flow rate (l/min)
FGC
FGH300-10 {Rc1}
FGF FGH
Pressure drop (MPa)
Pressure drop (MPa)
X20 (0.2 µm) X40 (0.4 µm)
Pressure drop (MPa)
FGH300-03 {Rc3/8}
EJ ED FQ1 FN
Flow rate (l/min)
EB첸 ES첸
Flow rate (l/min)
803
Series FGH Construction / Spare Parts and Seal List
Hexagon head bolt
w Seal
Cover
AIRVENT
q Gasket
Clamp ring
Name plate
Element
Case
e Seal
Plug
Spare Parts and Seal List No.
Description
Part number
FGH100
FGH200
1
Gasket
AL-58S
2
Seal
AL-43S
3
Seal
AL-53S
FGH300
Note) Use each one of the above parts for each filter unit.
804
High Precision Filter for Liquids
Series FGH
Dimensions
2 x Rc
M6 x 1
2 x Rc
FGH300
M6 x 1
FGH100/200
FGD FGE FGG
FGB Pull-out dimension
Pull-out dimension
FGA
FGC FGF FGH
Dimensions
EJ
Model
Element length
FGH100
ø70 x L117
FGH200
ø70 x L246
FGH300
ø70 x L496
Port size (Rc)
A
3/8, 1/2
235
3/4, 1
240
3/8, 1/2
364
3/4, 1
369
3/8, 1/2
615
3/4, 1
620
B 211 340 591
ED FQ1 FN EB첸 ES첸
805
HEPO2Element for Series FGH
EJ
Series
Specifications EJ첸S-002
EJ첸S-004
EJ첸S-006
EJ첸S-013
2
4
6
13
117 mm
1890
2310
2090
2490
246 mm
4250
5200
4700
5600
496 mm
8500
10400
9400
11200
Model
Filtration area (cm2)
Length
Filtration accuracy (Filtration efficiency 99%)
Heat resistant temperature (°C)
80
Filter media Material
Polyester
Reinforcement material
Polypropylene
Others
Polypropylene
Pressure resistance
0.5 MPa at 20°C, 0.125 MPa at 80°C
Note) See "How to Order" below for items represented by 첸.
How to Order Elements
EJ 701 S
002 T Element seal
Element classification EJ
Element size symbol 701 For FGH100 801 For FGH200 901 For FGH300
806
T
HEPO 2
PTFE
Filtration accuracy (Filtration efficiency 99%) 002 004 006 013
2 µm 4 µm 6 µm 13 µm
HEPO 2 Element for Series FGH
Series
EJ
Construction
EJ701S, 801S, 901S
Reinforcement material
Filter media
Dimensions
A
FGD
B
FGE FGG ø53
ø70
FGA FGB FGC FGF FGH Element Dimensions
EJ
Model
A
B
Applicable container
EJ701S-첸T EJ801S-첸T EJ901S-첸T
157
117
FGH100
286
246
FGH200
536
496
FGH300
ED FQ1 FN EB ES
807
Membrane Element for Series FGH
ED
Series
Specifications ED첸S-X20
ED첸S-X40
Filtration accuracy (Filtration efficiency 99.9%) Note 1)
0.2
0.4
247 mm
4,000
6,200
495 mm
8,000
Filtration area (cm2)
Length
Model
12,400
Heat resistant temperature (°C)
80 Polyether sulfone
Cellulose acetate & polyester
Reinforcement material
Polypropylene
Polyester
Others
Polypropylene
Polypropylene
Filter media Material
Pressure resistance
0.5 MPa at 20°C, 0.125 MPa at 80°C
Resistivity recovery Note 2) Others
60 min at 10 l/min
—
100 l/4000 cm2 Pure water cleaning
—
Note 1) Filtration accuracy: tested with ultrapure water, flow rate at ∆P = 0.01 MPa. Note 2) Resistivity recovery: time taken to recover to 18 MΩ·cm with ultrapure water. Note 3) See “How to Order” below for items represented by 첸.
How to Order Elements
ED 801 S
X20 T
Element classification
Element seal T
ED Membrane
Element size symbol 801 For FGH200 901 For FGH300 ∗ Cannot be used for FGH100.
808
PTFE
Filtration accuracy (Filtration efficiency 99.9%) X20 X40
0.2 µm 0.4 µm
Membrane Element for Series FGH Series
ED
Construction
0.2 µm
0.4 µm
ED첸S-X20
ED첸S-X40
Reinforcement material
Reinforcement material
Filter media
0.2 µm
Filter media
0.4 µm
Dimensions
FGD FGE FGG FGA FGB FGC FGF FGH Element Dimensions
EJ
Model
A
B
Applicable container
ED801S-X첸T ED901S-X첸T
285
247
FGH200
533
495
FGH300
ED FQ1 FN EB ES
809