High Precision Filter for Liquids Series FGH

Filtration efficiency: 99% or more HEPO2element Filtration accuracy: 2, 4, 6 or 13 µm (Filtration efficiency 99%)

Membrane element Filtration accuracy: 0.2 or 0.4 µm (Filtration efficiency 99.9%)

FGD FGE FGG FGA FGB FGC FGF FGH EJ ED FQ1 FN EB첸 ES첸

797

High Precision Filter for Liquids

Series FGH Filtration efficiency: 99% or more Prevents particle generation in the housing Internal particle generation is eliminated by using stainless steel 316 and PTFE for the wetted material and adopting a clamp ring system.

High cleanliness and high quality High cleanliness and high quality are ensured by manufacturing elements in a clean room (Class M 5.5 (ISO Class 7)∗) and performing 100% inspection of integrity. ∗ Per FED-STD 209E (ISO14644-1).

Prevents residual liquid accumulation in the case A simple structure prevents the residual liquid from accumulating in the case.

Application examples Ultrasonic cleaning machine • Manufacture of electric and electronic industrial components • Manufacture of semiconductor-related components Dual chamber ultrasonic cleaning machine

Jet cleaning machine • Camera, lens and bearing for

Triple chamber ultrasonic cleaning machine

manufacture of highprecision processing components • Nozzle for manufacture of automobile components

Series FGH

Cleaning

Cleaning

Steam Dipping Ultrasonic chamber chamber

Ultrasonic Boiling chamber chamber

Pre-filter

798

Series FGH

Series FGH

Steam chamber

Clean tank

Dirty tank

Clean tank

Dirty tank

Pre-filter Pre-filter

Series FGH

Pre-filter

HEPO1 1Element Filtration accuracy: 2, 4, 6 or 13 µ m (Filtration efficiency 99%)

High precision filtration: 99% or more High accuracy filtration is achieved by using a HEPO1 1element with filtration accuracy of 2, 4, 6 or 13 µm (Filtration efficiency 99%). Schematic diagram of filtration efficiency data measuring circuit

m EJ-2 µ

Dust feeder

µm

100 99

EJ-4

Tank Differential pressure gauge

EJ-13

95

µm

EJ-6 µm

Initial filtration efficiency (%)

[Test conditions] Fluid: water / Test dust: ACFTD / Flow rate: 35 l/min Dust concentration: 10 mg/l / Temperature: 20°C Element: EJ801S

Pressure gauge

90 0

2

4

6

8

Flow meter

10

12 13 14

Downstream side sampling

Pump Upstream side sampling

Particle diameter (µm)

Measuring filter

Automatic particle measuring instrument

No outflow of fibers or elution of components from the filter media There is almost no outflow of fibers or elution of components from the filter media because it uses ultrafine and long polyester fiber nonwoven fabric with no binder.

FGD

Applicable for a wide range of liquids

FGE

The element is applicable for a wide range of liquids because it adopts PTFE seals.

FGA

FGG

FGB

Applicable fluids Classification Water

Alcohol

Hydrocarbon Ester Oil/fuel oil Others

FGC

Description Tap water, industrial water, distilled water, ion-exchange water, pure water, ultrapure water Isopropyl alcohol (IPA, propanol) Ethyl alcohol (ethanol) Methyl alcohol (methanol) Butyl alcohol (butanol) Ethylene glycol

FGF FGH EJ

Petroleum ether, petroleum benzene

ED

Methyl acetate, ethyl acetate, methyl acrylate Hydraulic fluid, lubricating oil, light oil, kerosene, cutting oil, grinding oil

FQ1

Ammonia (10% solvent), ethyl ether, isopropyl ether

FN EB첸 ES첸

799

Membrane Element Filtration accuracy: 0.2 or 0.4 µ m (Filtration efficiency 99.9%)

High precision filtration: 99.9% or more High accuracy filtration is achieved by using a membrane element with filtration accuracy of 0.2 or 0.4 µm (Filtration efficiency 99.9%) Schematic diagram of filtration efficiency data measuring circuit

Test conditions Fluid: pure water Contaminant: polystyrene latex particles Particle measuring method: 0.2 µm automatic particle measuring instrument Filtration Particle Number of particles (/10 ml) Filtration rating diameter efficiency (µm) Upstream side Downstream side (µm) (%) 0.208 99.999 146380 1 0.2 0.4

0.309

103957

2727

97.4

0.41

95019

29.9

99.97

Tank

Differential Flow meter pressure gauge Pressure gauge Downstream side sampling Measuring filter

Pump Upstream side sampling

Automatic particle measuring instrument

Easy to handle There is no need of hydrophilic treatment using IPA and the like, because the element uses a hydrophilic filter media.

Long filtration life The element has a long filtration life because of the high porosity and low pressure drop of the filter media. The dust retention amount of the 0.2 µm version is 90 g.

Pre-rinsed with ultrapure water (0.2 µm version only)

Resistivity recovery characteristics

Classification Water

Alkalis Aldehyde Alcohol Ether Hydrocarbon

0.2 µm

0.4 µm

Tap water, ultrapure water, ion-exchange water, distilled water Sodium hydroxide (10%) Potassium hydroxide (10%) Ammonia water (28%)

Ammonia water (28%)∗

Formaldehyde (35%)

Formaldehyde (35%)∗

Methyl alcohol, butyl alcohol, ethyl alcohol, propyl alcohol Dioxane∗ Ethyl ether∗ Ethyl ether∗ Benzene∗, toluene∗, Benzene∗ hexane∗, xylene∗ Hexane∗

∗ Can be used depending on temperature conditions (please consult with SMC).

[Measuring conditions] Element used: ED801S-X20 Element size: ø70 x L247

Filtration area: 4000 cm2 Fluid: Ultrapure water (resistivity value 17.9 MΩ·cm) Flow rate: 10l/min

20 18

Resistivity value (MΩ·cm)

Applicable fluids

16 14 12 10 8 0

0

5

10 15 20 25 30 35 40 45 50 55 60

Flow time (min) ∗ Per JISK3834

800

High Precision Filter for Liquids

Series FGH How to Order

FGH 100

03

J 002 T

High precision filter for liquids

Element seal Symbol Material PTFE T

Filtration accuracy

Body size Symbol Element length l117 100 l246 200 l496 300

Symbol Filtration accuracy Applicable for: Applicable body 2 µm 002 Filtration 4 µm 004 HEPO 2 FGH100 to 300 efficiency 6 µm 006 99% 13 µm 013 X20 0.2 µm Filtration efficiency Membrane FGH200 to 300 X40 0.4 µm 99.9%

Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S

∗ The membrane element cannot be selected for FGH100.

Element classification Note)

Port size 03 04 06 10

Rc3/8 Rc1/2 Rc3/4 Rc1

Symbol

J D

Element HEPO 2 Membrane

Note) Refer to pages 806 to 809 for details about specifications, models, dimensions, etc. regarding the elements.

Specifications Model

FGH100

FGH200

FGH300

1(125)

1(250)

1(500)

Number of built-in elements (element length) (mm) Operating pressure Operating temperature

MAX. 80°C (Not above the boiling point)

FGE

Each kind of fluid (See the table of applicable fluids on pages 799 and 800)

Applicable fluid Port size (Rc) Material

FGD

MAX. 1 MPa

FGG

3/8, 1/2, 3/4, 1

FGA

Stainless steel 316 (Electrolytic polishing)

Housing

FGB

PTFE

Seals Mass (kg)

2.6

3.2

4.3

Internal capacity (l)

1.0

1.8

3.3

FGC FGF

Accessories for FGH 100-300 (Option)

FGH

Tool for tightening clamp rings Description

Part number

Tightening tool

FTT410S

EJ ED FQ1 FN EB첸 ES첸

801

Series FGH Flow Rate Characteristics of Built-in HEPO 2 Elements (Fluid: water, temperature: 20°C) Series FGH100 FGH100-03 {Rc3/8}

Series FGH200 FGH200-03 {Rc3/8}

0.005

30

50

70

0.01

0.005

0.001 10

100

Flow rate (l/min)

50

70

30

50

70

50

0.01

0.005

50

70

Flow rate (l/min)

100

30

50

70

100

Flow rate (l/min)

FGH300-10 {Rc1} 0.05

0.01

0.005

0.001 10

100

0.005

0.001 10

70 100

0.05

Pressure drop (MPa)

Pressure drop (MPa)

30

FGH200-10 {Rc1}

0.05

70

0.01

Flow rate (l/min)

FGH100-10 {Rc1}

50

0.05

0.005

0.001 10

100

30

Flow rate (l/min)

FGH300-06 {Rc3/4}

0.01

Flow rate (l/min)

30

0.005

0.001 10

70 100

Pressure drop (MPa)

Pressure drop (MPa)

Pressure drop (MPa)

0.005

802

50

0.05

0.01

0.001 10

30

FGH200-06 {Rc3/4}

0.05

100

0.01

Flow rate (l/min)

FGH100-06 {Rc3/4}

70

0.05

0.005

Flow rate (l/min)

50

FGH300-04 {Rc1/2}

0.01

0.001 10

100

30

Flow rate (l/min)

Pressure drop (MPa)

Pressure drop (MPa)

Pressure drop (MPa)

0.005

30

0.005

0.001 10

70 100

0.05

0.01

0.001 10

50

FGH200-04 {Rc1/2}

0.05

013 (13 µm)

0.01

Flow rate (l/min)

FGH100-04 {Rc1/2}

0.001 10

30

Pressure drop (MPa)

0.001 10

006 (6 µm)

0.05

Pressure drop (MPa)

0.01

004 (4 µm)

Series FGH300 FGH300-03 {Rc3/8}

0.05

Pressure drop (MPa)

Pressure drop (MPa)

0.05

002 (2 µm)

30

50

70 100

Flow rate (l/min)

0.01

0.005

0.001 10

30

50

70

Flow rate (l/min)

100

High Precision Filter for Liquids

Series FGH

Flow Rate Characteristics of Built-in Membrane Elements (Fluid: water, temperature: 20°C) Series FGH200 FGH200-04 {Rc1/2} Pressure drop (MPa)

X20 (0.2 µm) X40 (0.4 µm)

Pressure drop (MPa)

FGH200-03 {Rc3/8}

Flow rate (l/min)

FGH200-10 {Rc1} Pressure drop (MPa)

Pressure drop (MPa)

FGH200-06 {Rc3/4}

Flow rate (l/min)

Flow rate (l/min)

Flow rate (l/min)

Series FGH300 FGH300-04 {Rc1/2}

Pressure drop (MPa)

FGD FGE FGG FGA FGB

Flow rate (l/min)

FGH300-06 {Rc3/4}

Flow rate (l/min)

FGC

FGH300-10 {Rc1}

FGF FGH

Pressure drop (MPa)

Pressure drop (MPa)

X20 (0.2 µm) X40 (0.4 µm)

Pressure drop (MPa)

FGH300-03 {Rc3/8}

EJ ED FQ1 FN

Flow rate (l/min)

EB첸 ES첸

Flow rate (l/min)

803

Series FGH Construction / Spare Parts and Seal List

Hexagon head bolt

w Seal

Cover

AIRVENT

q Gasket

Clamp ring

Name plate

Element

Case

e Seal

Plug

Spare Parts and Seal List No.

Description

Part number

FGH100

FGH200

1

Gasket

AL-58S

2

Seal

AL-43S

3

Seal

AL-53S

FGH300

Note) Use each one of the above parts for each filter unit.

804

High Precision Filter for Liquids

Series FGH

Dimensions

2 x Rc

M6 x 1

2 x Rc

FGH300

M6 x 1

FGH100/200

FGD FGE FGG

FGB Pull-out dimension

Pull-out dimension

FGA

FGC FGF FGH

Dimensions

EJ

Model

Element length

FGH100

ø70 x L117

FGH200

ø70 x L246

FGH300

ø70 x L496

Port size (Rc)

A

3/8, 1/2

235

3/4, 1

240

3/8, 1/2

364

3/4, 1

369

3/8, 1/2

615

3/4, 1

620

B 211 340 591

ED FQ1 FN EB첸 ES첸

805

HEPO2Element for Series FGH

EJ

Series

Specifications EJ첸S-002

EJ첸S-004

EJ첸S-006

EJ첸S-013

2

4

6

13

117 mm

1890

2310

2090

2490

246 mm

4250

5200

4700

5600

496 mm

8500

10400

9400

11200

Model

Filtration area (cm2)

Length

Filtration accuracy (Filtration efficiency 99%)

Heat resistant temperature (°C)

80

Filter media Material

Polyester

Reinforcement material

Polypropylene

Others

Polypropylene

Pressure resistance

0.5 MPa at 20°C, 0.125 MPa at 80°C

Note) See "How to Order" below for items represented by 첸.

How to Order Elements

EJ 701 S

002 T Element seal

Element classification EJ

Element size symbol 701 For FGH100 801 For FGH200 901 For FGH300

806

T

HEPO 2

PTFE

Filtration accuracy (Filtration efficiency 99%) 002 004 006 013

2 µm 4 µm 6 µm 13 µm

HEPO 2 Element for Series FGH

Series

EJ

Construction

EJ701S, 801S, 901S

Reinforcement material

Filter media

Dimensions

A

FGD

B

FGE FGG ø53

ø70

FGA FGB FGC FGF FGH Element Dimensions

EJ

Model

A

B

Applicable container

EJ701S-첸T EJ801S-첸T EJ901S-첸T

157

117

FGH100

286

246

FGH200

536

496

FGH300

ED FQ1 FN EB ES

807

Membrane Element for Series FGH

ED

Series

Specifications ED첸S-X20

ED첸S-X40

Filtration accuracy (Filtration efficiency 99.9%) Note 1)

0.2

0.4

247 mm

4,000

6,200

495 mm

8,000

Filtration area (cm2)

Length

Model

12,400

Heat resistant temperature (°C)

80 Polyether sulfone

Cellulose acetate & polyester

Reinforcement material

Polypropylene

Polyester

Others

Polypropylene

Polypropylene

Filter media Material

Pressure resistance

0.5 MPa at 20°C, 0.125 MPa at 80°C

Resistivity recovery Note 2) Others

60 min at 10 l/min



100 l/4000 cm2 Pure water cleaning



Note 1) Filtration accuracy: tested with ultrapure water, flow rate at ∆P = 0.01 MPa. Note 2) Resistivity recovery: time taken to recover to 18 MΩ·cm with ultrapure water. Note 3) See “How to Order” below for items represented by 첸.

How to Order Elements

ED 801 S

X20 T

Element classification

Element seal T

ED Membrane

Element size symbol 801 For FGH200 901 For FGH300 ∗ Cannot be used for FGH100.

808

PTFE

Filtration accuracy (Filtration efficiency 99.9%) X20 X40

0.2 µm 0.4 µm

Membrane Element for Series FGH Series

ED

Construction

0.2 µm

0.4 µm

ED첸S-X20

ED첸S-X40

Reinforcement material

Reinforcement material

Filter media

0.2 µm

Filter media

0.4 µm

Dimensions

FGD FGE FGG FGA FGB FGC FGF FGH Element Dimensions

EJ

Model

A

B

Applicable container

ED801S-X첸T ED901S-X첸T

285

247

FGH200

533

495

FGH300

ED FQ1 FN EB ES

809