Low Vacuum Pump
Vacuum Pump Option Parts Many user-friendly optional parts are available from ULVAC for comfortable operations of vacuum pumps. These traps and vacuum piping parts are used according to application.
DS-40
OF-2
Va c uum Pump Opt i on Part s
Oil Filtration Oil Filtration System OF series Vacuum Piping Parts Vacuum Flanges
Pre-Stage Traps Keeping particle from coming into vacuum pumps, and preventing decrease of vacuum pumps lifetime. Oil Filtration Capable of adsorptive removal for particles in vacuum pump oil, acid gases or reactive gases. Vacuum Flanges and Piping Parts Various vacuum flanges and piping parts are available. Useful for connecting to equipments.
Low Vacuum Pump
Pre-Stage Traps Dust Filter, DS series Particle Adsorption Trap TRO series Oil Trap OT series Cold Trap CT series Water Cooling Trap WT series
A p p lic a tio n s
Vacuum Pump Option Parts Accessories for Vacuum Pumps OF Series
Oil Filtration System
Oil rotary pumps used in CVD and etching processes routinely collect contaminants inside the pump, such as reaction products, unreacted gases such as oxygen, and other corrosive substances. The resulting oxidation and deterioration of the operating oil hinders pump operation and quite often can lead to mechanical breakdown of the pump. OF series oil filtration system extend the useful lifespan of the pump operating oil and thereby help to lengthen the time between the required maintenance intervals of these pumps.
F e a tu re s OF-2 The OF-2 model is for CVD processes and other processes where large quantities of particles are generated. The unit reliably removes particles in the vacuum pump oil. The DHC (Dust Haul Capability) of the filter element is extremely large, extending the pump oil lifespan while increasing the time between required maintenance intervals.OF series oil filtration system extend the useful lifespan of the pump operating oil and thereby help to lengthen the time between the required maintenance intervals of these pumps. OF-3 The OF-3 model is for dry etching processes, where large volumes of oxygen are pumped, and for processes where strongly reactive gases are pumped. The unit is very effective in extending the pump oil lifespan. The unit consists of a particle filter element for removing sludge and a neutralization element for absorbing and removing oxygen and reactive gases.
OF-2
S p e c ific a tio n s Item Captured particle size
Model
OF-2 OF-3 1μ≦ 1μ≦ (Pre-stage paper filter) (1) Dust: 600g 1200g (600g per element) (2) Oxygen: 500mL 0.4 to 0.45 MPa (Gauge pressure) ＊1 7 6.5 3.0 ≦ 1m (2 hoses) R3/8 (PT 3/8) for both IN and OUT Main unit: Stainless steel 304, Gasket: FPM 100V, 50/60Hz 0.2kW
Capture capacity Element replacement pressure Required oil flow L Circulating oil volume L/min Connection hose length ＊2 Coupling diameter Material
OF-3
Power ＊
1 0.4 to 0.45 MPa = 4.0 to 4.5 kg/cm 2 ＊ 2 Hose length cannot be changed.
D im e n s io n s 550 420 218
(unit: mm)
550 115
216
102.5
68
100 200
100
OF-3 96.2
100 200
OF-2
580 610
Electromagnetic switch Pressure gauge
100
From rotary pump drain port 3/8B (Connection port female coupler 3S) Note) Maintenance space is 610×200×600 (mm)
2
trochiod pump AC100V 0.2 kW
Nameplate Electromagnetic switch
Pressure gauge
100
tro chiod pump AC100 V 0.2 kW
Nameplate
4-dia. 10
(554)
To rotary pump oil return port 3/8B (Connection port female coupler 3S)
(551)
580 610
4-dia. 10
To rotary pump oil return port 3/8B (Connection port female coupler 3S) Note) Maintenance space is 610×200×600 (mm)
From rotary pump drain port 3/8B (Connection port female coupler 3S)
Accessories for Vacuum Pumps Particle Adsorption Trap
TRO Series
TRO series traps are effective in CVD and other processes where a large amount particle is generated. Particles generated in a process are trapped when the TRO unit is placed in-line between the process equipment and the oil rotary vacuum pump. Since a special trap method using oil is used, particles can be adsorbed for an extended period of time with no loss of pumping conductance. In addition, through the use of special oil with a low vapor pressure, back streaming of oil from the oil rotary pump to the chamber is prevented. As a result, process quality and productivity can be greatly improved.
F e a tu re s Little conductance loss There is no conductance loss accompanying the adsorption of particles as with conventional filter particle traps. This particle trap does not contain a filter element which can become clogged. High corrosion resistance Stainless steel and fluoride rubber, with their excellent corrosion resistance, are used in the exhaust gas section. Easy maintenance Oil replacement is the only maintenance required. The particle adsorbing oil can be observed through a view port, and a ball valve is included in the exhaust port as standard equipment. Extension of pump maintenance period The oil replacement period and the overhaul period of the oil rotary vacuum pump are both extended. (Example: More than a 4 fold increase for CVD processes) Small Oil back streaming Compared to use of an oil rotary vacuum pump alone, oil back streaming to the chamber is reduced by more than 50%.
TRO-100
Di mens i on Tabl e TRO-80 600 440 190 200 370 145 200 200 620 50 195 VG80 VG80
TRO-100 740 550 240 320 470 195 250 260 730 55 240 VG100 VG100
Item Model Oil capacity L Recommended oil ＊1 Suction port diameter JIS B 2290 Exhaust port diameter JIS B 2290 Applicable pump L/min capacity Applicable pump examples Weight kg Electric motor used ＊2 W Material
TRO-50 2.5 Corresponds to VG50 Corresponds to VG50
TRO-80 8 ULVOIL R-4 Corresponds to VG80 Corresponds to VG80
TRO-100 19 Corresponds to VG100 Corresponds to VG100
≦1600
≦4000
≦7000
EC Series, VS Series, PKS-070 PKS-016 PKS-030 30 75 130 25 60 90 Main unit: Stainless steel 304, Gasket: FPM
＊
1 Optional oils: ULVOIL Super R-7500, ULVOIL D-11 2 AC200V, 3 phase, 50/60Hz
＊
D im e n s io n s (unit: mm) L F
Hanging hole (TRO-50 has no mounting holes)
G
Oil supply port dia. 18
A
M
B E
(K) Oil gauge
J
TRO-50 390 290 135 190 260 115 120 140 455 40 140 VG50 VG50
C
A B C D E F G H I J K L M
S p e c ific a tio n s
(unit: mm)
D
4-dia. 12
H
I Oil drain valve (1/2B)
3
Vacuum Pump Option Parts Accessories for Vacuum Pumps
Vacuum Components
Vacuum Components
Pre-Stage Traps
DS Series Dust Filter Applications
Dimensions
・Pumping (dry condition) and vacuum adsorption of gases containing particles with diameters of 10μm or more. ・Transport: Vacuum molding, vacuum packing, vacuum melting furnace,
Dimension Table Model DS-20 DS-25 DS-40 DS-50 DS-2 DS-3 DS-4
DS-40
＊
Applicable models PVD-180 PVD-360 VD301, VD401 VD601, VD901 PKS-016 PKS-030 PKS-070
B
90
90
140 200 220
D Oil rotary vacuum pump (unit: mm)
Attachment Diagram
(unit: mm)
A
195 290 530 583
C VG20 VG25 VG40 VG50 VG50 VG80 VG100
C
B
and vacuum heating furnace. Structure: An easily replaced filter element is contained inside the unit. The element can be cleaned and reused. Material: Stainless steel Applicable models: ULVAC oil rotary vacuum pumps
A
DS
D VF20 VF25 VF40 VF50 VF50 VF80 VF100
(unit: mm)
IN
RP
The unit is connected above the suction piping (RF series) for the PVD-180, PVD-360 models.
OT Series Oil Trap Applications
Dimensions
・Continuous pumping at high intake
pressures of gases containing particles.
B
Oil rotary vacuum G pump
C
F
D
generated in chemical reaction processes such as CVD, etc. Material: Stainless steel Oil: Low vapor pressure vacuum pump oil (ULVOIL R-4) Applicable models: VD series, PKS series
A
E H
・Pumping of gases containing materials
Dimension Table (unit: mm)
Sight glass I
Oil drain
Model OT-50 OT-80 A 150 160 B 83 106 C 300 366 D 490 556 E 180 180 F dia. 140 dia. 165 G VF50 VF80 Corresponds Corresponds H to VG50 to VG80 I G1 G1
Attachment Diagram
OT-100 185 121 401 591 185 dia. 216 VF100 Corresponds to VG100 G1
(unit: mm) IN
OUT
RP
CT Series Cold Trap Applications
Dimensions
・Continuous pumping at high intake
(unit: mm)
A
pressures of gases containing particles.
C
B
・Pumping of gases containing a large
amount of water Material: Stainless steel Applicable models: ULVAC oil rotary vacuum pumps
Attachment Diagram
Dimension Table Model A B C D
E
E ＊
D Oil rotary vacuum pump
(unit: mm)
CT-25 CT-40 CT-50 CT-80 CT-100 100 110 125 140 155 96 88 99 114 131 276 288 314 364 396 Corresponds Corresponds Corresponds Corresponds Corresponds to VF25 to VF40 to VF50 to VF80 to VF100 VG25 VG40 VG50 VG80 VG100
bypass piping
CT
IN
OUT RP
The main use of the CT series is to reduce the back flow of the oil rotation vacuum pump. When the atmosphere in the state of high pressure is exhausted for a long time directly by way of CT., the consumption of the liquid nitrogen becomes violent. Please install the by-pass piping as shown in figure, exhaust it via CT at high pressure and exhaust directly after pressure lowers.
WT Series Water Cooling Trap Applications
Dimensions
・Pumping of gases with saturation vapor
A
4
D
Oil rotary vacuum pump
dia.F
E
Cooling water outlet Cooling water inlet
G
Attachment Diagram
Dimension Table (unit: mm)
G
H
C
pressures of 2660 to 3990Pa or more. ・Continuous pumping of large volumes of high temperature gases Material: SS (plated), Stainless steel Applicable models: ULVAC oil rotary vacuum pumps
B
Drain plug
Model WT-25 WT-50 A 93 150 B 100 150 C 100 100 D 160 175 E (550) (550) F dia. 60.5 dia. 114 G VG25 VG50 H VG25 VG50 I dia. 120 dia. 185
WT-80 150 150 140 250 (705) dia. 165 VG80 VG80 dia. 235
WT-100 200 200 180 290 (815) dia. 216 VG100 VG100 dia. 300
(unit: mm) IN
OUT
RP WT
Vacuum Components
Vacuum Components
Vacuum Piping Parts
RF Series Rotatable Type Suction Piping with Flange Applications models
dia. A
VG
・Matching suction ports with helium
RF-1 RF-2 RF-3 RF-4 RF-5 RF-6
dia. 80
B
H＊
Model
72 235 72
315 478 315 419 425 528 509 515
RF-7 RF-8 RF-9
220 dia. 90
285 310
Applicable models Dimensions Model PVD-180 Model PVD-360 Model PVD-180 with TMX Model PVD-360 with TMX Model D-330K with TMX Model D-330DK with TMX Model D-650K with TMX Model D-650DK with TMX Model D-950K with TMX Model D-950DK with TMX
RF-10 RF-11
Standard flange according to JIS B2290 Refer to the attachment diagram for H
RF-12 ＊ ＊
Exhaust
Suction
Exhaust
Suction
B
C
H＊
dia. 80 dia. 90 dia. 80
PF3/4" PF1"
50 80
314 344
dia. 90
507 383 (486) 389 (492) 383 (486) 389 (492) 383 (491) 389 (497)
PF1/2" 50
dia. 105 dia. 120
PF2"
RF2, 5, 6
RP
TMX
From bottom of base All suction piping is threaded.
H
M
M From bottom of base
Suction
Suction
RF7, 8
H
RP
RF9-12
With oil mist trap
TMX
(Floor)
A
Attachment Diagram
RF1, 3, 4
M
(unit: mm)
Standard flange according to JIS B2290 Refer to the attachment diagram for H
Attachment Diagram With oil mist trap
O-ring
B
Dimension Table
H
RP
RP
M
From floor All exhaust piping is screwed.
From floor
Pump Base with Handles and Casters Applicable models
・PVD series and DK series pumps (Only the casters are attached for
directly coupled oil rotary vacuum pumps.)
Dimension Table Applicable models PVD-180 (B) PVD-360 (B), D-330K D-650K, D-950K
(unit: mm)
H 25 25 50
Dimensions
H
＊
A
(unit: mm)
dia. A
VG
recovery models Applicable models: PVD-180, PVD-360 Specifications: ・Rotating flange section (with gasket groove) ・Free flange attachment direction with gasket (bolts and nuts are not included) Material: Stainless steel, Gasket (FPM)
(unit: mm)
H
＊
(unit: mm)
PF 3/4 (PVD-180) PF 1 (PVD-360)
Dimension Table
Dimensions
・General evacuation ・Matching exhaust ports with helium
B
recovery models Applicable models: PVD-180, PVD-360 Specifications: ・Rotating flange section (with gasket groove) ・Free flange attachment direction with gasket (bolts and nuts are not included) Material: Stainless steel, Gasket (FPM)
Applicable models Dimensions Model PVD-180 Model PVD-180 with TMX Model PVD-360 Model D-330K Model D-330DK Model PVD-360 with TMX Model D-330K with TMX Model D-330DK with TMX
Applications
Dimensions
・Flange joints for PVD-180, PVD-360
Model
RF Series Rotatable Type Exhaust Piping with Flange
C
Accessories for Vacuum Pumps
5
Vacuum Pump Option Parts Accessories for Vacuum Pumps
Vacuum Components
Vacuum Components
Vacuum Piping Parts
TP Series Short Piping with Gauge Port Material: Stainless steel, Gasket (FPM)
Dimension Table
Dimensions (unit: mm) dia.18 gauge port (standard) VG
dia.D 80 90 105 120
dia.d 27.2 34.0 48.6 60.5
dia.p 60 70 85 100
t
Applicable models PVD-180 (B) PVD-360 (B) VD301, VD401 VD601, VD901
8 10
4-dia.10 t
Leak port 100
t
Part number TP-20 TP-25 TP-40 TP-50
dia. D
dia. d
dia. d
VF dia.18
(unit: mm)
I Piping Material: Stainless steel, Gasket (FPM)
Dimensions dia. D1
VF
Dimension Table
4-dia.10
(unit: mm)
Part number I-VF20 × VG20 VG25 VG40 VG50 I-VF25 × VG25 VG40 VG50 I-VF40 × VG40 VG50 I-VF50 × VG50
A
dia. d VG
dia.D2
dia. D1
(unit: mm)
dia. D2 80 90 105 120 90 105 120 105 120 120
80
90 105 120
dia. d
A
27.2 100
34.0 48.6 60.5
L/T Piping Material: Stainless steel, Gasket (FPM)
Dimension Table
Dimensions A
T
dia. D
VG
dia.d dia.d
dia
VF
VG
B T type
A
T
.d
dia. D
A
VG 4-dia.10
(unit: mm)
VF dia. D L type
BJ Series Bellows Joints
dia. d 27.2 34.0 48.6 60.5
A 50 55
Part number L-20 L-25 L-40 L-50
dia. D 80 90 105 120
dia. d 27.2 34.0 48.6 60.5
A 60 65 80 90
B 100 130 150
60
T 8 10
Part number R-5 R-9 R-15 R-18 R-25
A
dia. d
dia. D
4.5 9 15 18 25
18 24 36 42 55
(unit: mm)
(unit: mm)
Applicable piping 3/8B 1000 1/2B 3/4B 1B
dia.D
VG
VF
dia. D 90 105 120 160 185 235
Dimension Table
(unit: mm)
(unit: mm)
Dimensions
L
dia.d
A 65 90 105 110 110 100
dia. D 80 90 105 120
Material: Crude rubber
Dimensions
dia. D
Part number BJ-25A BJ-40A BJ-50A BJ-80A BJ-100A BJ-150A
Part number T-20 T-25 T-40 T-50
Vacuum Rubber Hose
Material: Stainless steel, gasket (FPM)
Dimension Table
(unit: mm)
L=1000
Flexible Hose Material: Stainless steel
Dimension Table Dimensions
• JIS standard vacuum flange model
• ISO standard KF flange model
dia. D
6
L
dia. D
VF
VG
T
(unit: mm)
L
Part number VFH-20- 200 500 1000 VFH-25- 200 500 1000 VFH-40- 500 1000 2000 VFH-50- 500 1000 2000
D 80 90 105 120 120
L 200 500 1000 200 500 1000 500 1000 2000 500 1000 2000
T
8
10
Model KFH-20- 200 500 1000 KFH-25- 200 500 1000 KFH-40- 500 1000 2000 KFH-50- 500 1000 2000
(unit: mm)
D
40
55 75
L 200 500 1000 200 500 1000 500 1000 2000 500 1000 2000
Accessories for Vacuum Pumps
Vacuum Components
Vacuum Components
Vacuum Flanges
Flange with Suction Piping Material: Stainless steel
Dimension Table
Dimensions dia. d3
dia. d1
Part number (unit: mm)
P
dia. D
VF
4-dia.10
T
80
VF20 × 15A 20A 25A VF25 × 15A 20A 25A VF40 × 15A 20A 25A VF50 × 15A 20A 25A
P
dia. D
T
60
80
8
70
90
8
80
105
10
100
120
10
(unit: mm)
Applicable rubber hose dia. 15 × dia. 36 dia. 18 × dia. 42 dia. 25 × dia. 55 dia. 15 × dia. 36 dia. 18 × dia. 42 dia. 25 × dia. 55 dia. 15 × dia. 36 dia. 18 × dia. 42 dia. 25 × dia. 55 dia. 15 × dia. 36 dia. 18 × dia. 42 dia. 25 × dia. 55
dia. d1 [external diameter] dia. d2 [internal diameter] dia. 3 21.7 27.2 34.0 21.7 27.2 34.0 21.7 27.2 34.0 21.7 27.2 34.0
16.1 21.6 27.6 16.1 21.6 27.6 16.1 21.6 27.6 16.1 21.6 27.6
18 24 30 18 24 30 18 24 30 18 24 30
Flange with Gauge Port Material: Stainless steel
Dimensions
Dimension Table (unit: mm)
dia.D
dia.18
VF
T
O-ring ULVAC No.5 Internal structure
A
Partnumber GF-20 GF-25 GF-40 GF-50 GF-80 GF-100
dia. D 80 90 105 120 160 185
(unit: mm)
A
T
60
8
62
10
64
12
Quick Coupling Connection Adapter Material: Stainless steel
Dimensions (unit: mm)
45
dia.D1
VF or VG dia.D2
Dimension Table Part number KCG-10 KCF- 10 KCG-16 KCF- 16 KCG-20 KCF- 20 KCG-25 KCF- 25 KCG-32 KCF- 32 KCG-40 KCF- 40 KCG-50 KCF- 50
D1
D2
30
Nominal diameter NW10 NW16 NW20 NW25 NW32 NW40 NW50
80
40
90
55
105
75
120
(unit: mm)
KCG
KCF
VG20
VF20
VG25
VF25
VG40
VF40
VG50
VF50
Vacuum Flanges: ISO standard quick release coupling flange (ISO28661 1-1974) O-RING SEAT
B
C
dia. D
45 55 70 95
61 75 90 123
16 16 16 25
22 32 47 62
B
(unit: mm)
Clamp
COUPLING (Short) Material: Aluminum alloy
Part number KSC-10 KSC-16 KSC-20 KSC-25 KSC-32 KSC-40 KSC-50
Nominal dia. B dia. D diameter NW10 15 30 NW16 20 NW20 25 40 NW25 30 NW32 38 55 NW40 45 NW50 56 75
(unit: mm)
dia. D
(unit: mm)
H 16 dia. B
20
Part number KBR-10 KBR-16 KBR-20 KBR-25 KBR-32 KBR-40 KBR-50
Nominal diameter NW10 NW16 NW20 NW25 NW32 NW40 NW50
(unit: mm)
dia. d1
dia. d2
10 16 20 25 32 40 50
12 17 22 26 34 41 52
Dimensions (unit: mm)
dia. d1 dia. d2
COUPLING (Long) Material: Stainless steel 304
Dimension Table H
Dimension Table
Dimensions
Dimension Table
3.9
A
A
Nominal diameter NW10/16 NW20/25 NW32/40 NW50
dia
C
Part number KQC-16 KQC-25 KQC-40 KQC-50
.D
(unit: mm)
Material: FPM
8
Dimension Table
Material: Stainless steel 304
Part number KLC-10 KLC-16 KLC-20 KLC-25 KLC-32 KLC-40
Nominal diameter NW10 NW16 NW20 NW25 NW32 NW40
dia. B 15 20 25 30 38 45
Dimensions (unit: mm)
dia. D
(unit: mm)
dia. D 30
40
Dimensions
.5
Material: Aluminum alloy
O-RING
dia
CLAMP
40 55
dia. B
7
Vacuum Pump Option Parts Accessories for Vacuum Pumps
Vacuum Components
Vacuum Components
Vacuum Flanges
Vacuum Flange (JIS B 2290) Dimensions d
Groove seated h
(unit: mm) d
h
S CI
f
G1 G2 g C D
S
f
g C D
T
T
Flat surface seated
G1 G2
Dimension Table for Flanges and Gaskets (JIS B 2290) Nominal diameter 10 20 25 40 50 65 80 100 125 150 200 250 300 350 400 450 500 550
External flange diameter External diameter Flange external (d) of applicable diameter Flange thickness, T f steel piping (D), casted Metal Casting Other 17.3 70 10 8 1 27.2 80 10 8 1 34.0 90 10 8 1 48.6 105 12 10 1 1 60.5 120 12 10 76.3 145 12 10 1 89.1 160 14 12 2 114.3 185 14 12 2 139.8 210 14 12 2 165.2 235 14 12 2 216.3 300 18 16 2 267.4 350 18 16 2 318.5 400 18 16 2 ̶ 20 2 355.6 450 ̶ 20 2 406.4 520 ̶ 20 2 457.2 575 ̶ 22 2 508.0 625 ̶ 24 2 558.8 680
(unit: mm)
Bolt holes g 38 48 58 72 88 105 120 145 170 195 252 302 352 402 458 511 561 616
Center diameter, C 50 60 70 85 100 120 135 160 185 210 270 320 370 420 480 535 585 640
Number 4 4 4 4 4 4 4 8 8 8 8 12 12 12 12 16 16 16
Thickness, h 10 10 10 10 10 12 12 12 12 12 15 15 15 15 19 19 19 19
Nominal bolt M8 M8 M8 M8 M8 M10 M10 M10 M10 M10 M12 M12 M12 M12 M16 M16 M16 M16
Gasket groove Internal External Nominal S diameter, G1 diameter, G2 24 34 3 34 44 3 40 50 3 55 65 3 70 80 3 85 95 3 100 110 3 120 130 3 150 160 3 175 185 3 225 241 4.5 275 291 4.5 325 341 4.5 380 396 4.5 430 446 4.5 480 504 7 530 554 7 585 609 7
www.ulvac.co.jp/eng
ULVAC, Inc. Components Division Overseas Sales in Japan TEL +81-467-89-2261 USA : ULVAC Technologies, Inc. GERMANY : ULVAC GmbH CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd. SINGAPORE : ULVAC SINGAPORE PTE LTD
TEL +1-978-686-7550 TEL +49-89-960909-0 TEL +86-21-6127-6618 TEL +886-3-579-5688 TEL +82-31-683-2922 TEL +65-6542-2700
PHILIPPINES : ULVAC Singapore Philippines Branch VIETNAM : ULVAC Singapore Vietnam Representative Office THAILAND : ULVAC (THAILAND) LTD MALAYSIA : ULVAC MALAYSIA SDN. BHD. INDIA : ULVAC, Inc., India Branch
This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.
TEL +63-2-828-7700 TEL +84-8-62556762 TEL +66-2-312-4447 TEL +60-3-5121-4700 TEL +91-40-27007006
1173E/2012062000UYO
