Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Butterfly Pressure Control Valve with Logic interface This manual is valid for the valve ordering number(s): 612 . . - . . 612 . . - . . 612 . . - . . 612 . . - . . 612 . . - . . 612 . . - . . 612 . . - . . 612 . . - . .
GC GE AC AE HC HE CC CE
-.... -.... -.... -.... -.... -.... -.... -....
(1 sensor input) (2 sensor inputs) (1 sensor input / ±15V SPS) (2 sensor inputs / ±15V SPS) (1 sensor input / PFO) (2 sensor inputs / PFO) (1 sensor input / ±15V SPS / PFO) (2 sensor inputs / ±15V SPS / PFO)
SPS = Sensor Power Supply configured with firmware
PFO = Power Failure Option
612P.1E.00
The fabrication number is indicated on each product as per the label below (or similar):
made in Switzerland Fabrication No.:
.. patented
612 . . – . . . . – . . . . / . . . . A –......
Fabrication number
sample picture Explanation of symbols: Read declaration carefully before you start any other action!
Keep body parts and objects away from the valve opening!
Attention!
Hot surfaces; do not touch!
Product is in conformity with EC guidelines, if applicable!
Loaded springs and/or air cushions are potential hazards!
Disconnect electrical power and compressed air lines. Do not touch parts under voltage!
Wear gloves!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Imprint Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website www.vatvalve.com
Phone +41 81 771 61 61
Fax +41 81 771 48 30
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2009
Email
[email protected]
No part of these Instructions may be reproduced in any way (photocopies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Contents: 1 Use of product .......................................................................................................................................................... 5 1.1 Technical data ................................................................................................................................................. 5 1.1.1 Valve unit............................................................................................................................................. 7 2 Installation................................................................................................................................................................. 9 2.1 Unpacking........................................................................................................................................................ 9 2.2 Installation into the system .............................................................................................................................. 9 2.3 Tightening torque ........................................................................................................................................... 11 2.3.1 Mounting of CF-F flanges .................................................................................................................. 11 2.3.2 Mounting with centering rings............................................................................................................ 11 2.3.3 Mounting with O-ring in grooves ........................................................................................................ 12 2.4 Admissible forces........................................................................................................................................... 12 2.4.1 Admissible forces for valve body ....................................................................................................... 12 2.4.2 Admissible forces at controller .......................................................................................................... 13 2.5 Requirements to sensor connection .............................................................................................................. 14 2.6 Electrical connection...................................................................................................................................... 14 2.6.1 Sensor supply concepts .................................................................................................................... 14 2.6.2 Power and sensor connection (+24 VDC sensors)............................................................................ 15 2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module............................. 17 2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module.................................. 19 2.6.5 Logic interface connection................................................................................................................. 20 2.6.6 Service port connection ..................................................................................................................... 20 3 Operation ................................................................................................................................................................ 21 3.1 Introduction .................................................................................................................................................... 21 3.1.1 Local operation .................................................................................................................................. 21 3.1.2 Remote operation .............................................................................................................................. 22 3.1.3 Safety mode ...................................................................................................................................... 22 3.1.4 Service indication .............................................................................................................................. 22 3.2 Operation under increased temperature ........................................................................................................ 22 3.3 Behaviour during power up ............................................................................................................................ 22 3.4 Behavior in case of power failure................................................................................................................... 23 3.5 Display information ........................................................................................................................................ 24 3.6 Setup procedure ............................................................................................................................................ 25 3.6.1 Interface configuration ....................................................................................................................... 26 3.6.2 Valve and sensor configuration ......................................................................................................... 26 3.6.3 ZERO................................................................................................................................................. 27 3.6.4 LEARN............................................................................................................................................... 27 3.7 Close valve .................................................................................................................................................... 30 3.8 Open valve..................................................................................................................................................... 30 3.9 Position control .............................................................................................................................................. 30 3.10 Pressure control............................................................................................................................................. 30 3.10.1 Operation with 2 sensors................................................................................................................... 31 3.10.2 Tuning of control performance........................................................................................................... 32 3.11 Logic interface ............................................................................................................................................... 35 3.11.1 Functions and Wiring ........................................................................................................................ 36 3.11.2 Digital inputs ...................................................................................................................................... 38 3.11.3 Digital outputs.................................................................................................................................... 40 3.11.4 Analog inputs and outputs ................................................................................................................. 41 4 Trouble shooting ..................................................................................................................................................... 42 5 Maintenance & repairs ............................................................................................................................................ 44 5.1 Maintenance procedures ............................................................................................................................... 45 5.2 Option board .................................................................................................................................................. 50 5.2.1 Durability of power fail battery ........................................................................................................... 50 5.2.2 Retrofit / replacement procedure ....................................................................................................... 51 6 Drawing................................................................................................................................................................... 54 7 Spare parts ............................................................................................................................................................. 55 7.1 Control and actuating unit.............................................................................................................................. 55 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
7.2 7.3 7.4
Seals and grease ........................................................................................................................................... 55 ISO-KF and ISO-F valve unit - aluminum blank, without heating................................................................... 56 Accessories ................................................................................................................................................... 57 7.4.1 Centering ring with Viton o-ring ......................................................................................................... 58 8 Warranty ................................................................................................................................................................. 59
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
1
Use of product
This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT.
1.1
Technical data
Control and actuating unit Power input 1) (α) [612 . . - . . A . - . . . . / 612 . . - . . G . - . . . . ] [612 . . - . . C . - . . . . / 612 . . - . . H . - . . . . ]
+24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] 38 W max. (operation of valve with max. load) without PFO 4) 38 W plus 10 W for PFO 4)
Sensor power supply 2) (β) [612 . . - . . A . - . . . . / 612 . . - . . C . - . . . . ] Input Output
+24 VDC / 1500 mA max. ±15 VDC (±5%) / 1000 mA max.
[connector: POWER] [connector: SENSOR]
+ 24 VDC resp. ± 15 VDC same as input but: 2.0 A max. at ± 15 VDC 1.5 A max. at + 24 VDC
[connector: POWER] [connector: SENSOR]
Sensor power supply 2) (β) [612 . . - . . G . - . . . . / 612 . . - . . H . - . . . . ] Input Output
Calculation of complete power consumption: Ptot = α + β whereas β depends on sensor supply concept and sensor power consumption.
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Control and actuating unit (continuation) Sensor input Signal input ADC resolution Sampling time Digital inputs
0-10 VDC / Ri>100 kΩ 0.23 mV 10 ms
3)
[connector: SENSOR]
±24 VDC max.
3)
Digital outputs Input voltage Input current Breaking capacity
PFO
70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max.
4)
battery pack [612 . . - . . C . - . . . . / 612 . . - . . H . - . . . . ] Charging time Durability
2 minutes max. up to 10 years @ 25°C ambient; refer to «Durability of power fail battery» for details
Ambient temperature
0 °C to +50 °C max. ( = 10 mm < = 300 mm
These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded.
2.6
Electrical connection
2.6.1 Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC. Concepts: •
External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors. Refer to chapter «2.6.2 Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring.
•
External ±15 VDC supplied to POWER connector is feed through to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module» for schematic and correct wiring.
•
External + 24 VDC supplied to POWER connector is converted into ±15 VDC by the valve internal SPS and supplied to SENSOR connector to supply ±15 VDC sensors. Refer to chapter «2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module» for schematic and correct wiring.
Valve versions: • 612 . . - . . G . - . . . . / 612 . . - . . H . - . . . . •
612 . . - . . A . - . . . . / 612 . . - . . C . - . . . .
SPS module not included SPS module included
Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction.
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.2 Power and sensor connection (+24 VDC sensors) [612 . . - . . G . - . . . . / 612 . . - . . H . - . . . . versions recommended] 2.6.2.1
Sensor power wiring via controller
Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving.
Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly.
Note: • • •
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors!
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.2.2
Sensor power wiring external
Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving.
Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly.
Note: • • •
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors!
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.3 Power and sensor connection (±15 VDC sensors) without optional SPS module [612 . . - . . G . - . . . . / 612 . . - . . H . - . . . . versions only] 2.6.3.1
Sensor power wiring via controller Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving.
Fuse 1A
Fuse 1A
Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly.
Note: • • •
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.3.2
Sensor power wiring external Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving.
Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly.
Note: • • •
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.4 Power and sensor connection (±15 VDC sensors) with optional SPS module [612 . . - . . A . - . . . . / 612 . . - . . C . - . . . . versions only]
Pins 4 and 8 must be bridged for operation! An optional switch would allow for motor interlock to prevent valve from moving.
Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly.
Note: • • •
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect the ±15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
2.6.5 Logic interface connection Refer to «Schematics» for wiring information. 2.6.6 Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'. Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to «Local Operation» for details and to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. Connector: Use only screws with 4-40UNC thread for fastening the service port connector!
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3
Operation Operation is allowed after completion of the installation procedure only.
3.1
Introduction
This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. 3.1.1 Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from www.vatvalve.com or purchase our 'Control Performance Analyzer'. These software are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button ‘LOCAL’ to enable for operation. Then enter menu Setup/Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed.
‘Control view’ supports: parameter setup manual control numeric monitoring basic diagnostic 'Control Performance Analyzer' supports: parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic
When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2.
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.1.2 Remote operation This product is equipped with a Logic interface to allow for remote operation. See section «Logic Interface» for details. ‘Control View’ software, 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. Note: In case ‘Control View’ or ‘Control Performance Analyzer’ software is connected to valve make sure ‘REMOTE’ button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button ‘LOCAL’ is OFF for remote operation. 3.1.3 Safety mode By means of an external switch (see connection diagrams «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the ‘safety mode’. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the ‘safety mode’ and is not able to synchronize. Display shows ‘D C’ or ‘D999’. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows ‘INIT’ for a moment followed by ‘SYNC’. When ‘safety mode’ is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode. 3.1.4 Service indication This product is able to indicate that the valve unit needs to be cleaned, or an obstruction is present. A service request is indicated when the control unit detects that motor steps are apparently not effective. This may happen when the valve unit is heavily contaminated. These ‚lost‘ steps are recognized and will be repeated to attempt target position in the short term. But in the medium term the valve unit requires cleaning or inspection. ‘Service request’ (SR) would be indicated on the display or could be read via remote operation. Refer to «Display information» for details.
3.2
Operation under increased temperature
This valve may be operated in the temperature range mentioned in chapter «Technical data».
3.3
Behaviour during power up
Valve position before power up:
Reaction of valve:
Any
Valve runs a synchronization cycle (close-open-close) to detect the limit stops. This cycle is performed with reduced torque (80%). Display shows configuration of product until synchronization cycle is done. Refer also to chapter «Display information».
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.4
Behavior in case of power failure
Valve position before power failure:
Any
Reaction of valve: Without Power Failure Option (PFO)
With Power Failure Option (PFO)
612 . . - . . G . - . . . . 612 . . - . . A . - . . . . 612 . . - . . T . - . . . . 612 . . - . . V . - . . . .
612 . . - . . H 612 . . - . . C 612 . . - . . U 612 . . - . . W
Valve remains at current position.
Valve will close or open depending on valve configuration *). Default is not defined. Display indicates F.
.-.... .-.... .-.... .-....
*) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory.
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.5
Display information 1 2 3 4
There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables.
Display
Power up: Description At first all dots are illuminated then configuration is displayed:
Digit 1
Digit 2
Digit 3
Digit 4
1
E
0
0
0
• Firmware version [e.g. 1E00] st (1 information for about 3s)
= basic
1
• Controller configuration nd (2 information for about 3s)
1 1) = with SPS
= 1 sensor version
1 = Logic interface
In case D999 is displayed, motor interlock is active. Refer to «Safety mode» for details.
SYNC indicates that powerup synchronization is running.
2 2) = with PFO
2
3 1) 2) = with SPS and PFO S
Y
1) SPS = optional ±15 VDC Sensor Power Supply module
= 2 sensor version
N
C
2) PFO = Power Failure Option
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Operation: Description / Mode
Digit 1
PRESSURE CONTROL mode
P
POSITION CONTROL mode
V
Valve closed
C
Valve open
O
HOLD (position frozen) activated
H
ZERO running
Z
LEARN running
L
Safety mode established. Refer to «Safety mode» for details.
D
Service request 1)
Digit 2
Digit 3
Digit 4
0 . . . 100 = valve position (%, 0 = closed / 100 = open)
1)
S
R
If SR is blinking alternatively with the actual mode display (e.g. P.11 ⇔ ..SR) the valve requires cleaning.
Fatal error: Description
Digit 1
Fatal error occurred
3.6
E
Digit 2
Digit 3
Digit 4
Error code. Refer to «Trouble shooting» for details
Setup procedure To enable this valve for pressure control setup steps 1 to 5 must be performed. In case position control is required only it’s sufficient to perform steps 1 and 2.
Setup step 1
POWER UP
2
INTERFACE CONFIGURATION VALVE CONFIGURATION
3 4
ZERO
5
LEARN
Description Turn on external + 24VDC power supply (and external ±15 VDC for sensor power supply if required). Refer to chapter «Behavior during power up» for details. Refer to chapter «Interface configuration» for details. Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Valve configuration» for details. Compensation of the sensor offset voltage. Refer to chapter «ZERO» for details. Determination of the vacuum system characteristic to accommodate the PID controller. Refer to chapter «LEARN» for details. Note: Without LEARN the valve is not able to run pressure control
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.6.1 Interface configuration Interface configuration must be adapted according to application needs. • Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected. These may be configured as ‘not inverted‘ or ‘inverted‘. Default is ‘not inverted‘. • LEARN range configuration for remote operation must be selected. This may either be ‘full range’ or pressure limit according of analog SETPOINT input. Default is ‘full range‘. Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) Do configuration in menu ‘Setup / Interface’.
Remote operation: Note: It’s not possible to do ‘Interface configuration‘ via remote operation.
3.6.2 Valve and sensor configuration Basic valve configuration must be adapted according to application needs. • Definition of valve plate position (CLOSE or OPEN) after power up sequence. Default is ‘close‘. • Definition of valve plate position (CLOSE or OPEN) in case of a power failure. Default is ‘not defined‘. Only for versions that have Power Fail Option equipped [612 . . - . . C . - . . . . or 612 . . - . . H . - . . . . ]. • ZERO function. This may be ‘disabled’ or ‘enabled’. Default is ‘enabled‘. Refer also to «ZERO». • Sensor configuration for 2 sensor version [612 . . - . . . E - . . . .]. Refer also to «Pressure control operation with 2 sensors». Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) 1.
Do power up configuration in menu ‘Setup / Valve’.
2.
Do power fail configuration in menu ‘Setup / Valve’.
3.
Enable or disable ZERO function in menu ‘Setup / Sensor’.
4.
Do 2 sensor configuration in menu ‘Setup / Sensor’.
Remote operation:
Note: It’s not possible to do ‘Valve and sensor configuration‘ via remote operation.
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3.6.3 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/-1.4V can be compensated. The offset value can be read via local and remote operation. Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Go to menu ‘Zero / ZERO’ and follow instructions.
Remote operation: (Refer to chapter «Digital inputs» for details) 1.
Send OPEN VALVE
2.
Wait until process chamber is evacuated and sensor signal is not shifting anymore.
3.
Send ZERO
Note: Do not perform ZERO as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result. Refer to manual of sensor manufacturer for warm up time. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. 3.6.4 LEARN LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles. This characteristic depends on various parameters such as chamber volume, conductance and flow regime. Therefore it must be performed with a specific gas flow according to instruction below. The result of LEARN is a pressure versus valve position data table. This table is used to adapt the PID parameters. The data table is stored in the device memory which is power fail save. The data table can be up-/downloaded via ‘Control Performance Analyzer’ software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted. Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Remote operation: (Refer to chapter «Digital inputs» for details) 1.
Set OPEN VALVE
2.
Set specific gas flow according to calculation below and wait until flow is stable. Autolearn does not need to be performed with the process gas. Instead N2 or Ar may be used.
3.
Set SETPOINT ( = pressure limit for learn) to pmax (max. pressure to control during process) Set LEARN Note: Alarm is set as long learn is performed, if alarm is off, learn is finished. Reset LEARN Reset OPEN VALVE
Go to ‘Learn / LEARN’ menu and follow instructions. Note: Gasflow calculation according to recommendation below is done automatically based on inputs.
4.
5. 6.
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Note: Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn.
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Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient.
Note: Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1.
At first it is necessary to find out about the required control range respectively its conductance values. Each working point (pressure / flow) must be calculated with one following formulas. Choose the applicable formula depending on units you are familiar with. 1000 • qWP CWP = pWP
qWP CWP = pWP
qWP CWP = 78.7 • pWP
2.
CWP required conductance of working point [l/s] 3 qWP gasflow of working point [Pa m /s] pWP pressure of working point [Pa] CWP required conductance of working point [l/s] qWP gasflow of working point [mbar l/s] pWP pressure of working point [mbar] CWP required conductance of working point [l/s] qWP gasflow of working point [sccm] pWP pressure of working point [Torr]
Out of these calculated conductance values choose the lowest. CR required lower conductance [l/s] CWPx required conductance of working points [l/s] Note: To make sure that the valve is capable to control the most extreme working point verify that CR ≥ [Cmin] = minimum conductance of valve (refer to «Technical data»). Cmin CR = min(CWP1, CWP2, . . . , CWPn)
3.
Calculate gasflow for learn. Choose the applicable formula depending on units you are familiar with. pmax • CR qL = 2000
pmax • CR qL = 2
qL = 39.4 • pmax • CR
3
gasflow for learn [Pa m /s] qL pmax max. pressure to control [Pa] required lower conductance [l/s] CR gasflow for learn [mbar l/s] qL pmax max. pressure to control [mbar] required lower conductance [l/s] CR qL gasflow for learn [sccm] pmax max. pressure to control [Torr] required lower conductance [l/s] CR
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.7
3.8
3.9
Close valve Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Remote operation: (Refer to chapter «Digital inputs» for details)
Push CLOSE button
Send CLOSE VALVE
Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Remote operation: (Refer to chapter «Digital inputs» for details)
Push OPEN button
Send OPEN VALVE
Open valve
Position control
The valve position is directly controlled according to the position setpoint. Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1.
Set CONTROL MODE to POSITION CONTROL
2.
Set position SETPOINT
Select or enter position setpoint Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority.
3.10 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas type). Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1.
Set CONTROL MODE to PRESSURE CONTROL
2.
Set pressure SETPOINT
Select or enter pressure setpoint Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority.
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3.10.1 Operation with 2 sensors [applicable with 612 . . - . . . E - . . . . version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges. Max. ratio is 100:1. It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input. Between 90 and 100% of the low range sensor full scale, the low range sensor is phased out while high range sensor is phased in. This maintains a functional response behavior in case of small calibration errors between the two sensors. The pressure output in this range is a blend between both sensors. For monitoring purpose each sensor signal may be read out individually. Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. Example of PRESSURE and SENSOR READING allocation: High range sensor
0-10V
1 Torr
PRESSURE 0 – 1’000'000
SENSOR 1
0-10V
Low range sensor
100 mTorr SENSOR 2
0 mTorr
Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors».
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3.10.2 Tuning of control performance Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. Start
Set all paramters to default
Pressure control ok ?
Reset gain factor to 1.0
No Gain factor adjustment
Sensor delay adjustment
Setpoint ramp adjustment
Valve speed adjustment
Gain factor adjustment
Pressure control ok ?
No
Pressure control ok ?
No
Pressure control ok ?
No
Pressure control ok ?
No
Contact VAT
End
Required information for support: • • • • • •
Go to ‘Tools / Create Diagnostic File’ in ‘Control View’ resp. ‘Control Performance Analyzer’ and save file Pressure / flow / gas conditions to be controlled Chamber volume Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description
Send diagnostic file with and all required information to
[email protected]
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3.10.2.1
Gain factor adjustment
The gain factor effects: • Stability • Response time Default value is 1. Adjustment range is from 0.0001 to 7.5. Higher gain results in: Lower gain results in:
faster response slower response
higher over- / undershoot of pressure lower over- / undershoot of pressure
Adjustment procedure: 1. 2. 3. 4.
Start with gain factor 1.0 Open valve. Control a typical pressure / flow situation. Repeat from step 2 with lower (higher) gain factors until optimal pressure response is achieved and stability is ok.
Note: Normally adjustments down to gain factors of 0.42 should lead to good results. Otherwise you may need to improve sensor connection. Refer to «Requirements to sensor connection». Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) Do configuration in menu ‘Setup / Control Parameter’. 3.10.2.2
Remote operation:
Note: It’s not possible to do ‘Interface configuration‘ via remote operation.
Sensor delay adjustment
Sensor delay adjustment effects: • Stability Default value is 0. Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure. Note: Whenever possible sensors should be attached to the chamber according to «Requirements to sensor connection». This is the most effective measure against stability issues. If your gauge attachment fulfills these criteria do not use this parameter. Adjustment procedure: 1. 2. 3. 4. 5.
Start with gain factor 1.0 and sensor delay 0s. Open valve. Control a typical pressure / flow situation. Repeat from step 2 with higher sensor delays until best possible stability is achieved. Adjustment gain factor again. Refer to «Gain factor adjustment». Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Do configuration in menu ‘Setup / Control Parameter’.
Remote operation:
Note: It’s not possible to do ‘Interface configuration‘ via remote operation.
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3.10.2.3
Setpoint ramp adjustment
Setpoint ramp effects: • Undershoot of pressure • Response time Default value for SRAMP is 0. Adjustment range for SRAMP is from 0 to 10 s. This parameter affects the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time. Pressure chart
Without setpoint ramp optimizing
With setpoint ramp optimizing
PSFS PSTART
PEND
t Choose the applicable formula depending on units you are familiar with.
S t = RAMP • PSTART − PEND PSFS
t PSFS SRAMP PSTART PEND
ramptime [s] sensor full scale pressure setpoint ramp [s] pressure start pressure end
Adjustment procedure: 1. 2. 3. 4. 5.
Start with optimal gain factor and sensor delay time according to preceding tuning steps. Control a typical pressure / flow situation. Control a lower pressure. Repeat from step 2 with longer setpoint ramps until best response is achieved. Verify pressure control response for a setpoint raise situation.
Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) Do configuration in menu ‘Setup / Control Parameter’.
Remote operation:
Note: It’s not possible to do ‘Interface configuration‘ via remote operation.
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3.10.2.4
Valve speed adjustment
Valve speed effects: • Response time Default value is 1000. Adjustment range is from 1 to 1000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Note: Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. Note: OPEN and CLOSE are always done with max. speed. Adjustment procedure: 1. 2. 3. 4.
Use optimal gain factor, sensor delay time and setpoint ramp according to preceding tuning steps. Open valve. Control a typical pressure / flow situation. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘)
Do configuration in menu ‘Setup / Control Parameter’.
Remote operation:
Note: It’s not possible to do ‘Interface configuration‘ via remote operation.
3.11 Logic interface Default configuration: OPEN input not inverted
CLOSE input not inverted
OPEN output open
CLOSE output close
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3.11.1 Functions and Wiring Note: Logic interface allows for remote operation by means of digital and analog signals. Digital inputs may be operated either by switches or by voltage sources. a) Configuration with switches for digital inputs:
Note: Use a shielded cable for analog inputs. Do not connect other pins than indicated above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector!
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b) Configuration with voltage source for digital inputs:
Note: Use a shielded cable for analog inputs. Do not connect other pins than indicated above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector!
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
3.11.2 Digital inputs Pin
7
Function
CONTROL MODE
Signal type Description This pin selects the control mode. This valve may either be operated as pressure controller or as position controller.
Digital 1) Input
PRESSURE CONTROL is activated as long as optocoupler is ‘on’. The PID controller controls the chamber pressure according to the pressure SETPOINT by means of the valve position.
Priority
6
2)
POSITION CONTROL is activated when optocoupler is ‘off’. The valve position is directly controlled according to the position SETPOINT. This pin selects the SETPOINT RANGE. Low range extension is activated as long as optocoupler is ‘on’. It’s effective in pressure control mode only.
5
SETPOINT RANGE
Digital 1) input
This function extends the lower 10% range of sensor full scale (SFS) to the full 0-10V for SETPOINT input. Herewith you can achieve better resolution, especially in case of a 2 sensor system. Example with SFS = 100mTorr: Not active (10V=100%) >> Active (10V=10%): >>
16
HOLD
Digital 1) input
N/A
10V setpoint = 100mTorr 10V setpoint = 10mTorr
This function stops the valve at the current position. After release of the signal the valve will return to the selected CONTROL MODE.
5
2)
3
2)
2
2)
This function is activated as long as optocoupler is ‘on’. This function will open the valve.
17
OPEN VALVE
Digital 1) input
This function is activated as long as optocoupler is ‘on’ in non inverted configuration. This function is activated as long as optocoupler is ‘off’ in inverted configuration. Configuration can be done in local operation via service port. Default settings is not inverted This function will close the valve.
15
CLOSE VALVE
Digital 1) input
This function is activated as long as optocoupler is ‘on’ in non inverted configuration. This function is activated as long as optocoupler is ‘off’ in inverted configuration. Configuration can be done in local operation via service port. Default settings is not inverted
1)
All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit.
2)
Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active.
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Pin
3
Function
ZERO
Signal type Description This function compensates the pressure gauge offset voltage and sets the pressure value to zero. In case of a 2 sensor system both sensor inputs will be adjusted.
Digital 1) Input
This function is initiated by the ‘off’ to ‘on’ transition of the optocoupler. If ‘on’ remains established this will not re-initiate the function and does also not block functions with lower priorities. Note: Do not perform ZERO as long as pressure gauge voltage is shifting. Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1%o of sensor full scale. We recommend disabling ZERO function in this case. You can disable the function in local operation via service port.
Priority
1
2)
4
2)
The LEARN routine determines the control characteristic of the vacuum system.
19
LEARN
Digital 1) Input
This function is initiated by the ‘off’ to ‘on’ transition of the optocoupler. A transition from ‘on’ to ‘off’ while the routine is running would stop it. While running, the routine may not be interrupted by another function with higher priority. If ‘on’ remains established after completion this will not re-initiate the function and does also not block functions with lower priorities. Note: Without a LEARN data set the PID controller is not able to perform pressure control.
18
LOCK
Digital 1) input
This function locks the valve in remote operation. In case the valve is in local operation it will turn to remote operation. Local operation via service port is not possible when LOCK is activated. When the signal is released the valve remains in remote operation but local operation may be activated via service port.
6
DIGITAL GROUND
Digital ground
Ground for all digital inputs. Ground is used when digital inputs are operated by switches. Connect switches to ground. Refer also to «Function and wiring» configuration a).
Digital common
Common for all digital inputs. Common is used when digital inputs are driven by voltage sources. Connect + or – terminal of source with common (input optocouplers are capable of bidirectional operation). Refer also to «Function and wiring» configuration b).
4
DIGITAL COMMON
N/A
1)
All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit.
2)
Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active.
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3.11.3 Digital outputs Pin
Function
8
VALVE OPEN SERVICE REQUEST
Signal type Description This output is active in all operation modes and indicates either that the valve is open or that a service is requested. Digital 1) output
A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates open This output is active in all operation modes and indicates either that the valve is close or that a service is requested.
9
VALVE CLOSED SERVICE REQUEST
Digital 1) output
A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates close The meaning of the alarm output depends on the operation mode. LEARN: LEARN is not completed yet.
22
ALARM
Digital 1) output
PRESSURE CONTROL: Actual pressure is out of ±2% range of SETPOINT POSTION CONTROL: Actual position is out of ±0.1% range of SETPOINT
21
READY
Digital 1) output
This signal indicates that the valve is ready for remote operation. If this signal is not active the valve is in one of the following modes: • Synchronization during power up • Local operation via service port • Safety mode. Refer to «Safety mode» for details.
20
COMMON
Digital common
Common for all digital outputs.
1)
Refer to «Function and wiring» for details about output circuit.
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3.11.4 Analog inputs and outputs Pin
Function
Signal type Description The meaning of the setpoint input depends on the operation mode. LEARN: A voltage of 0-10V shall be applied to this input as pressure limit for learn. The limit pressure is in linear relation to the applied voltage. 10V relates to sensor full scale. In case of 2 sensor operation 10V relates to sensor 1 full scale (high range). Note: To activate pressure limit function for remote operation it must be configured accordingly. Refer to «Interface configuration»
25
SETPOINT
Analog 1) input
PRESSURE CONTROL: A voltage of 0-10V shall be applied to this input as pressure setpoint. The pressure setpoint is in linear relation to the applied voltage. Depending on selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. In case of 2 sensor operation 10V relates to sensor 1 full scale (high range). POSITION CONTROL: A voltage of 0-10V shall be applied to this input as position setpoint. The position setpoint is in linear relation to the applied voltage. 0V is closed but not isolation function and 10V is open position. (Use digital input for isolation function)
PRESSURE
Analog 1) output
This output indicates the current pressure as 0-10V. The output voltage is in linear relation to the pressure. Depending on the selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. In case of 2 sensor operation sensor full scale relates to sensor 1 (high range).
11
POSITION
Analog 1) output
This output indicates the current valve position as 0-10V voltage range. The voltage is in linear relation to the valve position. 0V is closed but not isolation function and 10V is open position. (Use digital output for isolation function)
13
ANALOG GROUND
1
CHASSIS GROUND
12
1)
Analog ground Chassis ground
Ground for analog input and analog outputs. Chassis ground connected to case. Shall be used to connect cable shield.
Refer to «Function and wiring» for details about input / output circuit.
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Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
4
Trouble shooting
Failure
Check
Action
No dots lighted on display
- 24 V power supply ok?
Remote operation does not work
- Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. - Switch to remote operation.
- Local operation via service port active - Safety mode active, check for - Provide power to motor to allow for operation. D on display? - Refer to «Electrical connection» for details. - Clamp coupling screw not - Tighten screw. Refer to «Tightening torque» for details. fastened?
Display shows «E 20» (fatal error - limit stop of valve unit not detected) Display shows «E 21» (fatal error - rotation angle of valve plate limited during power up)
Display shows «E 22» (fatal error - rotation angle of valve plate limited during operation)
Display shows «E 40» (fatal error - motor driver failure detected) Display shows «D 0» Motor Interlock is open Display shows «SR» (Service Request)
CLOSE VALVE does not work
- Valve plate centric adjusted?
- Adjust valve plate according to «Maintenance procedure».
- Valve unit heavy contaminated?
- Clean valve unit according to « Maintenance procedure ».
- Valve plate mechanically obstructed?
- Resolve obstruction. - Reset control unit. Cycle power (OFFàON) or Send reset command: local via service port with CV/CPA/Service Box2
- Valve unit heavy contaminated? - Valve plate mechanically obstructed?
- Clean valve unit according to «Maintenance procedure». - Resolve obstruction - Reset control unit. Cycle power (OFFàON) or Send reset command: local via service port with CV/CPA/Service Box2 - Replace control and actuating unit according to «Maintenance procedure».
- Motor power supplied?
- Provide power to motor to allow for operation. - Refer to «Electrical connection» for details.
- Valve unit heavy contaminated?
- Clean valve unit according to «Maintenance procedures». - Reset control unit. Cycle power (OFFàON)
-
OPEN VALVE does not work
-
Display shows «M C» Maintenance mode active Display shows «M100» Maintenance mode active
or - Send reset command: local via service port with CV/CPA/Service Box2 Safety mode active, check for - Provide power to motor to allow for operation. D on display? - Refer to «Electrical connection» for details. Maintenance mode active - Refer to “Display shows «M C»” in this table Safety mode active, check for - Provide power to motor to allow for operation. D on display? - Refer to «Electrical connection» for details. Maintenance mode active - Refer to “Display shows «M100»” in this table - Pin 14 of service connector is connected to ground. Plate will close. Further movement of plate is blocked. 1) - Pin 13 of service connector is connected to ground. Plate will open. Further movement of plate is blocked. 1)
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Failure
Check
Action
POSITION CONTROL does not work
- Safety mode active, check for - Provide power to motor to allow for operation. D on display? - Refer to «Electrical connection» for details. - POSITION CONTROL - Select POSITION CONTROL mode. selected, check for V on Refer to «Position control» for details. display? 1)Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8.
Failure
Check
Action
Pressure reading is wrong
- Sensor(s) connected?
- Refer to «Electrical connection».
or
- 2 sensor version present at valve controller?
- Check valve version on page 1. Verify configuration. Refer to «Setup procedure».
- ZERO done?
- Perform ZERO when base pressure is reached. Refer to «ZERO» for details.
- Does sensor power supply provide enough power for sensor(s)?
- Verify sensor supply voltage.
- Valve in open position, check for O on display?
- OPEN VALVE and bring chamber to base pressure before performing ZERO.
- ZERO disabled?
- Enable ZERO. Refer to «Valve configuration» for details.
- Sensor voltage shifting?
- Wait until sensor does not shift any more before performing ZERO.
- System pumped to base pressure?
- OPEN VALVE and bring chamber to base pressure before performing ZERO.
- Sensor offset voltage exceeds ±1.4V
- Replace pressure gauge.
pressure reading is negative
ZERO does not work
Pressure is not ‘0’ after ZERO
PRESSURE CONTROL does not work
PRESSURE CONTROL not optimal
- Safety mode active, check for - Provide power to motor to allow for operation. D on display? - Refer to «Electrical connection» for details. - PRESSURE CONTROL selected, check for P on display?
- Select PRESSURE CONTROL mode. Refer to «Pressure control» for details.
- LEARN done?
- Perform LEARN. Refer to «Setup procedure» for details.
- Setup done completely?
- Perform «Setup procedure» completely.
- LEARN done?
- Perform LEARN. Refer to «LEARN» for details.
- ZERO performed before LEARN?
- Perform ZERO then repeat LEARN. Refer to «Setup procedure» for details.
- LEARN interrupted?
- Repeat LEARN. Refer to «LEARN» for details.
- Was gas flow stable during LEARN?
- Repeat LEARN with stable gas flow. Refer to «LEARN» for details.
- Tuning done?
- Tune valve for application. - Refer to «Tuning of control performance» for details.
- Is sensor range suited for application?
- Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale).
- Noise on sensor signal?
- Make sure a shielded sensor cable is used.
If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
5
Maintenance & repairs
Under clean operating conditions, the valve does not require any maintenance during the specified cycle life. Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve
made in Switzerland Fabrication No.:
.. patented
.....–....–..../.... A –......
Fabrication number
has always to be specified. All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the system. Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards.
Keep fingers and objects away from the valve opening!
Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or micro-biological ones. If products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the product. The form is available at VAT. The maximum values indicated in the form must not be exceeded.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
5.1
Maintenance procedures
Keep fingers out of the valve during maintenance work.
Use cleanroom gloves during maintenance work.
One p r e v e n t i v e m a i n t e n a n c e procedure is defined for this product. This is: Replacement of actuator feedthrough seals and valve cleaning.
Required frequency of cleaning and replacement of seals is depending on process conditions. A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts.
VAT can give the following recommendations for preventive maintenance:
actuator feedthrough seals
unheated *) 2’000’000 cycles
heated ≤ 80°C *) 6 months but max. 2’000’000 cycles
heated > 80°C *) 3 months but max. 2’000’000 cycles
*) These figures are reference values for clean conditions under various temperatures. These values do not include any impact of the process. Therefore preventive maintenance schedule has finally to be checked for the actual process conditions.
Furthermore the following maintenance procedures are described: Replacement of plate Replacement of control and actuating unit or valve unit Replacement of valve body or mechanical unit
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Description
Required tool
Remove control and actuating unit from valve unit
Remove valve from system
1. Note: Make sure that the valve is in closed position 2. Vent vacuum system, disconnect electrical connections and remove valve from vacuum system. If you only replace control and actuating unit, the Depending on valve can remain in the system. flange screws Note: Take care not to damage the sealing surface! Attention! Do not move the plate by hands when control and actuating unit is installed.
3. Unfasten clamp coupling
Allen Wrench 2mm
4. Unfasten the 2 connection bolts and separate both parts. Note: Valve size DN 160 (6”) and bigger require a shortened wrench. For ordering number refer to «Spare parts and accessories».
Allen Wrench 3mm
Remove plate
12 mm
5. Unfasten screws and remove plate from shaft.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
Allen Wrench 3mm
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Description
Required tool
Remove and clean mechanical unit
6. Unfasten alternately the 2 mounting screws little by little. Note: If only one screw is fasten / unfasten, the mechanical unit will be damaged. Max. difference should be less than 1 turn or 0.5 turn of the screws.
Allen Wrench 3mm
Lubricate and install seals
Seal removal and valve cleaning
7. Remove mechanical unit and clean shaft.
8. Remove o-rings. 9. Clean shaft feedthrough and valve body.
10. Lubricate seal contact surface of valve body with a slight film of vacuum grease (0.025 ml). 11. Lubricate each o-ring with a slight film of vacuum grease (0.0125 ml).
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Description
Required tool
12. Lubricate seal contact surface of shaft with a slight film of vacuum grease (0.0125 ml). 13. Slide both o-rings onto shaft till the end. 14. Deposit 0.0375 ml vacuum grease between the o-rings 15. Clean shaft from vacuum grease.
Mount mechanical unit to valve body
Allen Wrench 3mm
16. Assemble mechanical unit in reverse order as disassembled (steps 6 to 5).
17. Align pedestal parallel to valve body and tighten the 2 mounting screws with 2 Nm.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Install valve into system
Mount control and actuating unit to valve unit
Assemble and adjust plate
Description 18. Center plate. Size Feeler gauge mm 25 0.04 40 0.04 50 0.04 63 0.04 80 0.06 100 0.06 160 0.06 200 0.08 250 0.1 19. Tighten plate screws with 2 Nm.
Required tool
Allen Wrench 3mm Adequate feeler gauge
20. Assemble control and actuating unit to valve unit. Tighten mounting screws adequately.
Allen Wrench 3mm
21. Tighten clamp coupling with 1.1 Nm.
Allen Wrench 2mm
22. Reinstall valve into vacuum system according to chapter «Installation».
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
5.2
Option board
The option board may or may not be equipped in your valve depending on the order. Refer to page 1 of this manual to check valve version. This board includes the optional modules for the valve which are: • ±15VDC sensor power supply (SPS) • Power failure option (PFO) It is available in 3 versions. These are: • SPS module only • PFO module only • SPS and PFO module The modules may be retrofitted or replaced easily. The battery lifetime of the PFO module depends on the ambient temperature (see below). To assure PFO function the option board must be replaced after battery life has expired. For ordering number of the modules refer to «Spare parts and accessories».
5.2.1 Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 degree C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 degree C, the corresponding life time curve will be somewhere in between the upper and the lower curve. Therefore please determine the equivalent maintenance period for replacing the UltraCap battery (Option board).
120
100
Durability [months]
80
w/o SPS module, valve unheated with SPS module, valve unheated w/o SPS module, valve heated with SPS module, valve heated
60
40
20
0 20
25
30
35
40
45
50
Ambient temperature [°C]
Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
5.2.2 Retrofit / replacement procedure ESD Precaution! All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage!
Top view on control and actuating unit with panel removed:
Master board
Motor driver board Option board
Interface board
Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Description
1.
Remove the panel screws.
2.
Remove female screw locks from POWER, SENSOR and INTERFACE connectors.
3.
Lift the panel carefully.
4.
Disconnect fan cable from board.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
Required tool
Pozidriv screw driver size 1
Open end wrench 4.5 mm
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
Description
5.
Remove or replace master board.
6.
Remove or replace interface board.
7.
Remove or replace option board.
8.
Insert master board and interface board in reverse order as disassembled at correct positions (see steps 6…5).
9.
Insert option board at correct position (see step 7).
Required tool
10. Reconnect fan cable (see step 4). 11. Place the panel and tighten screws with 1.1 Nm (see steps 3…2).
Pozidriv screw driver size 1
12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with 1.1 Nm (see step 1).
Open end wrench 4.5 mm
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
6
Drawing
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
7
Spare parts Please specify the fabrication number of the valve (see yellow label on valve) when ordering spare parts. This is to ensure that the appropriate spare parts are supplied.
7.1 Item
Control and actuating unit Description Valve size Product ordering number
All sizes 612 . . - . . . .
Control and actuating unit Option board with SPS module (±15VDC sensor power supply) Option board with PFO module (power failure option) Option board with SPS and PFO module
On request *) 378000 378002 376837
*) Too many to list. Depends on configuration, please contact VAT.
7.2 Item
5
Seals and grease Description Valve size Product ordering number Viton Vacuum seal kit Others
All sizes 612 . . - . . . . 237235 on request
Vacuum grease (2ml syringe)
206792
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
7.3
ISO-KF and ISO-F valve unit - aluminum blank, without heating
Item
Description Valve size Product ordering number
1 2
Spare parts kit valve unit Spare parts kit mechanical unit
3
Spare parts kit valve body
4
Spare parts kit plate Plate screws
DN 40 / 1½”
DN 50 / 2”
DN 63 / 2½”
DN 80 / 3”
DN 100 / 4”
61232 - KA . .
61234 - KA . .
61236 - PA . .
61238 - PA . .
61240 - PA . .
ISO-KF
ISO-KF
ISO-F
ISO-F
ISO-F
231962
231963
231964
231965
226481
232499
232500
232501
232502
232503
232271
232272
232273
232274
232275
232276
232277
232278
232279
232280
353386
353386
353386
353386
353386
(2 pcs required)
(2 pcs required)
(2 pcs required)
(3 pcs required)
(3 pcs required)
For versions such as • other valve sizes • heated valves • valves made of hardanodized aluminum • valves made of nickel coated aluminum • valves made of stainless steel • valves with JIS, ASA or CF-F flanges spare part ordering numbers are available on request.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
7.4
Accessories
Item
Description
Part number
24 VDC power supply unit (input: 100 – 240 VAC)
249775
‘Control Performance Analyzer’ package for Windows® consisting of software and cable
600SP-99LB-000
‘Control View’ software for Windows®
Service cable (PC to valve connection)
248126 free download from www.vatvalve.com or available on order against charge 230327 free wiring information available for download from www.vatvalve.com
Connector kit consisting of: • DB-9 female POWER plug • DB-15 male SENSOR plug • DB-25 male INTERFACE plug
242411
Service Box 2
601BS-29NN-000
Control panel (rack-mount version of Service Box 2)
602BS-29LE-000
Special Allen wrench (SW3) for disassembly and assembly
244873
Special tool kit for disassembly and assembly: • Special Allen wrench (SW3) • Allen wrench (SW2) • Feeler gauges: 0.04, 0.06 and 0.08mm each 6 pcs.
257820
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
7.4.1 Centering ring with Viton o-ring Description Valve size Product ordering number
DN 25 / 1” 61228 - . . . .
DN 40 / 1½” 61232 - . . . .
DN 50 / 2” 61234 - . . . .
DN 63 / 2½” 61236 - . . . .
DN 80 / 3” 61238 - . . . .
Aluminum Centering ring with Viton o-ring (for ISO-KF and ISO-F installation only) Stainless steel
31028-KAZV
31032-KAZV
32034-KAZV
32036-QAZV
32038-QAZV
31028-KEZV
31032-KEZV
32034-KEZV
32036-QEZV
32038-QEZV
Description Valve size Product ordering number
DN 100 / 4” 61240 - . . . .
DN 160 / 6” 61244 - . . . .
DN 200 / 8” 61246 - . . . .
DN 250 / 10” 61248 - . . . .
Aluminum
32040-QAZV
32044-QAZV
32046-QAZV
32048-QAZV
Stainless steel
32040-QEZV
32044-QEZV
32046-QEZV
32048-QEZV
Centering ring with Viton o-ring (for ISO-F installation only)
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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Installation, Operating & Maintenance Instructions
Series 612 DN 25-250 (I.D. 1“ - 10”), Logic
8
Warranty
Each product sold by VAT Vakuumventile AG (VAT) is warranted to be free from the manufacturing defects that adversely affect the normal functioning thereof during the warranty period stated in VAT's «Terms of Sale» immediately following delivery thereof by VAT, provided that the same is properly operated under conditions of normal use and that regular, periodic maintenance and service is performed or replacements made, in accordance with the instructions provided by VAT. The foregoing warranty shall not apply to any product or component that has been repaired or altered by anyone other than an authorized VAT representative or that has been subject to improper installation or abuse, misuse, negligence or accident. VAT shall not be liable for any damage, loss, or expense, whether consequential, special, incidental, direct or otherwise, caused by, arising out of or connected with the manufacture, delivery (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the description thereof contained herein, the purchaser thereof, as its exclusive remedy, shall upon prompt notice to VAT of any such defect or failure and upon the return of the product, part or component in question to VAT at its factory, with transportation charges prepaid, and upon VAT's inspection confirming the existence of any defect inconsistent with said warranty or any such failure, be entitled to have such defect or failure cured at VAT's factory and at no charge therefor, by replacement or repair of said product, as VAT may elect. VAT MAKES NO WARRANTY OR REPRESENTATION OF ANY KIND, EXPRESS OR IMPLIED, (INCLUDING NO WARRANTY OR MERCHANTABILITY), EXCEPT FOR THE FOREGOING WARRANTY AND THE WARRANTY THAT EACH PRODUCT SHALL CONFORM TO THE DESCRIPTION THEREOF CONTAINED HEREIN, and no warranty shall be implied by law. Furthermore, the «Terms of sale» at the back of the price list are applicable.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30
[email protected] www.vatvalve.com
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