Breakthroughs for Efficient Data Analysis and Management Agilent Visual Parametric Analyzer (VPA) / Parametric information Management Engine (PME) Challenge to Improve Time-to-Market

Drowning in Floods of Test Data to Evaluate? Today, efficient evaluation methods are critical for developing advanced semiconductor devices and processes. The key to success in the semiconductor business is improved Time-to-Market. It is vital to shorten the time it takes to develop new devices and processes. However, we are witnessing a marked increase in the number of evaluation items with the emergence of new technologies, such as deep sub-micron design rule and copper interconnect with low

dielectric materials. The same trend can be observed in semiconductor parametric tests. Clearly, we are facing a new challenge. Both the Agilent 4070 Series Parametric Test System and Agilent SPECS (Semiconductor Process Evaluation Core Software) are now widely employed for efficient measurement of various TEGs (Test Element Groups), even at the development stage. However, the existing environment for data management and analysis is not adaquate for handling the vast

amounts of data requiring evaluation, so this has become a new challenge for those attempting to shorten development time. To meet this challenge, Agilent Technologies has introduced a new companion software solution to Agilent SPECS that runs on the 4070 series. The innovative Agilent Visual Parametric Analyzer / Parametric information Management Engine (Agilent VPA/PME) eliminates the bottlenecks, thus helping to shorten the time for technology development.

Barrier to Efficient Evaluation in Technology Development Evaluation methods in the technology development phase are different from those used in the production phase. For production, evaluation focuses on reviewing analysis reports based on pre-defined analysis conditions. In development engineering, however, most engineers repeat exploratory (trial and error) analysis in addition to the pre-defined analysis. In this cycle, they often change the data blocks for analysis (for example, Lot ID base, Wafer ID base, and Parameter base) and the analysis tools (for example, scatter plot and wafer map) after reviewing analysis results. Data evaluation systems should have the following features for more efficient exploratory analysis in the development phase. •

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Quick search and extraction of relevant data Quick and easy display of various analysis results Quick view of entire evaluation process (data manipulation and data analysis) Easy change of conditions at each evaluation step Easy formatting of analysis results for creating reports Easy adoption and maintenance of data evaluation system

Existing solutions, such as commercial data management systems designed for production or in-house tools based on spreadsheet software, do not fulfill these needs sufficiently. They waste time and thus prevent efficient evaluation. Once such time-consuming factors are eliminated, you are relieved of the burden of mountains of test data, and can concentrate on proper engineering work. This leads to improved Time-to-Market.

Data extraction based on pre-defined condition

Display analysis result based on pre-defined condition (Create a report) Pre-defined type data analysis

Define data extraction condition & Extract

Define analysis method & Display analysis result

YES

Change data of analysis method ? NO

Store the final result or Create a report

Exploratory type data analysis in the development phase

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Agilent VPA/PME Navigates You through Flood of Test Data Quick Data Extraction Agilent VPA (data analysis software) / PME (data management software) enables you to extract relevant data quickly from the data deluge. Agilent Technologies has developed Agilent PME, an optimized data management system for parametric test, based on ORACLE® RDBMS (Relational Database Management System). Agilent PME processes and manages bulky data compiled by Agilent SPECS. The other new software, Agilent VPA, is a userfriendly tool that extracts necessary data from Agilent PME for analysis on your PC. You can easily define the conditions (for example, date, product ID, and lot ID) for data extraction and perform further filtering by point-andclick operation using an intuitive GUI. The relevant data is extracted quickly. With Agilent VPA, you can even display the obtained data and the data manipulation process as the corresponding icon in Analysis View. In List View you can easily check the raw data (spreadsheet) for the selected icon. This one-vendor solution provided by Agilent Technologies dramatically reduces the time-consuming work of searching and extracting data.

Define data extraction condition

Check the extracted data

Filter the extracted data

Check the filtered data

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Flexible Data Analysis & Unified Information Management Agilent VPA also takes the pain out of data analysis during technology development. Analysis tools required for parametric testing are provided as standard. After data extraction, the intuitive GUI allows you to easily define analysis tools and to display informative charts and graphs, including correlation analysis, distribution analysis and wafer maps. Analysis results can also be displayed as icons in Analysis View so that you can instantly check analysis conditions and results and change analysis tools.

Agilent VPA/PME can ease your data management burden for various types of analysis. Most conventional systems can handle only scalar quantities, such as threshold voltage (Vth) and leakage current at specified voltage conditions. For technology development, however, characteristics of devices and processes are often verified by using a static characteristic curve (vector quantity), such as drain current versus gate voltage plot (IdVg) in addition to scalar quantity. Ordinary systems cannot manipulate the static characteristic curve easily, so data management and analysis is a

laborious task. With Agilent VPA/PME you can manage curve data in the same way as parameters. Simply select a relevant curve in List View and then analyze its characteristics interactively by the same easy operation as you are used to with the Agilent 4155C/4156C parameter analyzer.

Various charts and graphs

Analysis tool selection

Interactive analysis of static characteristic curve

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Efficient Exploratory Evaluation Agilent VPA/PME boosts productivity of exploratory type evaluation as well as pre-defined evaluation. You can trace and confirm your evaluation record at a glance on Agilent VPA. Thus, you can quickly change and modify the method of data manipulation (for example, change Lot ID) or analysis (for example, change analysis tool). Agilent VPA also allows you to easily adapt the used method to other extracted data because it can be saved as a file or be copied via a clipboard. Now with Agilent VPA/PME you can minimize time-consuming tasks and implement exploratory analysis efficiently in the technology development phase.

Analysis of Lot A was completed. Next let’s check Lot B.

Adapt the used analysis method.

Check the die location of particularity plot.

Compare two different scatter plots. 5

Create Reports Easily

Easy Adoption and Maintenance

Agilent VPA streamlines reporting. Analysis results including graphs and charts can be handled flexibly with VPA. For example, you can change the color and font as you like and insert your comments in graphs. Decorated analysis results can be easily imported into DTP (Desktop Publishing) software via an EMF (enhanced windows meta file) format file or clipboard.

Smoothly Fits Existing Environment Agilent VPA/PME lessens the burden of system building and maintenance. The flexible server and client design give you the ability to start small and then easily build up your environment to meet expanding needs. The dedicated maintenance tools of Agilent PME enable you to maintain the database without special expertise. With Agilent VPA you can export listed data (for example, data in List View or a static characteristic curve) as a CSV format file and import other information via the specified CSV format file. Consequently, Agilent VPA/PME can also blend into the existing data analysis environment and shore up any weaknesses. Unlike other currently available software packages, Agilent VPA/PME is specially designed to shorten the exploratory evaluation cycle performed in device and process development, making it a powerful ally for improving Time-to-Market.

Agilent VPA/PME has abundant features in addition to those mentioned in this brochure. Please contact your Agilent sales and support representative for a detailed explanation and demonstration.

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Product Information Product Number: Agilent E3340A (VPA/PME Package Model) Minimum Configuration: Agilent VPA LTU (1: Expandable), Agilent PME LTU (1), Agilent VPA/PME Media & Manual (CD) Note: No PC is included with E3340A. You will need to prepare a PC separately according to the following specifications. Note: Agilent PME includes 20 Named User Plus License*1 needed for ORACLE RDBMS. Supported Test System: Agilent 4070 series with Agilent SPECS rev.3.0 or later Agilent VPA Supported Analysis Tool: • Correlation Analysis: Scatter Plot • Distribution Analysis: Histogram, Wafer map, Cumulative Distribution (Normal CDF, Log Normal CDF, Weibull, Extreme Value), Boxwhisker • Static Characteristic Analysis: X-Y plot

Recommended Product Requirements: The number of simultaneous connections to PME: For Agilent VPA: Maximum 10 *2 For Agilent SPECS: Maximum 5 *2 Computer system requirements PC for Agilent PME OS CPU Memory Hard Disk

Disk Drive LAN I/F Peripheral

Monitor

Microsoft® Windows® 2000 Server Pentium 4, Xeon (1way only) 1 GB RAM or more 4 Disk (16 GB or more available space for each disk) 1) For OS, System Software, User area 2) For Database Space for User Data 3) For Database Space for Database Index 4) For Vector data file CD-ROM Drive 10 Base-T / 100 Base-T Ethernet Port USB port (one port is required to attach security key) Backup device (DLT or DAT) XGA (1024 x 768) or higher-resolution monitor

*1: Named User Plus License is one of the licensing units defined by Oracle Corporation. It is defined as an individual authorized by you to use the programs that are installed on a single server or multiple servers, regardless of whether the individual is actively using the programs at any give time. A nonhuman operated device will be counted as a named user in addition to all individuals authorized to use the programs, if such devices can access the programs (e.g. Maintenance tool of PME, SPECS linked with PME). If the total number of named users exceeds 20, then you must order Agilent E3342A (Additional 20 Oracle User Licenses) separately. *2: Extraction performance might be reduced, depending on the circumstances.

PC for Agilent VPA OS CPU Memory Hard Disk Disk Drive LAN I/F Peripheral Monitor

Microsoft® Windows® 2000 Professional Pentium 3 or Pentium 4 256 MB RAM or more 1 GB or more available space CD-ROM Drive 10 Base-T / 100 Base-T Ethernet Port USB port (one port is required to attach security key) XGA (1024 x 768) or higher-resolution monitor

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For more information about Agilent and its products, go to www.agilent.com. For more information about Agilent Technologies semiconductor test products, applications, and services, visit our website: www.agilent.com/go/semiconductor or you can call one of the centers listed and ask to speak with a semiconductor test sales representative.

Americas Brazil (11) 4197-3600 Canada (French) 1 877 894-4414 Canada (English) 1 800 447-8378 Mexico 33 134-5841 United States 1 800 447-8378 Asia/Asia Pacific Australia 1800 629-485 China 800 810 0509 Hong Kong 852 2599 7889 India 1600 112 626 Japan 0120 421 345 Malaysia 1800 880 780 New Zealand 0800 738 378 Philippines 1800 1651 0135 Singapore 1800 276 3059 South Korea 080 778 0011 Taiwan 0800 047 662 Thailand 1800 2758-5822 Europe Austria (0) 1 25125 7006 Belgium (0) 2 404 9340 Denmark 70 13 15 15 Finland (0) 10 855 2100 France (0) 825 010 710 Germany (0) 1805 24 6333 Greece (0) 20 547 9999 Ireland (0) 1 890 924 204 Italy 02 9260 8484 Netherlands (0) 20 547 2111 Poland 22 608 14 40 Russia (0) 20 547 9999 Spain 91 631 3300 Sweden 0200 88 22 55 Switzerland (Italian) (0) 2 92 60 8484 Switzerland (German) (0) 1 735 9200 Switzerland (French) 080081 5353 United Kingdom (0) 7004 666666 Middle East Israel 3 6892 500

Product specifications and descriptions in this document subject to change without notice. Microsoft and Windows are US registered trademarks of Microsoft Corporation. “ORACLE” is a registered trademark of Oracle Corporation, Redwood City, California, U.S.A. ©Agilent Technologies Inc. 2002 Printed in U.S.A. November 21, 2002 Pub #5988-8235EN