AVANCIS PowerMax® 100 FB CIGS Solar Panel Process Review

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AVANCIS PowerMax 100 FB CIGS Solar Panel Process Review Table of Contents 1

Overview 1.1 List of Figures 1.2 List of Tables 1.3 Company Profile 1.4 Introduction 1.5 Device Summary 1.6 Process Summary

2

Solar Panel Architecture 2.1 Solar Cell Panel Overview 2.2 Solar Cell Panel Features 2.3 Solar Panel Scribe Lines

3

Solar Cell Panel Cross-Sectional Analysis 3.1 General Structure 3.2 Transparent Polymer Layer 3.3 Metal Interconnect 3.4 CIGS Stack 3.5 Interconnect Structure Scribe Lines

4

Materials Analysis 4.1 SEM-EDS and TEM-EDS Analyses

5

Critical Dimensions 5.1 Solar Panel Dimensions 5.2 Horizontal and Vertical Dimensions

6

References

7

Statement of Measurement Uncertainty and Scope Variation

Appendix A: FTIR Analysis Report About Chipworks

AVANCIS PowerMax 100 FB CIGS Solar Panel Overview 1 Overview 1.1

List of Figures

1 1.4.1

Overview CIGS Solar Cell Schematic Diagram

2 2.1.1 2.1.2 2.1.3 2.1.4 2.1.5 2.1.6 2.1.7 2.2.1 2.2.2 2.2.3 2.2.4 2.2.5 2.2.6 2.2.7 2.2.8 2.2.9 2.3.1 2.3.2 2.3.3 2.3.4

Solar Panel Architecture Solar Panel – Front Solar Panel – Back Solar Panel Identification Label Module Top Right Corner – Front Module Bottom Left Corner – Front Panel Frame Cross Section – Long Edge Panel Frame Cross Section – Short Edge and Cross Member Anode and Cathode Connections – Back Cathode Connection – X-Ray Cathode Connection and Ribbon – X-Ray Panel Corner Top Left – Front Panel Corner Bottom Right – Front Panel Corner Top Left – Back Panel Corner Bottom Right – Back Panel Corner Top Left – Back Tilt View Panel Corner Bottom Right – Front Tilt View P1 Scribe Line Pitch – Back Glass Side P1 Scribe Line Width – Back Glass Side P2 and P3 Scribe Lines Pitch – Front Glass Side Scribe Lines – Front Cathode Side

3 3.1.1 3.2.1 3.3.1 3.3.2 3.3.3 3.3.4 3.4.1 3.4.2 3.4.3 3.4.4 3.4.5 3.4.6 3.4.7

Solar Cell Panel Cross-Sectional Analysis Solar Panel Polished Edge Transparent Polymer Aluminum Ribbon Edge – Optical Aluminum Ribbon and Conductive Organic Layer – SEM Aluminum Ribbon and Molybdenum Anode Contact – Optical Aluminum Ribbon and Molybdenum Anode Contact – SEM CIGS Stack – Optical CIGS Stack – SEM CIGS Stack – TEM ZnO:Al and CdS Buffer Layer – SEM CdS Buffer Layer – TEM Molybdenum Anode Layer – SEM Molybdenum Anode Contact Layer – TEM

1-1

AVANCIS PowerMax 100 FB CIGS Solar Panel Overview 3.5.1 3.5.2 3.5.3 3.5.4 3.5.5 3.5.6 3.5.7

Interconnect Structure Scribe Lines Overview – Optical P1 Scribe Line – Optical P1 Scribe Line – SEM P1 Scribe Line Edge – SEM P2 Scribe Line – Optical P2 Scribe Line Edge – SEM P3 Scribe Line Edge – SEM

4 4.1.1 4.1.2 4.1.3 4.1.4 4.1.5 4.1.6 4.1.7 4.1.8 4.1.9 4.1.10

Materials Analysis TEM-EDS of ZnO:Al Transparent Conductive Oxide TEM-EDS of CdS Interfacial Layer TEM-EDS of CIGS Layer TEM-EDS of SeMoCu Mo/CIGS Interface Layer TEM-EDS of Mo Anode Plate TEM-EDS of SiAlN Adhesion Layer SEM-EDS of Aluminum Ribbon SEM-EDS of Conductive Organic Layer SEM-EDS of Top Glass TEM-EDS of Bottom Glass

1.2

List of Tables

1 1.5.1 1.6.1

Overview Device Summary Process Summary

2 2.1.1 2.3.1

Solar Panel Architecture Solar Cell Panel Dimensions Scribe Lines Horizontal Dimensions

3 3.4.1

Solar Cell Panel Cross-Sectional Analysis CIGS Stack Vertical Dimensions

5 5.1.1 5.2.1 5.2.2

Critical Dimensions Solar Cell Panel Dimensions Scribe Lines Horizontal Dimensions CIGS Stack Vertical Dimensions

1-2

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