ADVANTEC GROUP COMPANY PROFILE We have the technical strength to meet and exceed the needs of our global customer base. All our products are robust and reliable sourcing of superior-quality, leading- edge products. We continuously strives to provide the optimal working environment to nurture innovative ideas and products.

Advantec Co.,Ltd. Established: Executive Directors: Initial Capitalization: Correspondent Banks: Annual Turn-over:

May 1995 Masahide Yamana/ Nobu Sudo U$350,000.00 Sumitomo Mitsui Bank, Mizuho Bank, Iyo Bank, Hiroshima Bank, U$55 Million

Corporate Headquarters: 293-1, Minato Kitamachi Saijyo-city, Ehime 793-0046 JAPAN Tokyo Branch: Queen’s Tower C 8F 2-3-5, Minato Mirai, Nishi-ku, Yokohama JAPAN Osaka Sales Office: 5th Floor, 5-4-33, Nishi-Nakajima, Yodogawa-ku, Osaka JAPAN LSI General Development Center: Unit 712, 3-8-33, Momochihama, Sawara-ku, Fukuoka JAPAN U.S.A. Branch: 5000 Hopyard Rd., Suite 318 Pleasanton, CA 94588 USA China Branch: Unit 339, A-Bldg. 3F. No.319 Xian Xia Rood, Shanghai, China Taiwan Branch: 10F-A2, No.132 SEC.3, Nanking E.Rd.,Taipei, Taiwan

Corporate Headquarters

U.S.A

China

History May July August April February May February February

1995 1995 1995 1997 1999 1999 2002 2003

Advantec Co., Ltd. Founded Building constructed in Saijyo-city Opened sales office and manufacturing facilities in Saijyo-city Additional clean room constructed Tokyo branch established Osaka Sales Office established U.S.A. Branch established in Silicon Valley LSI General Development Center established in Fukuoka

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Products Information Test Wafers

Vacuum Component

Flat Panels

Bare Silicon Wafers

Flange (Fixed/Rotatable)

Blanket Test Film Wafers

Tap (Nipple/Elbow/Tee/CrossThickness 0.7mm

Patterned Test Wafers

Reducer

GEN2 to GEN8 a-Si (50nm ～

)

Gage Port Adaptor Flexible Tube/ Bellows and much more products…

Patterned Wafers –

Superior Quality Competitive Pricing

Flange/Nipple

Synthetic resin

Tube/Adaptor

We partner with our suppliers to ensure the highest quality and most consistent product performance.

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Our high volume buying power enables us to obtain the lowest costs for our customers. –

Secure Supply Chain

We have developed solid relationships with silicon suppliers, such as SEH, SUMCO, MEMC and Komatsu and wafer fabs located worldwide.

Extensive Product Offering – With our high volumes, we are able to stock a large variety of film stacks. Check with us for an off the shelf solution to your custom application. Advanced Processes –

Many of our suppliers utilize leading edge process technologies. Check with us for hard to find,

Flexible –

We can tailor custom products and programs to meet your specific requirements.

Honesty and Integrity –

We value our long term business relationships with our customers and suppliers.

advanced wafer products.

Pacific Rim Manufacturing Extensive Semiconductor Experience – Currently supplying precision products to major semiconductor capital equipment manufacturers. Competitive Pricing – Full vertical integration using high quality, low cost suppliers in the Asia Pacific region. High Quality Sample Capabilities: – Precision Machining, Casting, Forging, Quartz, Injection Molding, Plastics machining, Surface Treatments Specialty Coatings, Stamping

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【WAFER PRODUCTS】 Bare Silicon Wafers ・Silicon Wafers from All Major Suppliers Komatsu Electronic Metals Co., Ltd / LG Siltron / MEMC Electronic Materials Inc. / Shin-Etsu Handotai, Ltd (SEH) Siltronic AG / Sumitomo Mitsubishi Silicon Group (SUMCO USA) / Toshiba Ceramics Co. Ltd. ・Select from All Grades of Silicon Wafers – Prime, Device Grade, Litho and Furnace Grade wafers – Low Particle Test Monitor wafers – Low Cost, Mechanical Grade Wafers – Reclaim, Solar Grade Wafers and Scrap ・Wide Variety of Silicon Wafer Types – Czochralski (CZ) grown silicon monocrystal – Float Zone (FZ) grown silicon monocrystal – Epitaxial silicon – Silicon on Insulator (SOI) ・Diameters – 300mm and 200mm Silicon wafers available in stock – Other diameters available on request ・Superior Quality －We partner with our suppliers to ensure the highest quality and most consistent product performance. ・Competitive Pricing －Our high volume buying power enables us to obtain the lowest costs for our customers. ・Secure Supply Chain －We have developed solid relationships with silicon suppliers, such as SEH, SUMCO, MEMC and Komatsu and wafer

fabs located

worldwide. ・Extensive Product Offering －With our high volumes, we are able to stock a large variety of film stacks. Check with us for an off the shelf solution to your custom application. ・Advanced Processes －Many of our suppliers utilize leading edge process technologies. Check with us for hard to find, advanced wafer products. ・Flexible －We can tailor custom products and programs to meet your specific requirements. Honesty and Integrity – At Advantec, we value our long term business relationships with our customers and suppliers.

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Blanket Film Test Wafers ・High Quality

・Wide Selection – We provide film stacks for many applications.

Check with

us for an off the shelf solution to your custom application.

・Flexible Solutions – We can provide custom blanket film test wafers for your unique requirements.

・NiSi – 300mm Nickel Silicide 200A film over 2,000A PE-TEOS. Available as a bare film or a patterned test wafer.

・WSi – 300mm Tungsten Silicide 1,000A film in a gate stack with 40A Gate Oxide. Also commonly combined in a stack with WN. Thickness as low as 50A. Available as bare film or patterned test wafer in 200mm or 300mm.

・WN – 300mm Tungsten Nitride film provides an excellent adhesion layer between Silicon and Tungsten. Also available in 200mm diameter.

・aC – 300mm Amorphous Carbon 2,000A film available with a variety of film stacks. This product is available as a patterned wafer with a line and space pattern with 90nm lines on 1:1 pitch.

Oxide:

Thermal SiO2

PE-SiO2 PE-TEOS

HDP

USG, PSG, BPSG

LPCVD-TEOS

Polysilicon:

(Doped/Undoped)

Low-k:

Black Diamond™

Metals:

Cu, Ta, TaN, W, Ti, TiN, Al, Ir, Pt, Ru and others

Nitride:

LP-SiN PE-SiN

BLOk™

CORAL™

FSG

SiON

Photoresists

Patterned Test Wafers •

High Quality – Advanced photolithography capability, provided from wafer fabs and other high quality suppliers located worldwide.

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Wide Selection – We provide film stacks for many applications. Check with us for an off the shelf solution to your custom application.

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Flexible Solutions – We can provide custom products for your unique requirements. Copyright ADVANTEC Co.,LTD.AllRights Reversed.

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Sample Patterned Test Wafers

CMP Characterization:

Cu, W, W-Via and STI

Dual Damascene Self Aligned Contacts i-Line KrF ArF: Bump Test Pattern

Other Wafers •

Extensive Supply – With our extensive global network, we can help you find exotic materials.

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We buy your scrap wafers!

Here is a sample of some of the wafer substrates that we can provide: ・Aluminum Setup Wafers

・Quartz Wafers

・Solar Grade Scrap Wafers

– Wafers made of solid aluminum

– Synthetic Quartz Substrate

– P−type

– 300mm diameter ± 1mm

– 300mm diameter ± 0.25mm

– Resistivity ≥ 1Ω−cm

– Thickness 0.8mm ± 0.2mm

– SEMI Standard Notch

– Whole wafers with

– No notch or flat

– Thickness 1.200mm ± 0.020mm

– Mill Finish

– Manufactured in Japan.

dielectric and metal films

・Other Wafers – Epitaxial, GaAs,SOI

Contact Advantec Co.,Ltd. Corporate Headquarters Address: 293-1 Minato Kitamachi, Saijyo city, Ehime,793-0046 Japan Tel:+81 897 53 7711 Fax: +81 897 53 7733 E-mail: [email protected]

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